User:Birgit.Huebner/English

200px|thumb|rechts|Birgit Hübner

Birgit Hübner

Department: MF - Microfabrikation

Research Field: resist laboratory, etch laboratory, ChemA

Bau: 310

Raum: 252

Telephone: 0721/608-22601

e-mail: mailto:birgit.huebner2@kit.edu

Substitute:

• Wolf, Julia

Expertise

Devices

• 4TEC-Plasmaätzer
• ANKA LIGA 1
• ANKA LIGA 2
• Hotplatebox (Horst)
• Hotplate (OPTIhot SHT20)
• Laserbeschriftungsgerät
• RIE-Anlage, Plasmalab 80 Plus
• Rasterelektronenmikroskop JSM-6600
• Spincoater Primus STT15

Processes

• Direct-LIGA

Materials

• mr-X
• Silizium
  • 4"-Wafer 525 µm
  • 4"-Wafer 200 µm
  • 4"-Wafer 100 µm
• Titanium
  • 50 µm foils
• Thermal Release Tape

Further Tasks at IMT

• ChemA - Administrator