User:Birgit.Huebner/English: Difference between revisions
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'''e-mail''': mailto:birgit.huebner2@kit.edu |
'''e-mail''': mailto:birgit.huebner2@kit.edu |
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'''Substitute''': |
'''Substitute''': [[Benutzer:Julia.Wolf|Wolf, Julia]] |
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*[[Benutzer:Julia.Wolf|Wolf, Julia]] |
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== Job Description == |
== Job Description == |
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Revision as of 10:04, 6 November 2013
Birgit Hübner
rahmenlos|links|Text der Bild-Legende
Department: MF - Microfabrikation
Research Field: resist laboratory, etch laboratory, ChemA
Bau: 310
Raum: 252
Telephone: 0721/608-22601
e-mail: mailto:birgit.huebner2@kit.edu
Substitute: Wolf, Julia
Job Description
Expertise
Devices
- 4TEC-Plasmaätzer
- ANKA LIGA 1
- ANKA LIGA 2
- Hotplatebox (Horst)
- Hotplate (OPTIhot SHT20)
- Laserbeschriftungsgerät
- RIE-Anlage, Plasmalab 80 Plus
- Rasterelektronenmikroskop JSM-6600
- Spincoater Primus STT15
Processes
Software
Materials
- mr-X
- Silizium
- Titanium
- 50 µm foils
- Thermal Release Tape
Further Tasks at IMT
- ChemA - Administrator
