User:Annika.Ewy: Difference between revisions

Revision as of 16:53, 14 November 2019

Annika Ewy

Funktionsbereich: FuE1-SMD

Aufgabengebiet: Microactuators

Bau: 307

Raum: 226

Telefon: 0721-608-24430

e-mail: mailto:annika.ewy@kit.edu

Development of cooperative and multistable SMA-polymer actuator systems for switching and tuning of nanometer-scale devices.

Spin-Coater

Spray-Development Machine

Oxygen-Plasma-Etcher

REM-Zeiss Supra 60 VP

Electron-Beam Lithography

Reactive Ion Etching

COMSOL Multiphysics

Layout Editor

Optodesign

SOI-Wafer 25 µm, 10 µm, 1 µm, 220 nm device layer

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	[[file:ich.jpg\|thumb\|500x250px\|rechts\|~~Mäxle~~ ~~und Lieschen~~]]		[[file:ich.jpg\|thumb\|500x250px\|rechts\|Annika Ewy]]