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	<id>https://www.imt.kit.edu/wiki/index.php?action=history&amp;feed=atom&amp;title=AMOS-PLQY%2FEnglish</id>
	<title>AMOS-PLQY/English - Revision history</title>
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	<link rel="alternate" type="text/html" href="https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;action=history"/>
	<updated>2026-05-13T20:19:20Z</updated>
	<subtitle>Revision history for this page on the wiki</subtitle>
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	<entry>
		<id>https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=6966&amp;oldid=prev</id>
		<title>Ian.Howard at 09:06, 6 March 2019</title>
		<link rel="alternate" type="text/html" href="https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=6966&amp;oldid=prev"/>
		<updated>2019-03-06T09:06:34Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 11:06, 6 March 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 11:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 11:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Device name:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Device name:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Operator/Responsible for this device:&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&#039;&lt;/del&gt;Dmitry Busko, Vinay Kumar&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&#039;&lt;/del&gt;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Operator/Responsible for this device:Dmitry Busko, Vinay Kumar&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Position:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Position:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ian.Howard</name></author>
	</entry>
	<entry>
		<id>https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=6965&amp;oldid=prev</id>
		<title>Ian.Howard at 09:06, 6 March 2019</title>
		<link rel="alternate" type="text/html" href="https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=6965&amp;oldid=prev"/>
		<updated>2019-03-06T09:06:03Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 11:06, 6 March 2019&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 11:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 11:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Device name:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Device name:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Operator/Responsible for this device:&#039;&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;&#039;&lt;/del&gt;&#039;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Operator/Responsible for this device:&#039;&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;Dmitry Busko, Vinay Kumar&lt;/ins&gt;&#039;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;br /&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Position:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;&#039;&#039;&#039;Position:&#039;&#039;&#039;&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>Ian.Howard</name></author>
	</entry>
	<entry>
		<id>https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=5737&amp;oldid=prev</id>
		<title>WikiSysop at 18:20, 19 November 2016</title>
		<link rel="alternate" type="text/html" href="https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=5737&amp;oldid=prev"/>
		<updated>2016-11-19T18:20:48Z</updated>

		<summary type="html">&lt;p&gt;&lt;/p&gt;
&lt;table style=&quot;background-color: #fff; color: #202122;&quot; data-mw=&quot;interface&quot;&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;col class=&quot;diff-marker&quot; /&gt;
				&lt;col class=&quot;diff-content&quot; /&gt;
				&lt;tr class=&quot;diff-title&quot; lang=&quot;en&quot;&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;← Older revision&lt;/td&gt;
				&lt;td colspan=&quot;2&quot; style=&quot;background-color: #fff; color: #202122; text-align: center;&quot;&gt;Revision as of 20:20, 19 November 2016&lt;/td&gt;
				&lt;/tr&gt;&lt;tr&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 40:&lt;/td&gt;
  &lt;td colspan=&quot;2&quot; class=&quot;diff-lineno&quot;&gt;Line 40:&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Persons who have recieved an instruction and thus are allowed to operate the device.&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Persons who have recieved an instruction and thus are allowed to operate the device.&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Please create a list and link them to the user profiles: &lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;Please create a list and link them to the user profiles: &lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;tr&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;−&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* [[&lt;del style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;Benutzer&lt;/del&gt;:Vorname.Nachname | Nachname, Vorname]]&lt;/div&gt;&lt;/td&gt;
  &lt;td class=&quot;diff-marker&quot; data-marker=&quot;+&quot;&gt;&lt;/td&gt;
  &lt;td style=&quot;color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;&quot;&gt;&lt;div&gt;* [[&lt;ins style=&quot;font-weight: bold; text-decoration: none;&quot;&gt;User&lt;/ins&gt;:Vorname.Nachname | Nachname, Vorname]]&lt;/div&gt;&lt;/td&gt;
&lt;/tr&gt;
&lt;/table&gt;</summary>
		<author><name>WikiSysop</name></author>
	</entry>
	<entry>
		<id>https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=4191&amp;oldid=prev</id>
		<title>Ian.Howard: Die Seite wurde neu angelegt: „{{ers:Geräte-Devices/English}}“</title>
		<link rel="alternate" type="text/html" href="https://www.imt.kit.edu/wiki/index.php?title=AMOS-PLQY/English&amp;diff=4191&amp;oldid=prev"/>
		<updated>2016-05-17T08:32:22Z</updated>

		<summary type="html">&lt;p&gt;Die Seite wurde neu angelegt: „{{ers:Geräte-Devices/English}}“&lt;/p&gt;
&lt;p&gt;&lt;b&gt;New page&lt;/b&gt;&lt;/p&gt;&lt;div&gt;&amp;lt;!--&lt;br /&gt;
If you want to use pictures on this page, use the file upload command on the sidebar.&lt;br /&gt;
Please try to keep the file size below 100kB.&lt;br /&gt;
You can adjust the width of the image by changing the following parameter&lt;br /&gt;
&amp;lt;Display width in pixel&amp;gt; = 300px&lt;br /&gt;
The &amp;lt;&amp;gt; are placeholder symbols and are not part of the actual syntax command.&lt;br /&gt;
--&amp;gt;&lt;br /&gt;
[[File:&amp;lt;File name&amp;gt;|&amp;lt;Display width in pixel&amp;gt;|thumb|right|&amp;lt;Figure caption&amp;gt;]]&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
&amp;#039;&amp;#039;&amp;#039;Device name:&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
&lt;br /&gt;
&amp;#039;&amp;#039;&amp;#039;Operator/Responsible for this device:&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
&lt;br /&gt;
&amp;#039;&amp;#039;&amp;#039;Position:&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
&lt;br /&gt;
&amp;#039;&amp;#039;&amp;#039;Device designation:&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
&lt;br /&gt;
&amp;#039;&amp;#039;&amp;#039;Specifiaction number:&amp;#039;&amp;#039;&amp;#039;&lt;br /&gt;
&amp;lt;!-- Designation as per the list of fabrication and measurement devices list, (Fertigungs- und Prüfmittelliste) , e.g. (MI006) --&amp;gt;&lt;br /&gt;
&lt;br /&gt;
== Short Description ==&lt;br /&gt;
&lt;br /&gt;
&lt;br /&gt;
== Alternatives ==&lt;br /&gt;
Are there other devices at IMT with the same or a similar application? Please name them and their differences or similarities, and link them here. YOu can find the correct link name in the [[Prüfmittel_Liste_-_List_of_Measurement_Devices| list of measurement devices]] or in the [[Liste der Fertigungsmittel - List of Manufacturing Equipment| list of fabrication devices]].&lt;br /&gt;
&lt;br /&gt;
== Device Specifications ==&lt;br /&gt;
(Additional) equipment and functions, e.g. process gasses, wavelengths, resolution, smallest achievable feature size&lt;br /&gt;
(Zusätzliche) Ausstattung und Funktionen, z.B. Prozessgase, Wellenlängen, Auflösung, Strukturdimensionen&lt;br /&gt;
&lt;br /&gt;
== Established Processes ==&lt;br /&gt;
Which processes have been compelted successfully with this device, what materials have been structured, testet or processed?&lt;br /&gt;
Please don&amp;#039;t enter any process parameters and sensible details into the wiki, but add the path to J: network drive where the detaisl are described or link a user who knows about the process.&lt;br /&gt;
&lt;br /&gt;
== Restrictions ==&lt;br /&gt;
What can not and/or should not be done with the device, i.e. are there materials that could impair the performance of the device if they are structured with, e.g. nickel inside the RIE? Are there other precautions that have to be taken for sample preparation?&lt;br /&gt;
&lt;br /&gt;
== Instructed Users ==&lt;br /&gt;
Persons who have recieved an instruction and thus are allowed to operate the device.&lt;br /&gt;
Please create a list and link them to the user profiles: &lt;br /&gt;
* [[Benutzer:Vorname.Nachname | Nachname, Vorname]]&lt;/div&gt;</summary>
		<author><name>Ian.Howard</name></author>
	</entry>
</feed>