Jürgen Mohr has more than 30 years experience in microfabrication. As one of the first researchers active in the LIGA (X-ray lithography, Electroforming, Moulding) process, he has pioneered the work on deep X-ray lithography and it’s use in fabrication of high aspect ratio micro optical and micro mechanical components. He is co-author of one textbook on micro technology and has more than 150 Web of Science indexed publications in international journals. He is member of the IEEE-LEOS society. He represents KIT in the network Photonics BW and in the working group on micro optics of VDI/VDE Germany.
Today he is heading the research activities in X-ray optics and X-ray imaging. He is spokesperson of the KNMF (Karlsruhe Nano Micro Facility) a Helmholtz research infrastructures in nano micro fabrication and characterization, supervising also KNMF’s activities in X-ray lithography, laser lithography and 3D laserlithography.
|1978 – 1983||Study of physics at the University of Karlsruhe|
|26/03/1983||University graduation as physicist. Diploma thesis in applied physics at the University Karlsruhe. Topic: “Photocurrent in ZnS crystals”|
|1983 – 1987||Thesis work for a PhD in Mechanical Engineering PhD thesis “Analyse der Defektursachen und der Genauigkeit der Strukturübertragung bei der Röntgentiefenlithographie mit Synchrotronstrahlung” at the Research Centre / University, Karlsruhe, Germany; Supervisor Prof. Dr. Wolfgang Ehrfeld|
|17/12/1987||PhD in Mechanical Engineering (with distinction)|
|1983 - 1986||Scientific employee, University Karlsruhe|
|1986 - 1992||Scientific employee, Research Centre Karlsruhe|
|1988 – 1992||Head of the research group Fundamentals of Deep X- Ray Lithography|
|1992 - 2010||Senior scientist, head of the department Micro Optics|
|Since 2010||Leading Scientist, head of the department X-ray optics and photonics, Spokesperson of the Research Infrastructure KNMF|
|Since 2011||Spokesperson of the Helmholtz virtual institute “New X-ray imaging methods”|
Honors and Awards
|1991||Nomination for professorship at Ulm University (Micro Technology and Precision Engineering)|
|2006||Rhenaphotonics Alsace Best Overall Product Award (in the frame of European Photonics Innovation Village)|
|2009||Medal of honor, VDE/VDI Society for microelectronic, micro system technology and precision engineering|