Introduction to Microsystem Technology II

  • Type: Lecture
  • Chair: Department of Mechanical Engineering
  • Semester: SS 2022
  • Time: Th 2022-04-21
    14:00 - 15:30, weekly


    Th 2022-04-28
    14:00 - 15:30, weekly

    Th 2022-05-05
    14:00 - 15:30, weekly

    Th 2022-05-12
    14:00 - 15:30, weekly

    Th 2022-05-19
    14:00 - 15:30, weekly

    Th 2022-06-02
    14:00 - 15:30, weekly

    Th 2022-06-23
    14:00 - 15:30, weekly

    Th 2022-06-30
    14:00 - 15:30, weekly

    Th 2022-07-07
    14:00 - 15:30, weekly

    Th 2022-07-14
    14:00 - 15:30, weekly

    Th 2022-07-21
    14:00 - 15:30, weekly

    Th 2022-07-28
    14:00 - 15:30, weekly


  • Start: 21.04.2022
  • Lecturer: Prof. Dr. Jan Gerrit Korvink
    Dr. Vlad Badilita
  • SWS: 2
  • Lv-No.: 2142874
  • Exam: written exam
  • Information:

    Exams and practical exercises take place in the semester breaks.
    The practical exercise takes place in the third complete week in September (20.-24.9.2022).
    Registration for the practical exercise via email to mst@imt.kit.edu until 16.7.2022.

    Next exams:

    76-T-MACH-105182 Grundlagen der Mikrosystemtechnik I - 02.09.2022 - 13:00 - 14:00 (Zugang ab 12:30) - 30.95 Audimax und parallel in 50.35 Hörsaal am Fasanengarten

    76-T-MACH-105183 Grundlagen der Mikrosystemtechnik II - 02.09.2022 - 11:00 - 12:00 (Zugang ab 10:30) - 30.95 Audimax und parallel in 50.35 Hörsaal am Fasanengarten

    76-T-MACH-102164 Praktikum zu Grundlagen der Mikrosystemtechnik - 22.09.2022, 10:30 bis 11:30 Uhr (Zugang ab 10:00) Uhr in Geb. 10.11 Hertz-Hörsaal

Lecture language: English

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In the first part, methods for lithographic pattern transfer are summarized. Then specific techniques such as the LIGA process, micro-machining, and laser-patterning are explained and examples are given. Finally assembly and packaging methods are presented leading into a discussion of entire microsystems.

Content of teaching

  • Introduction in Nano- and Microtechnologies
  • Lithography
  • LIGA-technique
  • Mechanical microfabrication
  • Patterning with lasers
  • Assembly and packaging
  • Microsystems

Bibliography

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011