Introduction to Microsystem Technology II

  • Type: Lecture
  • Chair: Department of Mechanical Engineering
  • Semester: SS 2021
  • Time:

    Online
    Thu, 14:00 - 15:30 weekly
    2021-04-15

    2021-04-22
    2021-04-29
    2021-05-06
    2021-05-20
    2021-06-10
    2021-06-17
    2021-06-24
    2021-07-01
    2021-07-08
    2021-07-15
    2021-07-22

  • Start: 15.04.2021
  • Lecturer: Prof. Dr. Jan Gerrit Korvink
    Dr. Vlad Badilita
  • SWS: 2
  • Lv-No.: 2142874
  • Exam: written exam
  • Information:

    Exams and practical exercises take place in the semester breaks.
    The practical exercise takes place in the third complete week in September (20.-24.9.2021).
    Registration for the practical exercise via email to mst@imt.kit.edu until 16.7.2021.

    Next exams:

    76-T-MACH-105183 Grundlagen der Mikrosystemtechnik II - 01.09.2021 - 11:00 - 12:00 (Zugang ab 10:30) - Zelt auf dem Forum (großes Zelt)

    76-T-MACH-105182 Grundlagen der Mikrosystemtechnik I - 01.09.2021 - 14:30 - 15:30 (Zugang ab 14:00) - Zelt auf dem Forum (großes Zelt)

    76-T-MACH-102164 Praktikum zu Grundlagen der Mikrosystemtechnik - 30.09.2021, 10:30 bis 11:30 Uhr in Geb. 20.40 Fritz-Haller Hörsaal (HS37)

Lecture language: English

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In the first part, methods for lithographic pattern transfer are summarized. Then specific techniques such as the LIGA process, micro-machining, and laser-patterning are explained and examples are given. Finally assembly and packaging methods are presented leading into a discussion of entire microsystems.

Content of teaching

  • Introduction in Nano- and Microtechnologies
  • Lithography
  • LIGA-technique
  • Mechanical microfabrication
  • Patterning with lasers
  • Assembly and packaging
  • Microsystems

Bibliography

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011