Aufschleudern - Spin coating - Revision history

WikiSysop at 08:00, 19 November 2016

2016-11-19T08:00:40Z

← Older revision		Revision as of 10:00, 19 November 2016
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	==Beginner's Guide to Spincoating==		==Beginner's Guide to Spincoating==
	[[~~Datei~~:Kurven_spin_SvdE.jpg\|200px\|thumb\|right\|Relation between layer thickness and time, exhaust volume and speed.]]		[[file:Kurven_spin_SvdE.jpg\|200px\|thumb\|right\|Relation between layer thickness and time, exhaust volume and speed.]]
	If you are completely new to spincoating, then you can find here some '''basic''' hinds to get your sample coated. This shall help you to understand the process and possible mistakes. A practical example you can find [[#Small chips\|below]]. You can try it yourself, but first we suggest you to be always nice to the cleanroom staff and ask them for help.		If you are completely new to spincoating, then you can find here some '''basic''' hinds to get your sample coated. This shall help you to understand the process and possible mistakes. A practical example you can find [[#Small chips\|below]]. You can try it yourself, but first we suggest you to be always nice to the cleanroom staff and ask them for help.

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	Over '''spintime''' the centripetal forces (depending on the speed) stay active. Imagine a water droplet with sugar, pinned in the middle of a roationg plate: the droplet flattens while the plate rotate but it will immediately turn into the normal state, after stopping the rotation. You need to wait, until the water is evaporated or at least so viscous, that the fluid keeps flat.		Over '''spintime''' the centripetal forces (depending on the speed) stay active. Imagine a water droplet with sugar, pinned in the middle of a roationg plate: the droplet flattens while the plate rotate but it will immediately turn into the normal state, after stopping the rotation. You need to wait, until the water is evaporated or at least so viscous, that the fluid keeps flat.

	[[~~Datei~~:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]		[[file:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]
	The evaporation rate depends on the solvents properties, the temperatur, the humidity and on the '''exhaust volume'''. While the solvents properties are kind of stable/known and the humidity and temperatur cannot be controled, you can control the exhaust volume. If the volume is closed, the airflow and the turbulence is minimized and therefore reproducable.		The evaporation rate depends on the solvents properties, the temperatur, the humidity and on the '''exhaust volume'''. While the solvents properties are kind of stable/known and the humidity and temperatur cannot be controled, you can control the exhaust volume. If the volume is closed, the airflow and the turbulence is minimized and therefore reproducable.

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	: Air bubbles in dispensed fluid (resin)		: Air bubbles in dispensed fluid (resin)
	: Dispense tip is cut unevenly or has burrs or defects		: Dispense tip is cut unevenly or has burrs or defects
	\| [[~~Datei~~:bubblespin.gif]]		\| [[file:bubblespin.gif]]
	\|-		\|-
	\| '''Comets, streaks, or flares'''		\| '''Comets, streaks, or flares'''
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	: Particles exist on substrate surface prior to dispense		: Particles exist on substrate surface prior to dispense
	: Fluid is not being dispensed at the center of the substrate surface		: Fluid is not being dispensed at the center of the substrate surface
	\| [[~~Datei~~:cometspin.gif]]		\| [[file:cometspin.gif]]
	\|-		\|-
	\| '''Swirl pattern'''		\| '''Swirl pattern'''
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	: Spin speed and acceleration setting is too high		: Spin speed and acceleration setting is too high
	: Spin time too short		: Spin time too short
	\| [[~~Datei~~:swirlspin.gif]]		\| [[file:swirlspin.gif]]
	\|-		\|-
	\| '''Center circle''' (chuck mark)		\| '''Center circle''' (chuck mark)
	: If the circle is the same size as the spin chuck, switch to a Delrin spin chuck		: If the circle is the same size as the spin chuck, switch to a Delrin spin chuck
	\| [[~~Datei~~:chuckspin.gif]]		\| [[file:chuckspin.gif]]
	\|-		\|-
	\| '''Uncoated areas'''		\| '''Uncoated areas'''
	: Insufficient dispense volume		: Insufficient dispense volume
	\| [[~~Datei~~:uncoatedspin.gif]]		\| [[file:uncoatedspin.gif]]
	\|-		\|-
	\| '''Pinholes'''		\| '''Pinholes'''
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	:: If new resist, try a syringe with a filter		:: If new resist, try a syringe with a filter
	: Particles exist on substrate surface prior to dispense		: Particles exist on substrate surface prior to dispense
	\| [[~~Datei~~:pinholespin.gif]]		\| [[file:pinholespin.gif]]
	\|}		\|}

Sebastian.Ecken: /* Beginner's Guide to Spincoating */

2015-07-02T10:21:49Z

Beginner's Guide to Spincoating

← Older revision		Revision as of 12:21, 2 July 2015
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	\|}		\|}

			{\| class="wikitable"
			! Poor reproducibility
			!
			\|-
			\| Variable exhaust or ambient conditions
			\| Adjust exhaust lid to fully closed
			\|-
			\| Substrate not centered properly
			\| Center substrate before operation
			\|-
			\| Insufficient dispense volume
			\| Increase dispense volume
			\|-
			\| Inappropriate application of resin material
			\| Contact resin cleanroom staff or manufacturer
			\|-
			\| Unstable balance in speed / time parameters
			\| Increase speed / decrease time or visa versa
			\|}

			{\| class="wikitable"
			! Poor film quality
			!
			\|-
			\| Exhaust volume too high
			\| Adjust exhaust lid or house exhaust damper
			\|-
			\| Acceleration too high
			\| Select lower acceleration
			\|-
			\| Unstable balance in speed / time parameters
			\| Increase speed / decrease time or visa versa
			\|-
			\| Insufficient dispense volume
			\| Increase dispense volume
			\|-
			\| Inappropriate application of resin material
			\| Contact resin manufacturer or cleanroom staff
			\|}



			'''Copyright'''

			Kann man auch genauso nachlesen auf: http://www.brewerscience.com/spin-coating-theory . Aber ich dachte, es sei ganz praktisch, dass auch mal hier zu haben.

	Wird immer mal wieder ergänzt :)		Wird immer mal wieder ergänzt :)

Sebastian.Ecken at 10:12, 2 July 2015

2015-07-02T10:12:48Z

← Older revision		Revision as of 12:12, 2 July 2015
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	\|}		\|}


			{\| class="wikitable"
			! Problem description
			! Layer appearance
			\|-
			\| '''Air bubbles on wafer surface'''
			: Air bubbles in dispensed fluid (resin)
			: Dispense tip is cut unevenly or has burrs or defects
			\| [[Datei:bubblespin.gif]]
			\|-
			\| '''Comets, streaks, or flares'''
			: luid velocity (dispense rate) is too high
			: Spin bowl exhaust rate is too high
			: Resist sits on wafer too long prior to spin
			: Spin speed and acceleration setting is too high
			: Particles exist on substrate surface prior to dispense
			: Fluid is not being dispensed at the center of the substrate surface
			\| [[Datei:cometspin.gif]]
			\|-
			\| '''Swirl pattern'''
			: Spin bowl exhaust rate is too high
			: Fluid is striking substrate surface off center
			: Spin speed and acceleration setting is too high
			: Spin time too short
			\| [[Datei:swirlspin.gif]]
			\|-
			\| '''Center circle''' (chuck mark)
			: If the circle is the same size as the spin chuck, switch to a Delrin spin chuck
			\| [[Datei:chuckspin.gif]]
			\|-
			\| '''Uncoated areas'''
			: Insufficient dispense volume
			\| [[Datei:uncoatedspin.gif]]
			\|-
			\| '''Pinholes'''
			: Air bubbles
			: Particles in fluid
			:: If old resist, try ultrasonic bath the resist for 15 min to dissolve solid residues
			:: If new resist, try a syringe with a filter
			: Particles exist on substrate surface prior to dispense
			\| [[Datei:pinholespin.gif]]
			\|}

Sebastian.Ecken at 09:54, 2 July 2015

2015-07-02T09:54:23Z

@@ Line 8: / Line 8: @@
 Over '''spintime''' the centripetal forces (depending on the speed) stay active. Imagine a water droplet with sugar, pinned in the middle of a roationg plate: the droplet flattens while the plate rotate but it will immediately turn into the normal state, after stopping the rotation. You need to wait, until the water is evaporated or at least so viscous, that the fluid keeps flat.
 [[Datei:Rampe_spin_SvdE.jpg|200px|thumb|right|The acceleration ramp over time for a spincoating process.]]
 Another important factor is the '''acceleration'''. The solvent of a thin film may evaporate within seconds. Therefore you need to reach the desired spinspeed in time.

Sebastian.Ecken at 09:41, 2 July 2015

2015-07-02T09:41:07Z

← Older revision		Revision as of 11:41, 2 July 2015
Line 6:		Line 6:

	At first, we will show you the realations between '''thickness''' of your coated layer as a function of '''time''', '''exhaust volume''' and '''speed'''. You can optain these parameters by googl'ing, asking the cleanroom staff, from papers or the manual of your coating. If you want to find them out yourself, then keep the relation in figure 1 in mind. You want a specific, reproducable layer thickness. The spinspeed causes centripetal acceleration, which spread the material over the sample surface. Higher speed means more force which can act against the viscosity, surface tension and adhesion forces. So the higher speed will result in a thinner layer.		At first, we will show you the realations between '''thickness''' of your coated layer as a function of '''time''', '''exhaust volume''' and '''speed'''. You can optain these parameters by googl'ing, asking the cleanroom staff, from papers or the manual of your coating. If you want to find them out yourself, then keep the relation in figure 1 in mind. You want a specific, reproducable layer thickness. The spinspeed causes centripetal acceleration, which spread the material over the sample surface. Higher speed means more force which can act against the viscosity, surface tension and adhesion forces. So the higher speed will result in a thinner layer.

			Over '''spintime''' the centripetal forces (depending on the speed) stay active. Imagine a water droplet with sugar, pinned in the middle of a roationg plate: the droplet flattens while the plate rotate but it will immediately turn into the normal state, after stopping the rotation. You need to wait, until the water is evaporated or at least so viscous, that the fluid keeps flat.

			The '''evaporation''' depends on the solvents properties, the temperatur, the humidity and on the exhaust volume. While the solvents properties are kind of stable/known and the humidity and temperatur cannot be controled, you can control the exhaust volume. If the volume is closed, the airflow and the turbulence is minimized and therefore reproducable.

	[[Datei:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]		[[Datei:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]

Sebastian.Ecken at 09:29, 2 July 2015

2015-07-02T09:29:18Z

← Older revision		Revision as of 11:29, 2 July 2015
Line 1:		Line 1:
	==Beginner's Guide to Spincoating==		==Beginner's Guide to Spincoating==
	[[Datei:Kurven_spin_SvdE.jpg\|200px\|thumb\|right\|Relation between layer thickness and time, exhaust volume and speed.]]		[[Datei:Kurven_spin_SvdE.jpg\|200px\|thumb\|right\|Relation between layer thickness and time, exhaust volume and speed.]]
	If you are completely new to spincoating, then you can find here some basic hinds to get your sample coated.		If you are completely new to spincoating, then you can find here some '''basic''' hinds to get your sample coated. This shall help you to understand the process and possible mistakes. A practical example you can find [[#Small chips\|below]]. You can try it yourself, but first we suggest you to be always nice to the cleanroom staff and ask them for help.

			At a glance: you have a '''solid material''' solved in a '''solvent''' with a specific ratio. You apply this solution on a surface and let the solvent evaporate. The remains are the solid material you want as the layer.
⚫	At first, we will show you the realations between '''thickness''' of your coated layer as a function of '''time''', '''exhaust volume''' and '''speed'''. You can optain these parameters by googl'ing, asking the cleanroom staff, from papers or the manual of your coating. If you want to find them out yourself, then keep the relation in figure 1 in mind. You want a specific, reproducable layer thickness. The spinspeed causes centripetal acceleration, which spread the material over the sample surface. Higher speed means more force which can act against the viscosity and adhesion forces. So the higher speed will result in a thinner layer.

		⚫	At first, we will show you the realations between '''thickness''' of your coated layer as a function of '''time''', '''exhaust volume''' and '''speed'''. You can optain these parameters by googl'ing, asking the cleanroom staff, from papers or the manual of your coating. If you want to find them out yourself, then keep the relation in figure 1 in mind. You want a specific, reproducable layer thickness. The spinspeed causes centripetal acceleration, which spread the material over the sample surface. Higher speed means more force which can act against the viscosity, surface tension and adhesion forces. So the higher speed will result in a thinner layer.

	[[Datei:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]		[[Datei:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]
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			Wird immer mal wieder ergänzt :)

			Sebastian vdE

	==Small chips==		==Small chips==

Sebastian.Ecken at 09:13, 2 July 2015

2015-07-02T09:13:50Z

← Older revision		Revision as of 11:13, 2 July 2015
Line 1:		Line 1:
			==Beginner's Guide to Spincoating==
			[[Datei:Kurven_spin_SvdE.jpg\|200px\|thumb\|right\|Relation between layer thickness and time, exhaust volume and speed.]]
			If you are completely new to spincoating, then you can find here some basic hinds to get your sample coated.

			At first, we will show you the realations between '''thickness''' of your coated layer as a function of '''time''', '''exhaust volume''' and '''speed'''. You can optain these parameters by googl'ing, asking the cleanroom staff, from papers or the manual of your coating. If you want to find them out yourself, then keep the relation in figure 1 in mind. You want a specific, reproducable layer thickness. The spinspeed causes centripetal acceleration, which spread the material over the sample surface. Higher speed means more force which can act against the viscosity and adhesion forces. So the higher speed will result in a thinner layer.

			[[Datei:Rampe_spin_SvdE.jpg\|200px\|thumb\|right\|The acceleration ramp over time for a spincoating process.]]
			Another important factor is the '''acceleration'''. The solvent of a thin film may evaporate within seconds. Therefore you need to reach the desired spinspeed in time.




	==Small chips==		==Small chips==
	#Keep your equipment clean.		#Keep your equipment clean.

Jan.Meiser at 14:42, 3 April 2013

2013-04-03T14:42:15Z

← Older revision		Revision as of 16:42, 3 April 2013
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	[[Category:Herstellung/Fabrication]]		[[Category:Herstellung - Fabrication]]
	[[Category:Fertigungsmittel/Manufacturing Equipment]]		[[Category:Fertigungsmittel - Manufacturing Equipment]]

Jan.Meiser: hat „Aufschleudern/Spin coating“ nach „Aufschleudern - Spin coating“ verschoben

2013-04-03T14:22:02Z

hat „Aufschleudern/Spin coating“ nach „Aufschleudern - Spin coating“ verschoben

← Older revision	Revision as of 16:22, 3 April 2013
(No difference)

Uwe.Koehler: /* Small chips */

2013-03-22T06:06:16Z

Small chips

← Older revision		Revision as of 08:06, 22 March 2013
Line 1:		Line 1:
	==Small chips==		==Small chips==
	#Keep your ~~equipement~~ clean.		#Keep your equipment clean.
	#Prepare everything you need.		#Prepare everything you need.
	#*Pipette		#*Pipette