Experience in LIGA process parameters: Difference between revisions
From IMT-Wiki
Jump to navigationJump to search
Frieder.Koch (talk | contribs) (Die Seite wurde neu angelegt: „This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a…“) |
No edit summary |
||
| (One intermediate revision by one other user not shown) | |||
| Line 1: | Line 1: | ||
This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with date and sample numbers. Sorted by process step - feel free to add a sub-category any time. |
This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with name, date and sample numbers. Sorted by process step - feel free to add a sub-category any time. |
||
| Line 13: | Line 13: | ||
== PEB == |
== PEB == |
||
* Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas |
* Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas |
||
** Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016) |
** Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016, Frieder) |
||
== Electroplating == |
== Electroplating == |
||
* Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016) |
* Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016, Frieder) |
||
[[ |
[[Category:Herstellung_-_Fabrication]] |
||
Latest revision as of 18:01, 19 November 2016
This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with name, date and sample numbers. Sorted by process step - feel free to add a sub-category any time.
Substrates
Coating
Exposure
PEB
- Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas
- Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016, Frieder)
Electroplating
- Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016, Frieder)
