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Introduction to Microsystem Technology II

Introduction to Microsystem Technology II
Type: Lecture
Chair: Department of Mechanical Engineering
Semester: SS 2017
Time:

Thu, 14:00 - 15:30 weekly
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude
2017-04-27
14:00 - 15:30

2017-05-04
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-05-11
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-05-18
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-06-01
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-06-08
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-06-22
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-06-29
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-07-06
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-07-13
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-07-20
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

2017-07-27
14:00 - 15:30
10.91 Redtenbacher-Hörsaal 10.91 Maschinenbau, Altes Maschinenbaugebäude

Start: 27.04.2017
Lecturer:

Prof. Dr. Jan Gerrit Korvink
Dr. Vlad Badilita

SWS: 2
Lv-No.: 2142874
Exam: written exam
Information:

Exams and practical exercises take place in the semester breaks.
The practical exercise takes place in the first complete week in September, the written exam in the week after the practical exercise.
Registration for the practical exercise via email to mst@imt.kit.edu until 14.7.2017.

Lecture language: English

 

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In the first part, methods for lithographic pattern transfer are summarized. Then specific techniques such as the LIGA process, micro-machining, and laser-patterning are explained and examples are given. Finally assembly and packaging methods are presented leading into a discussion of entire microsystems.

 

Content of teaching

  • Introduction in Nano- and Microtechnologies
  • Lithography
  • LIGA-technique
  • Mechanical microfabrication
  • Patterning with lasers
  • Assembly and packaging
  • Microsystems

 

Bibliography

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011