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Introduction to Microsystem Technology I

Introduction to Microsystem Technology I
Type: Lecture
Chair: Department of Mechanical Engineering
Semester: WS 19/20
Time:

Thu, 14:00 - 15:30 weekly
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude
2019-10-17
14:00 - 15:30

2019-10-24
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-10-31
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-11-07
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-11-14
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-11-21
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-11-28
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-12-05
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-12-12
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2019-12-19
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2020-01-09
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2020-01-16
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2020-01-23
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2020-01-30
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

2020-02-06
14:00 - 15:30
10.91 Grashof-Hörsaal, 10.91 Maschinenbau, Altes Maschinenbaugebäude

Start: 17.10.2019
Lecturer: Dr. Vlad Badilita
Prof. Dr. Jan Gerrit Korvink
SWS: 2
Lv-No.: 2141861
Exam: written exam
Information:

Exams and practical exercises take place in the semester breaks.
The practical exercise takes place in the week after Ash Wednesday (2. - 6.3.2020), the written exam two weeks after the practical exercise at 19.3.2020.
Registration for the practical exercise via email to mst@imt.kit.edu.

Next exam: 19.3.2020

8-9h                MST I
9h30-10h30     MST Practical Course
11-12h            MST II

Bldg 50.35, "Hörsaal am Fasanengarten"

Lecture language: English
 

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In analogy to processes employed in fabrication of microelectronics circuits the core technologies as well as materials for producing microstructures and components are presented. Finally, various techniques for Silicon micromachining are explained and illustrated with examples for micro-components and micro-systems.

 

Content of teaching

  • Introduction in Nano- and Microtechnologies
  • Silicon and processes for fabricating microelectronics circuits
  • Basic physics background and crystal structure
  • Materials for micromachining
  • Processing technologies for microfabrication
  • Silicon micromachining
  • Examples

 

Bibliography

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011