Institute of Microstructure Technology (IMT)

Introduction to Microsystem Technology II

  • Type: Lecture
  • Chair: Department of Mechanical Engineering
  • Semester: SS 2020
  • Time:

    ILIAS course
    Thu, 14:00 - 15:30 weekly
    2020-04-23

    2020-04-30
    2020-05-07
    2020-05-14
    2020-05-28
    2020-06-04
    2020-06-18
    2020-06-25
    2020-07-02
    2020-07-09
    2020-07-16
    2020-07-23

  • Start: All dates are subject to change.
  • Lecturer: Prof. Dr. Jan Gerrit Korvink
    Dr. Vlad Badilita
  • SWS: 2
  • Lv-No.: 2142874
  • Exam: written exam
  • Information:

    Exams and practical exercises take place in the semester breaks.
    The practical exercise takes place in the second complete week in September (14.-18.9.2020), the written exam in the week after the practical exercise.
    Registration for the practical exercise via email to mst@imt.kit.edu until 10.7.2020.

    Next exams:

    MST II: Di, 8.9.2020, 9-10 Uhr, Zelt auf dem Forum
    MST I: Do, 10.9.2020, 17-18 Uhr, Zelt auf dem Forum
    MST-Praktikum: Do, 24.9.2020, 9-10 Uhr, Geb. 40.44, Halle 2

Lecture language: English

 

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In the first part, methods for lithographic pattern transfer are summarized. Then specific techniques such as the LIGA process, micro-machining, and laser-patterning are explained and examples are given. Finally assembly and packaging methods are presented leading into a discussion of entire microsystems.

 

Content of teaching

  • Introduction in Nano- and Microtechnologies
  • Lithography
  • LIGA-technique
  • Mechanical microfabrication
  • Patterning with lasers
  • Assembly and packaging
  • Microsystems

 

Bibliography

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011