User:Annika.Ewy
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Annika Ewy
Funktionsbereich: FuE1-SMD
Aufgabengebiet: Microactuators
Bau: 307
Raum: 226
Telefon: 0721-608-24430
e-mail: mailto:annika.ewy@kit.edu
Tätigkeitsbeschreibung
Development of cooperative and multistable SMA-polymer actuator systems for switching and tuning of nanometer-scale devices.
Fertigkeiten/Kenntnisse
Geräte
Spin-Coater
Spray-Development Machine
Oxygen-Plasma-Etcher
REM-Zeiss Supra 60 VP
Prozesse
Electron-Beam Lithography
Reactive Ion Etching
Software
COMSOL Multiphysics
Layout Editor
Optodesign
Materialien
SOI-Wafer 25 µm, 10 µm, 1 µm, 220 nm device layer
