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X-ray Imaging and Enhanced Lithography

Dr. Jürgen Mohr

The research and development activities concentrate on two main topics.

The activities in X-ray imaging follow the interest to improve X-ray imaging technologies for X-ray medical diagnostics as well as materials analysis. We are applying the high aspect ratio patterning technologies which are available at KIT through KNMF to develop and fabricate new X-ray optical components, like Compound Refractive X-ray Lenses (CRL) with focal spot size down to 100 nm for sample illumination and full filed X-ray microscopy at energies higher than 15 keV as well as X-ray prism lenses or multi focus lenses for beam shaping. We are targeting for application of those components at synchrotron beamlines at X-ray tubes and at X-FELs. X-ray gratings as the main components in grating based X-ray interferometry are developed and optimized in quality with the clear aim to bring this imaging technique to commercial application. Based on these gratings we are building new imaging set-ups for evaluating specific imaging applications together with our collaboration partners. By using the extraordinary possibilities of 3D micro patterning we are analyzing new optical concepts in the X-ray regime. In addition we are demonstrating the components performance and advantages in different applications. We also intend to combine X-ray imaging with other imaging technologies to receive correlated information.

The activities in lithography follow the aim to fabricate high aspect ratio 3-dimensinal structures using either X-ray lithography, laser lithography or 3D-laser patterning. These technologies can be accessed via KNMF. With our developments we are improving their performance and establish new process schemes. In deep X-ray lithography we are following new exposure strategies to minimize secondary effects to achieve higher structural quality. In 3D-laser writing we aim to fulfill application driven needs by increasing the writing volume and by establishing process modifications.


Photo: BMBF
IMT Receives Funding for Two German-Japanese Projects

Two of the three collaborative research projects which are funded by the BMBF on the topic of “Optics and Photonics” are headed by IMT. Next to Japanese partners from academia and industries the spin-off from KIT, microworks and Vanguard Photonics, are also part of the consortia (Photo: BMBF).

Press Release BMBF

Refractive x-ray lenses from KIT/IMT.
IMT’s compound refractive X-ray lenses in user operation at ESRF, ID01

ESRF announced that the Full Field Diffraction X-ray Microscopy (FFDXM) end station at the ID01 is now open to user experiments. This new method uses X-ray lenses from KIT/IMT specially designed for the imaging part of the setup.

X-ray beam shaping by polymer lenses
IMT’s beam shaping X-ray optics awarded at XRM 2016

Ottó Márkus, Ph.D. student in the X-ray optics group, was awarded with the best poster price at the X-ray microscopy conference XRM 2016 for his poster entitled “X-ray beam shaping by polymer lenses”.