Introduction to Microsystem Technology - Practical Course / Practical Laboratory Course

  • Type: Practical Exercise
  • Chair: Department of Mechanical Engineering
  • Semester: WS 23/24
  • Place:


    IMT-Labor, Campus Nord, Building 307

  • Time:


    one week block course
    IMT - Building 301
    Campus north
    in the week after Ash-Wednesday

  • Lecturer:

      Dr. Arndt Last

  • SWS: 2
  • Lv-No.: 2143875 Practical Course
    2143877 Laboratory Course
  • Information:


    Registration for the practical course is only possible by sending an email to, not before 15.1.2024, 8h00:00 a.

    m., then first come, first served."



Menz, W., Mohr, J.: Mikrosystemtechnik für Ingenieure, VCH-Verlag, Weinheim, 1997
Unterlagen zum Praktikum zur Vorlesung ' Grundlagen der Mikrosystemtechnik'