Experience in LIGA process parameters

This site is intended to share process parameters for all the steps in LIGA (grating) fabrication. If you find a particular set of parameters that worked for a specific sample, this is the place to put it, if possible with name, date and sample numbers. Sorted by process step - feel free to add a sub-category any time.

PEB

• Changing the PEB from 75°C in vacuum oven to 60°C on hotplate eliminated waviness in 10 µm high, 800 nm wide, 500 µm long lamellas
  • Tested parameters: RT --> 60°C in 2 hours, hold 60°C for 4 hours, 60°C --> RT in 6 hours (August 2016, Frieder)

Electroplating

• Pretreatment: Samples with ~10 µm resist on Cr/Au showed good results after Gold EP when pretreating for 2 minutes in 4Tec (1444-2 and 1376-2). Bad results for no pretreatment and in Sentech! (July 2016, Frieder)