User:Birgit.Huebner/English

Birgit Hübner

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Department: MF - Working Group Microfabrikation

Research Field: resist laboratory, laboratory for etching, ChemA

Bau: 310

Raum: 252

Telephone: 0721/608-22601

e-mail: mailto:birgit.huebner2@kit.edu

Substitute: Wolf, Julia

Job Description

I'm an employee of the microfabrication and the substitute of Mrs Julia Wolf in the field of developing.

Expertise

I'm a chemical loboratory assistant.

Devices

• 4TEC-Plasmaätzer
• ANKA LIGA 1
• ANKA LIGA 2
• Hotplatebox (Horst)
• Hotplate (OPTIhot SHT20)
• Laserbeschriftungsgerät
• RIE-Anlage, Plasmalab 80 Plus
• Rasterelektronenmikroskop JSM-6600
• Spincoater Primus STT15

Processes

• Direct-LIGA

Materials

• mr-X
• Silizium
  • 4"-Wafer 525 µm
  • 4"-Wafer 200 µm
  • 4"-Wafer 100 µm
• Titanium
  • 50 µm foils
• Thermal Release Tape

Further Tasks at IMT

• ChemA - Administrator of the cleanroom area