User:Birgit.Huebner/English: Difference between revisions
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'''Department''': MF - Microfabrikation |
'''Department''': MF - Microfabrikation |
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'''Research Field''': resist laboratory, |
'''Research Field''': resist laboratory, laboratory for etching, ChemA |
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'''Bau''': 310 |
'''Bau''': 310 |
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'''Telephone''': 0721/608-22601 |
'''Telephone''': 0721/608-22601 |
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'''mailto''': birgit.huebner2@kit.edu |
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'''Substitute''': [[Benutzer:Julia.Wolf|Wolf, Julia]] |
'''Substitute''': [[Benutzer:Julia.Wolf|Wolf, Julia]] |
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Revision as of 10:07, 6 November 2013
Birgit Hübner
rahmenlos|links|Text der Bild-Legende
Department: MF - Microfabrikation
Research Field: resist laboratory, laboratory for etching, ChemA
Bau: 310
Raum: 252
Telephone: 0721/608-22601
mailto: birgit.huebner2@kit.edu
Substitute: Wolf, Julia
Job Description
Expertise
Devices
- 4TEC-Plasmaätzer
- ANKA LIGA 1
- ANKA LIGA 2
- Hotplatebox (Horst)
- Hotplate (OPTIhot SHT20)
- Laserbeschriftungsgerät
- RIE-Anlage, Plasmalab 80 Plus
- Rasterelektronenmikroskop JSM-6600
- Spincoater Primus STT15
Processes
Software
Materials
- mr-X
- Silizium
- Titanium
- 50 µm foils
- Thermal Release Tape
Further Tasks at IMT
- ChemA - Administrator