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Jürgen Mohr

Dr. Jürgen Mohr

X-ray Imaging and Enhanced Lithography
Phone: +49 721 608-24433
juergen mohrQcj4∂kit edu

Karlsruhe Institute of Technology
Institute of Microstructure Technology
Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen

Jürgen Mohr has more than 30 years experience in microfabrication. As one of the first researchers active in the LIGA (X-ray lithography, Electroforming, Moulding) process, he has pioneered the work on deep X-ray lithography and it’s use in fabrication of high aspect ratio micro optical and micro mechanical components. He is co-author of one textbook on micro technology and has more than 150 Web of Science indexed publications in international journals. He is member of the IEEE-LEOS society. He represents KIT in the network Photonics BW and in the working group on micro optics of VDI/VDE Germany.

Today he is heading the research activities in X-ray optics and X-ray imaging. He is spokesperson of the KNMF (Karlsruhe Nano Micro Facility) a Helmholtz research infrastructures in nano micro fabrication and characterization, supervising also KNMF’s activities in X-ray lithography, laser lithography and 3D laserlithography.


1978 – 1983    Study of physics at the University of Karlsruhe
26/03/1983    University graduation as physicist. Diploma thesis in applied physics at the University Karlsruhe. Topic: “Photocurrent in ZnS crystals”
1983 – 1987    Thesis work for a PhD in Mechanical Engineering PhD thesis “Analyse der Defektursachen und der Genauigkeit der Strukturübertragung bei der Röntgentiefenlithographie mit Synchrotronstrahlung at the Research Centre / University, Karlsruhe, Germany; Supervisor Prof. Dr. Wolfgang Ehrfeld
17/12/1987    PhD in Mechanical Engineering (with distinction)

Scientific Career

1983 - 1986    Scientific employee, University Karlsruhe
1986 - 1992    Scientific employee, Research Centre Karlsruhe
1988 – 1992    Head of the research group Fundamentals of Deep X- Ray Lithography
1992 - 2010    Senior scientist, head of the department Micro Optics
Since 2010    Leading Scientist, head of the department X-ray optics and photonics, Spokesperson of the Research Infrastructure KNMF
Since 2011    Spokesperson of the Helmholtz virtual institute “New X-ray imaging methods”

Honors and Awards

1991   Nomination for professorship at Ulm University (Micro Technology and Precision Engineering)
2006   Rhenaphotonics Alsace Best Overall Product Award (in the frame of European Photonics Innovation Village)
2009   Medal of honor, VDE/VDI Society for microelectronic, micro system technology and precision engineering


Kornemann, E.; Márkus, O.; Opolka, A.; Zhou, T.; Greving, I.; Storm, M.; Krywka, C.; Last, A.; Mohr, J.
Miniaturized compound refractive X-ray zoom lens.
2017. Optics express, 25 (19), 22455-22466. doi:10.1364/OE.25.022455
Horn, F.; Gelse, K.; Jabari, S.; Hauke, C.; Kaeppler, S.; Ludwig, V.; Meyer, P.; Michel, T.; Mohr, J.; Pelzer, G.; Rieger, J.; Riess, C.; Seifert, M.; Anton, G.
High-energy x-ray Talbot-Lau radiography of a human knee.
2017. Physics in medicine and biology, 62 (16), 6729-6745. doi:10.1088/1361-6560/aa7721
Qureshi, A. A.; Klymyshyn, D. M.; Tayfeh, M.; Mazhar, W.; Borner, M.; Mohr, J.
Template-Based Dielectric Resonator Antenna Arrays for Millimeter-Wave Applications.
2017. IEEE transactions on antennas and propagation, 65 (9), 4576-4584. doi:10.1109/TAP.2017.2724585
Gromann, L. B.; De Marco, F.; Willer, K.; Noël, P. B.; Scherer, K.; Renger, B.; Gleich, B.; Achterhold, K.; Fingerle, A. A.; Muenzel, D.; Auweter, S.; Hellbach, K.; Reiser, M.; Baehr, A.; Dmochewitz, M.; Schroeter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Mohr, J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; Van Der Heijden, H.; Proksa, R.; Koehler, T.; Wieberneit, N.; Rindt, K.; Rummeny, E. J.; Pfeiffer, F.; Herzen, J.
In-vivo X-ray Dark-Field Chest Radiography of a Pig.
2017. Scientific reports, 7 (1), Art. Nr. 4807. doi:10.1038/s41598-017-05101-w
Schröter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Meiser, J.; Willer, K.; Gromann, L.; De Marco, F.; Herzen, J.; Noel, P.; Yaroshenko, A.; Hofmann, A.; Pfeiffer, F. ); Mohr, J.
Large field-of-view tiled grating structures for X-ray phase-contrast imaging.
2017. Review of scientific instruments, 88 (2), Art.Nr.: 029901. doi:10.1063/1.4975395
Rieger, J.; Meyer, P.; Horn, F.; Pelzer, G.; Michel, T.; Mohr, J.; Anton, G.
Optimization procedure for a Talbot-Lau x-ray phase-contrast imaging system.
2017. Journal of Instrumentation, 12 (4), Art. Nr.: P04018. doi:10.1088/1748-0221/12/04/P04018
Schröter, T. J.; Koch, F. J.; Kunka, D.; Meyer, P.; Tietze, S.; Engelhardt, S.; Zuber, M.; Baumbach, T.; Willer, K.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Reichert, K.-M.; Hofmann, A.; Mohr, J.
Large-area full field x-ray differential phase-contrast imaging using 2D tiled gratings.
2017. Journal of physics / D, 50 (22), Art.Nr. 225401. doi:10.1088/1361-6463/aa6e85
Koch, F. J.; O'Dowd, F. P.; Cardoso, M. B.; Da Silva, R. R.; Cavicchioli, M.; Ribeiro, S. J. L.; Schröter, T. J.; Faisal, A.; Meyer, P.; Kunka, D.; Mohr, J.
Low energy X-ray grating interferometry at the Brazilian Synchrotron.
2017. Optics communications, 393, 195-198. doi:10.1016/j.optcom.2017.02.055
Prade, F.; Schaff, F.; Senck, S.; Meyer, P.; Mohr, J.; Kastner, J.; Pfeiffer, F.
Nondestructive characterization of fiber orientation in short fiber reinforced polymer composites with X-ray vector radiography.
2017. NDT & E international, 86, 65-72. doi:10.1016/j.ndteint.2016.11.013
Nguyen, H. H. D.; Hollenbach, U.; Pfirrmann, S.; Ostrzinski, U.; Pfeiffer, K.; Hengsbach, S.; Mohr, J.
Photo-structurable polymer for interlayer single-mode waveguide fabrication by femtosecond laser writing.
2017. Optical materials, 66, 110–116. doi:10.1016/j.optmat.2017.01.037
Schröter, T. J.; Koch, F.; Meyer, P.; Baumann, M.; Münch, D.; Kunka, D.; Engelhardt, S.; Zuber, M.; Baumbach, T.; Mohr, J.
Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging.
2017. Journal of micro/nanolithography, MEMS and MOEMS, 16 (1), 013501. doi:10.1117/1.JMM.16.1.013501
Schröter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Meiser, J.; Willer, K.; Gromann, L.; De Marco, F.; Herzen, J.; Noel, P.; Yaroshenko, A.; Hofmann, A.; Pfeiffer, F.; Mohr, J.
Large field-of-view tiled grating structures for X-ray phase-contrast imaging.
2017. Review of scientific instruments, 88 (1), 015104. doi:10.1063/1.4973632
Krywka, C.; Last, A.; Marschall, F.; Márkus, O.; Georgi, S.; Müller, M.; Mohr, J.
Polymer compound refractive lenses for hard X-ray nanofocusing.
2016. AIP conference proceedings, 1764 (1), Art. Nr. 020001. doi:10.1063/1.4961129
Nazmov, V.; Reznikova, E.; Mohr, J.; Saile, V.; Tajiri, H.; Voigt, A.
Large-aperture two-dimensional x-ray refractive mosaic lenses.
2016. Applied optics, 55 (25), 7138-7141. doi:10.1364/AO.55.007138
Prade, F.; Fischer, K.; Heinz, D.; Meyer, P.; Mohr, J.; Pfeiffer, F.
Time resolved X-ray Dark-Field Tomography Revealing Water Transport in a Fresh Cement Sample.
2016. Scientific reports, 6, 29108/1-7. doi:10.1038/srep29108
Rieger, J.; Meyer, P.; Pelzer, G.; Weber, T.; Michel, T.; Mohr, J.; Anton, G.
Designing the phase grating for Talbot-Lau phase-contrast imaging systems: a simulation and experiment study.
2016. Optics express, 24 (12), 13357-13364. doi:10.1364/OE.24.013357
Meiser, J.; Willner, M.; Schröter, T.; Hofmann, A.; Rieger, J.; Koch, F.; Birnbacher, L.; Schüttler, M.; Kunka, D.; Meyer, P.; Faisal, A.; Amberger, M.; Duttenhofer, T.; Weber, T.; Hipp, A.; Ehn, S.; Walter, M.; Herzen, J.; Schulz, J.; Pfeiffer, F.; Mohr, J.
Increasing the field of view in grating based X-ray phase contrast imaging using stitched gratings.
2016. Journal of X-Ray Science and Technology, 24 (3), 379-388. doi:10.3233/XST-160552
Marschall, F.; Last, A.; Simon, M.; Vogt, H.; Mohr, J.
Simulation of aperture-optimised refractive lenses for hard X-ray full field microscopy.
2016. Optics express, 24 (10), 10880-10889. doi:10.1364/OE.24.010880
Koch, F. J.; Detlefs, C.; Schröter, T. J.; Kunka, D.; Last, A.; Mohr, J.
Quantitative characterization of X-ray lenses from two fabrication techniques with grating interferometry.
2016. Optics express, 24 (9), 9168-9177. doi:10.1364/OE.24.009168
Birnbacher, L.; Willner, M.; Velroyen, A.; Marschner, M.; Hipp, A.; Meiser, J.; Koch, F.; Schröter, T.; Kunka, D.; Mohr, J.; Pfeiffer, F.; Herzen, J.
Experimental Realisation of High-sensitivity Laboratory X-ray Grating-based Phase-contrast Computed Tomography.
2016. Scientific reports, 6 (4), 24022. doi:10.1038/srep24022
Nguyen, H. H. D.; Hollenbach, U.; Ostrzinski, U.; Pfeiffer, K.; Hengsbach, S.; Mohr, J.
Freeform three-dimensional embedded polymer waveguides enabled by external-diffusion assisted two-photon lithography.
2016. Applied optics, 55 (8), 1906-1912. doi:10.1364/AO.55.001906
Schüttler, M.; Meyer, P.; Schaff, F.; Yaroshenko, A.; Kunka, D.; Besser, H.; Pfeiffer, F.; Mohr, J.
Height control for small periodic structures using x-ray radiography.
2016. Measurement science and technology, 27 (2), 025015. doi:10.1088/0957-0233/27/2/025015
Nazmov, V.; Reznikova, E.; Mohr, J.; Voigt, A.
A method of mechanical stabilization of ultra-high-AR microstructures.
2016. Journal of materials processing technology, 231, 319-325. doi:10.1016/j.jmatprotec.2015.12.002
Koch, F. J.; Schröter, T. J.; Kunka, D.; Meyer, P.; Meiser, J.; Faisal, A.; Khalil, M. I.; Birnbacher, L.; Viermetz, M.; Walter, M.; Schulz, J.; Pfeiffer, F.; Mohr, J.
Note: Gratings on low absorbing substrates for x-ray phase contrast imaging.
2015. Review of scientific instruments, 86, 126114/1-3. doi:10.1063/1.4939055
Aligodarz, M. T.; Klymyshyn, D. M.; Rashidian, A.; Börner, M.; Shafai, L.; Mohr, J.
Investigations on photoresist-based artificial dielectrics with tall-embedded metal grids and their resonator antenna application.
2015. IEEE transactions on antennas and propagation, 63, 3826-3838. doi:10.1109/TAP.2015.2452966
Nazmov, V.; Mohr, J.; Greving, I.; Ogurreck, M.; Wilde, F.
Modified x-ray polymer refractive cross lens with adiabatic contraction and its realization.
2015. Journal of micromechanics and microengineering, 25, 055010/1-7. doi:10.1088/0960-1317/25/5/055010
Nazmov, V.; Reznikova, E.; Mohr, J.; Schulz, J.; Voigt, A.
Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography.
2015. Journal of materials processing technology, 225, 170-177. doi:10.1016/j.jmatprotec.2015.05.030
Koch, F.; Marschall, F.; Meiser, J.; Markus, O.; Faisal, A.; Schröter, T.; Meyer, P.; Kunka, D.; Last, A.; Mohr, J.
Increasing the aperture of x-ray mosaic lenses by freeze drying.
2015. Journal of micromechanics and microengineering, 25 (7), Art. Nr. 075015. doi:10.1088/0960-1317/25/7/075015
Ruiz-Yaniz, M.; Zanette, I.; Rack, A.; Weitkamp, T.; Meyer, P.; Mohr, J.; Pfeiffer, F.
X-ray-refractive-index measurements at photon energies above 100 keV with a grating interferometer.
2015. Physical review / A, 91, 033803/1-5. doi:10.1103/PhysRevA.91.033803
Ruiz-Yaniz, M.; Koch, F.; Zanette, I.; Rack, A.; Meyer, P.; Kunka, D.; Hipp, A.; Mohr, J.; Pfeiffer, F.
X-ray grating interferometry at photon energies over 180 keV.
2015. Applied physics letters, 106, 151105/1-4. doi:10.1063/1.4917293
Pelzer, G.; Zang, A.; Anton, G.; Bayer, F.; Horn, F.; Kraus, M.; Rieger, J.; Ritter, A.; Wandner, J.; Weber, T.; Fauler, A.; Fiederle, M.; Wong, W. S.; Campbell, M.; Meiser, J.; Meyer, P.; Mohr, J.; Michel, T.
Energy weighted x-ray dark-field imaging.
2014. Optics Express, 22 (20), 24507-24515. doi:10.1364/OE.22.024507
Hipp, A.; Willner, M.; Herzen, J.; Auweter, S.; Chabior, M.; Meiser, J.; Achterhold, K.; Mohr, J.; Pfeiffer, F.
Energy-resolved visibility analysis of grating interferometers operated at polychromatic X-ray sources.
2014. Optics Express, 22 (25), 30394-30409. doi:10.1364/OE.22.030394
Fu, J.; Willner, M.; Chen, L.; Tan, R.; Achterhold, K.; Bech, M.; Herzen, J.; Kunka, D.; Mohr, J.; Pfeiffer, F.
Helical differential X-ray phase-contrast computed tomography.
2014. Physica Medica, 30 (3), 374-379. doi:10.1016/j.ejmp.2014.01.005
Nazmov, V.; Mohr, J.; Vogt, H.; Simon, R.; Diabate, S.
Multi-field X-ray microscope based on array of refractive lenses.
2014. Journal of Micromechanics and Microengineering, 24, 075005/1-9. doi:10.1088/0960-1317/24/7/075005
Lang, S.; Zanette, I.; Dominietto, M.; Langer, M.; Rack, A.; Schulz, G.; Le Duc, G.; David, C.; Mohr, J.; Pfeiffer, F.; Müller, B.; Weitkamp, T.
Experimental comparison of grating- and propagation-based hard X-ray phase tomography of soft tissue.
2014. Journal of Applied Physics, 116, 154903/1-14. doi:10.1063/1.4897225
Kunka, D.; Mohr, J.; Nazmov, V.; Meiser, J.; Meyer, P.; Amberger, M.; Koch, F.; Schulz, J.; Walter, M.; Duttenhofer, T.; Voigt, A.; Ahrens, G.; Grützner, G.
Characterization method for new resist formulations for HAR patterns made by X-ray lithography.
2014. Microsystem Technologies, 20, 2023-2029. doi:10.1007/s00542-013-2055-x
Meiser, J.; Amberger, M.; Willner, M.; Kunka, D.; Meyer, P.; Koch, F.; Hipp, A.; Walter, M.; Pfeiffer, F.; Mohr, J.
Increasing the field of view of X-ray phase contrast imaging using stitched gratings on low absorbent carriers.
2014. Medical Imaging 2014 : Physics of Medical Imaging, San Diego, Calif., February 15-20, 2014. Ed.: B. R. Whiting, Article no 903355, SPIE, Bellingham, WA. doi:10.1117/12.2043479
Heneka, J.; Guttmann, M.; Plewa, K.; Mohr, J.; Hanemann, T.; Saile, V.
LIGA2.X process for mass production of single polymeric LIGA micro parts.
2014. Microsystem Technologies, 20, 1955-1960. doi:10.1007/s00542-013-2015-5
Vogt, H.; Last, A.; Mohr, J.; Marschall, F.; Mettendorf, K. U.; Eisenhower, R.; Simon, M.
Low-cost rolled X-ray prism lenses to increase photon flux density in diffractometry experiments.
2014. Powder diffraction, 29 (2), 118-122. doi:10.1017/S0885715614000177
Fu, J.; Biernath, T.; Tan, R.; Willner, M.; Wang, Q.; Amberger, M.; Meiser, J.; Mohr, J.; Walter, M.; Schulz, J.; Herzen, J.; Bech, M.; Pfeiffer, F.
Differential x-ray phase-contrast computed laminography in cone-beam geometry.
2014. Europhysics Letters, 106, 68022/1-6. doi:10.1209/0295-5075/106/68002
Nguyen, D.; Kaleta, K.; Hengsbach, S.; Ostrzinski, U.; Pfeiffer, K.; Hollenbach, U.; Mohr, J.
Three-dimensional buried polymer waveguides via femtosecond direct laser writing with two-photon absorption.
2014. Micro Optics 2014 : Proceedings of Photonics Europe, Bruxelles, B, April 14-17, 2014. Ed.: H. Thienpont, Article no 91300N, SPIE, Bellingham, WA. doi:10.1117/12.2051326
Marschall, F.; Last, A.; Simon, M.; Kluge, M.; Nazmov, V.; Vogt, H.; Ogurreck, M.; Greving, I.; Mohr, J.
X-ray full field microscopy at 30 KeV.
2014. Journal of Physics: Conference Series, 499, 012007/1-6. doi:10.1088/1742-6596/499/1/012007
Yaroshenko, A.; Bech, M.; Potdevin, G.; Malecki, A.; Biernath, T.; Wolf, J.; Tapfer, A.; Schüttler, M.; Meiser, J.; Kunka, D.; Amberger, M.; Mohr, J.; Pfeiffer, F.
Non-binary phase gratings for x-ray imaging with a compact Talbot interferometer.
2014. Optics express, 22 (1), 547-556. doi:10.1364/OE.22.000547
Willner, M.; Bech, M.; Herzen, J.; Zanette, I.; Hahn, D.; Kenntner, J.; Mohr, J.; Rack, A.; Weitkamp, T.; Pfeiffer, F.
Quantitative X-ray phase-contrast computed tomography at 82 keV.
2013. Optics Express, 21 (4), 4155-4166. doi:10.1364/OE.21.004155
Rutishauser, S.; Bednarzik, M.; Zanette, I.; Weitkamp, T.; Börner, M.; Mohr, J.; David, C.
Fabrication of two-dimensional hard X-ray diffraction gratings.
2013. Microelectronic Engineering, 101, 12-16. doi:10.1016/j.mee.2012.08.025
Nazmov, V.; Mohr, J.; Simon, R.
Mosaic-like micropillar array for hard x-ray focusing - One-dimensional version.
2013. Journal of Micromechanics and Microengineering, 23 (9), 095015/1-8. doi:10.1088/0960-1317/23/9/095015
Jensen, T. H.; Bech, M.; Binderup, T.; Böttiger, A.; David, C.; Weitkamp, T.; Zanette, I.; Reznikova, E.; Mohr, J.; Rank, F.; Feidenhans'l, R.; Kjaer, A.; Hojgaard, L.; Pfeiffer, F.
Imaging of Metastatic Lymph Nodes by X-ray Phase-Contrast Micro-Tomography.
2013. PLoS ONE, 8 (1), e54047. doi:10.1371/journal.pone.0054047
Fukui, H.; Simon, M.; Nazmov, V.; Mohr, J.; Evans-Lutterodt, K.; Stein, A.; Baron, A. Q. R.
Large-aperture refractive lenses for momentum-resolved spectroscopy with hard X-rays.
2013. Journal of Synchrotron Radiation, 20 (4), 591-595. doi:10.1107/S0909049513011722
Ogurreck, M.; Wilde, F.; Herzen, J.; Beckmann, F.; Nazmov, V.; Mohr, J.; Haibel, A.; Müller, M.; Schreyer, A.
The nanotomography endstation at the PETRA III imaging beamline.
2013. Journal of Physics: Conference Series, 425, 182002/1-5. doi:10.1088/1742-6596/425/18/182002
Li, J.; Billah, M. R.; Schindler, P. C.; Lauermann, M.; Schuele, S.; Hengsbach, S.; Hollenbach, U.; Mohr, J.; Koos, C.; Freude, W.; Leuthold, J.
Four-in-one interferometer for coherent and self-coherent detection.
2013. Optics Express, 21 (11), 13293-13304. doi:10.1364/OE.21.013293


Gratings for X-ray imaging, consisting of at least two materials; Juergen Mohr, Joachim Schulz, Elena Reznikova, Franz Pfeiffer, US 9230703; 13/703,826 (2016)