User:Abrar.Faisal

Abrar Faisal

Department: FuE3-XOM

Research Field: X-ray Gratings

Building: 307

Room: 223

Telephone: 22767

E-mail: mailto:abrar.faisal@kit.edu

Job Description

Development and optimization of X-ray gratings fabrication process for achieving small periods <2µm:

• Analyse dose deposition during X-ray exposure
• Study resist behaviour,mainly mechanical stiffness
• Resist modifications as required
• Optimize development and drying conditions to avoid defects
• Design new grating layouts for mechanical stabilization of structures
• Testing of grating performance in real applications

Expertise

Devices

• LABCONCO FD machine
• Sentech
• SEM
• Optical microscope
• Spin-coater
• Hot-plates
• Vacuum oven
• Laser imprinting on Si

Processes

• RIE
• Spin-coating
• Soft-bake
• LIGA exposure
• PEB
• Development
• Freeze drying
• Resist stripping

Software

• Origin
• DoseSim
• analySIS
• Inkscape
• Mendeley

Materials

mr-X resist

PVA for IMT Projects

• 15-225 Sub-µm LiGa