Experience in LIGA process parameters: Difference between revisions
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This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with date and sample numbers. Sorted by process step - feel free to add a sub-category any time. |
This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with name, date and sample numbers. Sorted by process step - feel free to add a sub-category any time. |
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== PEB == |
== PEB == |
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* Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas |
* Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas |
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** Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016) |
** Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016, Frieder) |
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== Electroplating == |
== Electroplating == |
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* Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016) |
* Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016, Frieder) |
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[[Kategorie:Herstellung_-_Fabrication]] |
[[Kategorie:Herstellung_-_Fabrication]] |
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Revision as of 09:55, 26 October 2016
This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with name, date and sample numbers. Sorted by process step - feel free to add a sub-category any time.
Substrates
Coating
Exposure
PEB
- Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas
- Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016, Frieder)
Electroplating
- Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016, Frieder)
