Introduction to Microsystem Technology I


Lecture language: English

Learning Goals

The lecture gives an introduction into the basics of microsystems technology. In analogy to processes employed in fabrication of microelectronics circuits the core technologies as well as materials for producing microstructures and components are presented. Finally, various techniques for Silicon micromachining are explained and illustrated with examples for micro-components and micro-systems.

Content of teaching

  • Introduction in Nano- and Microtechnologies
  • Silicon and processes for fabricating microelectronics circuits
  • Basic physics background and crystal structure
  • Materials for micromachining
  • Processing technologies for microfabrication
  • Silicon micromachining
  • Examples


Mikrosystemtechnik für Ingenieure, W. Menz und J. Mohr, VCH Verlagsgesellschaft, Weinheim 2005

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011