Aufschleudern - Spin coating

Small chips

1. Keep your equipment clean.
2. Prepare everything you need.
   • Pipette
   • pipette holder (if available)
   • chips which you want to spin-coat
   • paper towels for cleaning and putting equipement on it
   • aceton for cleaning the spin coater in between separate spin coating step
3. Warm up hotplate (if necessary)
4. Put your programme into the spincoater.
   • Check speed, lid position, accelaration for all steps.
5. Put your chip on a suitable holder.
   • To put it on a wafer holder you can use a Capron foil with a hole for the vacuum.
6. Vacuum on.
7. Put resist in pipette (how -to will be in new wiki-site (how -to -use a pipette) later on.
8. Now the important steps.
   1. Put 1-2 drops in the spin-coater and keep the pressure on the pipette. Makes the air bubbles out.
   2. In the next steps, try not to touch the chip surface with the pipette.
   3. Put a big drop which is half as big as the chip in the middle of your chip with your pipette very close and leave your pipette in the fluid.
   4. With the pipette in the fluid move round the corner of your chip slowly dripping more resist onto the chip (I will put a photograph in here later.)
   5. At the end you chip should be coated with resist completely, especially all the edges.
   6. Start spin-coater immediately.
9. If not so: Vacuum off.
10. Carefully remove chip from spincoater and put on the hotplate (or in the chip box).
11. Clean the spin-coater after each chip with a bit of aceton. There should be no threads from the resist and no big drops in the relevant area.
12. If finished: Clean the whole spin-coater very, very good. The next people will hold you responsible otherwise.

Just a info: Chip boxes can be fetched from Nina Giraud (SP403818.00)

PS. Noch nicht fertig. Ich schreib noch weiter, aber ihr dürft gerne helfen. Gruß Kira