View source for Jenoptic-Scanner, Fa. Jenoptik (Litho 1)/English

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'''Device name:'''

'''Operator/Responsible for this device:'''

'''Position:'''

'''Device designation:'''
<!-- Designation as per the list of fabrication and measurement devices list, (Fertigungs- und Prüfmittelliste) , e.g. (MI006) -->

== Short Description ==


== Alternatives ==
Are there other devices at IMT with the same or a similar application? Please name them and their differences or similarities, and link them here. YOu can find the correct link name in the [[Prüfmittel_Liste_-_List_of_Measurement_Devices| list of measurement devices]] or in the [[Liste der Fertigungsmittel - List of Manufacturing Equipment| list of fabrication devices]].

== Device Specifications ==
(Additional) equipment and functions, e.g. process gasses, wavelengths, resolution, smallest achievable feature size
(Zusätzliche) Ausstattung und Funktionen, z.B. Prozessgase, Wellenlängen, Auflösung, Strukturdimensionen

== Established Processes ==
Which processes have been compelted successfully with this device, what materials have been structured, testet or processed?
Please don't enter any process parameters and sensible details into the wiki, but add the path to J: network drive where the detaisl are described or link a user who knows about the process.

== Restrictions ==
What can not and/or should not be done with the device, i.e. are there materials that could impair the performance of the device if they are structured with, e.g. nickel inside the RIE? Are there other precautions that have to be taken for sample preparation?

== Instructed Users ==
Persons who have recieved an instruction and thus are allowed to operate the device.
Please create a list and link them to the user profiles: 
* [[User:Vorname.Nachname | Nachname, Vorname]]