{"text_format":"1","workbook":"xlsx","n_sheets":1,"sheets":["Liste PM"],"not_rendered":{"charts":0,"images":1,"macros":1,"external_links":0,"defined_names":15,"comments":1,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Liste PM","index":0,"n_rows":305,"n_cols":28,"rows_kept":305,"cut":false,"hidden":false,"merged":[[290,6,290,7],[291,6,291,7],[292,6,292,7],[293,6,293,7],[294,2,294,5],[294,6,294,7],[290,2,290,5],[293,2,293,5],[300,2,300,5],[301,2,301,5],[302,2,302,5],[298,2,298,5],[296,6,296,7],[302,6,302,7],[298,6,298,7],[299,6,299,7],[300,6,300,7],[301,6,301,7],[299,2,299,5],[292,0,292,1],[291,2,291,5],[292,2,292,5],[304,0,304,8],[297,2,297,5],[297,6,297,7],[295,2,295,5],[295,6,295,7],[296,2,296,5]]}
["Liste der Prüfmittel",null,null,null,null,null,null,null,null,"Liste FM","KPL","WPL",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"Speicherdatum:"]
["Kurzbez. mit lfd.Nr.","Prüfmittelname","Anlagen-/ Inv.-Nr.","Standort","Geräteverantw./Stellvertreter","PM-Kl.","Kalibrier-intervall","Wartungs-intervall","KPL PL502","WPL PL501","PM mit gleicher","PM mit gleicher",null,null,null,null,null,null,null,null,null,null,null,null,null,null,null,"2016-07-20T17:05:54"]
[null,null,null,null,null,null,"[Jahr]","[Jahr]","Ext../ Int.","Ext../ Int. ","Wartungs-anweisung","Kalibrier-anweisung"]
[]
["SO 0001","Partikelzählgerät SOLAIR 3100+","60102071","B 301\nR 140b","Heneka","C",1,1,"E","E"]
["SO 0002","Partikelmessgerät SOLAIR 3100","60110249","B 301\nR 142","Heneka","C",1,1,"E","E"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",40001167,"B 301\nR 202","Abaffy","C",1,1,"I","E***"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 VP","40002923","B 309\nR 146","Abaffy","C",1,1,"I","E***"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","40000932 / 00976453","B 309\nR 137","Köhler","C",1,1,"I","I"]
["MI 0006","Messmikroskop ERGOLUX","60001529 / 00954368","B 309\nR 146","Köhler","C",1,1,"I","E***"]
["SD 0007","Digitale Bügelmessschraube \n(100-200 mm)",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["SD 0008","Schichtdickenmessgerät MPV-SP","99013509 / 00952759","B 301\nR 142","Fornasier","C",1,1,"I","E***"]
["MI 0009","Messmikroskop Leica DM RME","60053804","B 307\nR 027a","Hollenbach","D","entfällt",1,"entfällt","E***"]
["HO 0010","Höhenmessgerät MT 60 M","60031037 / 00976415","B 310\nR 152","Heiler","C",1,2,"I","I"]
["HO 0011","Höhenmessgerät SONY U 30","60027542 / 00972509","B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet","60015959 / 00963700","B 301\nR 107.5","Guber","D","entfällt",1,"entfällt","E***"]
["MI 0013","Inspektionsmikroskop INM 20",40001568,"B 310\nR 154","Schneider","C",1,1,"I","E***"]
["MI 0014","Messmikroskop Metalloplan HL","UNI KA","B 307\nR 132c","Hübner    Börner","C",1,1,"I","E***"]
["MI 0015","Messmikroskop Leitz 3","99027214 / 00765489","B 307\nR 133**","Rupp","D","entfällt",1,"entfällt","E***"]
["SO 0016","Thermo-Hygrograph digital THDX-CE",60063063,"B 309\nR 147","Heneka","D","entfällt",3,"entfällt","I"]
["SO 0017","Thermo-Hygrograph digital THDX-CE",60063064,"B 301\nR 309","Heneka","D","entfällt",3,"entfällt","I"]
["HO 0018","Höhenmessgerät MT 60",null,"B 307\nR 132c","Karbacher Hübner","C",1,1,"I","I"]
["WA 0019","Analysenwaage R 200 D","00963719","B 310\nR 156","Ahrens","C",1,1,"E***","E***"]
["WA 0020","Analysenwaage AT 460","60030359 / 00973938","B 307\nR 132c","Hübner","C",1,1,"E***","E***"]
["WA 0021","Präzisionswaage Precisa ES 4200C","60105874","B 301\nR 109","Guttmann","C",1,1,"E***","E***"]
["WA 0022","Präzisionswaage U 4800 P-XD2","60027507 / 00972472","B 301\nR 206","Bade","C",1,1,"E***","E***"]
["WA 0023","Analysenwaage A 120 S","60005081 / 00956271","B 301\nR 206","Bade","C",1,1,"E***","E***"]
["MI 0024","Messmikroskop ERGOLUX 200","60027854 / 00972479","B 301\nR 202","Matthis","C",1,1,"I","E***"]
["WA 0025","Präzisionswaage 1507 B MP8-1","00949079","B 321\nR 212","Hahn","C",1,1,"E***","E***"]
["SD 0026","Digital Bügelmessschraube (0-25 mm)",null,"B 301\nR 103","Moritz     Ehnes","C",1,1,"I","I"]
["SO 0027","Burster Präzisionsstromgeber DIGISTANT 6426","00970904","B 301\nR 107.3","Ahrens  Humbert","C",1,"entfällt","I","entfällt"]
["SD 0028","Dicken-Messbrücke für 4''-Wafer",null,"B 307\nR 142","Schulz","C",2,2,"I","I"]
["OM 0029","Lasersystem Toptica","60091067","B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538","60065715","B 301\nR 140","Heneka","C*",2,"entfällt","I","entfällt"]
["SO 0031","Thermo-Hygrograph ","00976092","B 309\nR 148","Heneka","D","entfällt",1,"entfällt","I"]
["MI 0032","Messmikroskop ERGOLUX","60020498 / 00967984","B 301\nR 142","Köhler","C",1,1,"I","E***"]
["MI 0033","Stereomikroskop MZ6",60057880,"ANKA\nB 348","Börner\nMünch","D","entfällt",1,"entfällt","I"]
["SO 0034","Laser-Partikelmessgerät Met One",60062456,"B 301\nR 140","Heneka","D",3,3,"E","E"]
["SD 0035","Bügelmessschraube (25-50 mm)",null,"B 301\nR 103","Moritz     Ehnes","C",1,1,"I","I"]
["SO 0036","pH-Messgerät","00972533","B 301\nR 206","Matthis     Bade","C*","½",1,"I","I","SO 0036","SO 0036"]
["SO 0037","pH-Messgerät","00978360","B 301\nR 109","Matthis     Bade","C*","½",1,"I","I","SO 0036","SO 036"]
["SO 0038","UV-Intensity Meter Modell 1000 UV ","00966770","B 301\nR 142","Fornasier","C",5,5,"E","E"]
["MI 0039","3D-Koordinatenmessgerät Video-Check-HA",40002285,"B 307\nR 133 **","Thelen     Feit","C",1,1,"E***","E***"]
["HO 0040","Kalibriernormal „Endmaß“",60064731,"B 310\nSchrank 117","Feit","B",5,5,"E","E"]
["OB 0041","Kalibriernormal „TENCOR“",null,"B 310\nSchrank 117","Feit","B",5,"entfällt","E","entfällt"]
["MI 0042","Kalibriernormal „JSM/SEM“",null,"B 310\nSchrank 117","Feit","B",5,5,"E","E"]
["MI 0043","Kalibriernormal „Mikroskope“",null,"B 310\nSchrank 117","Feit","B",5,"entfällt","E","entfällt"]
["OB 0044","Kalibriernormal „Rauheit“","60071819","B 310\nSchrank 117","Feit","B",5,5,"E","E"]
["SO 0045","Kalibriernormal „Drehzahl“",null,"B 310\nSchrank 117","Feit","B",2,"entfällt","E","entfällt"]
["SO 0046","Kalibriernormal „Strom/Spannung“","60052543","B 310\nSchrank 117","Feit","B",1,"entfällt","E","entfällt"]
["SD 0047","Bügelmessschraube mit Digitalanzeige \n(75-100 mm)",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["MI 0048","Kalibriernormal „SUPRA 60 VP“",null,"B 310\nSchrank 117","Feit","B",10,"entfällt","E","entfällt"]
["SO 0049","Kalibriernormal „Temperatur“",60063392,"B 310\nSchrank 117","Feit","B",1,1,"E","E"]
["SO 0050","Kalibriernormal „Ebenheit“",60067050,"B 310\nSchrank 117","Feit","B",5,5,"E","E"]
["OB 0051","Kalibriernormal „SINUS“",60065518,"B 310\nSchrank 117","Feit","B",5,5,"E","E"]
[]
["SO 0053","Thermo-Hygrograph NSII-Q",null,"B 307\nR 230","Heneka","D","entfällt ",3,"entfällt","I"]
["SO 0054","Thermo-Hygrograph NSII-Q",null,"B 307\nR 230","Heneka","D","entfällt ",3,"entfällt","I"]
["SD 0055","Digitale Bügelmessschraube (50-75 mm)",null,"B 301\nR 103","Moritz     Ehnes","C",1,1,"I","I"]
[]
["WA 0057","Präzisionswaage 1413 MP8-1","99064736 / 00942126","B 310\nR 152","Heiler","C",1,1,"E***","E***"]
[]
["MP 0059","Montageplatz 3 „Charakterisierung NIR“",null,"B 301\nR 212c","Hollenbach Boehm","C",2,2,"E","I (E)"]
["MS 0060","Messschieber",null,"B 301\nR 302","Heiler","C",1,1,"I","I"]
[]
["SO 0062","pH-Messgerät \"Seven Compact pH/Ion S220 \"",null,"B 301\nR 109","Guttmann     Matthis","C*","½",1,"I","I","SO 0036","SO 0036"]
["MI 0063","Messmikroskop Leitz UWM SKI","00924286","B 301\nR 107.7","Schneider Worgull","C",1,2,"E***,I","E***"]
["SO 0064","Temperatur- und Feuchte- Überwachungssystem CAN 1",60072203,"B 318\nR 103/104","Heneka","C",1,1,"E***","E***"]
["SO 0065","Temperatur- und Feuchte- Überwachungssystem CAN 2",60072287,"B 301\nR 140","Heneka","C",1,1,"E***","E***"]
["MS 0066","Messschieber",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["SD 0067","Digital Mikrometerschraube M 30 Sony\nµ-mate","00972516","B 307\nR 142","Köhler","C",1,1,"I","I"]
["SD 0068","Bügelmessschraube mit Digitalanzeige \n(25-50 mm)",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["SD 0069","Bügelmessschraube mit Digitalanzeige \n(50-75 mm)",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
[]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",null,"B 309\nR 146","Thelen Köhler","C",1,1,"I","I"]
["MI 0072","Seitenwand-Inspektionsmikroskop     Stereo Dynascope T5-3","0301-770","B 307\nR 133 **","Thelen","D","entfällt ",10,"entfällt","I"]
["MS 0073","Digimatic Messschieber",null,"B 301\nR 103","Moritz     Ehnes","C",1,1,"I","I","MS 0073","MS 0073"]
["MS 0074","Digimatic Messschieber",null,"B 301\nR 104","Moritz     Ehnes","C",1,1,"I","I","MS 0073","MS 0073"]
["MS 0075","Digimatic Messschieber",null,"B 301\nR 105","Moritz     Ehnes","C",1,1,"I","I","MS 0073","MS 0073"]
["MS 0076","Digimatic Messschieber",null,"B 301\nR 106","Moritz     Ehnes","C",1,1,"I","I","MS 0073","MS 0073"]
["MS 0077","Digimatic Messschieber",null,"B 301\nR 107","Moritz     Ehnes","C",1,1,"I","I","MS 0073","MS 0073"]
["SO 0078","Universalprüfmaschine Instron 4505","40000769 / 00966771","B 310\nR 154","Schneider","C",3,3,"E***,I","E***"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",870028,"B 301\nR 121","Moritz","C",1,1,"I","I"]
["OB 0080","Oberflächenmessgerät DEKTAK II A","99010162 / 00937498","B 309\nR 146","Thelen","C",1,1,"I","I"]
["SD 0081","Einstellmaße für Digitale Bügel-messschraube (100-200 mm)",null,"B 310\nR 154","Schneider Worgull","B",5,"entfällt","E","entfällt"]
["OB 0082","Scanning Probe Microscope D3100S",null,"B 309\nR 146","Thelen","C",1,1,"E***","E***"]
["SD 0083","Bügelmessschraube mit Digitalanzeige \n(Bügeltiefe 100 mm)",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["SO 0084","MKS Ansteuerung PR-4000",null,"B 301\nR 209","Yin          Kohl","C",2,"entfällt","I","entfällt"]
[]
[]
[]
["SO 0088","Strombox",null,"B 301\nR 212c","Schmitt     Kohl","C",3,1,"I","I"]
["EM 0089","Digital-Multimeter HP 34401A","60065381","B 301\nR 212c","Oßmer     Kohl","C",3,"entfällt","I","entfällt",null,"EM 0089"]
["EM 0090","Digital-Multimeter HP 34401A","60057169","B 301\nR 212c","Oßmer     Kohl","C",3,"entfällt","I","entfällt",null,"EM 0089"]
["EM 0091","Digital-Multimeter Fluke 45","60045699","B 301\nR 209","Gültig      Kohl","C",3,"entfällt","I","entfällt",null,"EM 0089"]
["EM 0092","Digital-Multimeter Fluke 45","60054880","B 301\nR 209","Gültig      Kohl","C",3,"entfällt","I","entfällt",null,"EM 0089"]
["MI 0093","Olympus Mikroskop BH-2",null,"B 307\nR 133","Thelen","C",1,1,"I","I"]
["MI 0094","Messmikroskop Ergoplan","00966731","B 309\nR 146","Hahn   Bacher","D","entfällt ",1,"entfällt","E***"]
["SO 0095","Gasflusssensor (200 sccm)","00972522","B 301\nR 209","Gültig      Kohl","C",2,"entfällt","E","entfällt"]
["SO 0096","Gasflusssensor (500 sccm)","00972523","B 301\nR 209","Gültig      Kohl","C",2,"entfällt","E","entfällt"]
["SO 0097","Gasflusssensor (1000 sccm)","00972524","B 301\nR 209","Gültig      Kohl","C",2,"entfällt","E","entfällt"]
["OB 0098","Dimension Icon Rasterkraftmikroskop","40002990","B 301\nR 107.4","Hölscher","C*",1,"entfällt","I","entfällt"]
["OB 0099","Dimension Icon Rasterkraftmikroskop","40002991","B 321\nR 218","Hölscher","C*",1,"entfällt","I","entfällt"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop","40002928","B 301\nR 107.4","Hölscher","C*",1,"entfällt","I","entfällt"]
["OB 0101","800 µm Meierskop AFM","40002927","B 301\nR 107.4","Hölscher","C*",1,"entfällt","I","entfällt"]
["SO 0102","Temperatur-Messgerät Testo 922",null,"B 321\nR 315","Sommer","C",1,"entfällt","E","entfällt"]
[]
[]
[]
["EM 0106","Multimeter Keithley 2001","60061569","B 321\nR 315","Sommer","C",3,"entfällt","I,E","entfällt",null,"EM 0106"]
["SO 0107","LeCroy Oszillograph","60016047","B 321\nR 218","Sommer","C",5,"entfällt","E","entfällt"]
["EM 0108","Multimeter Keithley 2001","60053909","B 321\nR 315","Sommer","C",3,"entfällt","I,E","entfällt",null,"EM 0106"]
["Frei"]
["Frei"]
[]
["EM 0112","Multimeter Keithley 2001","60056737","B 321\nR 315","Sommer","C",3,"entfällt","I,E","entfällt",null,"EM 0106"]
[]
["Frei"]
[]
["Frei"]
["Frei"]
["EM 0118","Multimeter Keithley 2001","60052543","B 321\nR 315","Sommer","C",3,"entfällt","I,E","entfällt",null,"EM 0106"]
["SO 0119","Multifunktionsmessgerät Testo 400","60062431","B 321\nR 315","Sommer","C",1,"entfällt","E","entfällt"]
["EM 0120","Multimeter Keithley 2001","60051057","B 321\nR 315","Sommer","C",3,"entfällt","I,E","entfällt",null,"EM 0106"]
["SO 0121","Massflowcontroller (MFC)",null,"B 321\nR 315","Sommer","C","1 bis 3","entfällt","E","entfällt"]
[]
["SO 0123","Photo Ionisations Detektor (PID)","60071144","B 321\nR 202","Sommer","C",1,1,"I","I","SO 0123","SO 0123"]
[]
[]
["SO 0126","Handhygrometer Testo 601",null,"B 321\nR 315","Sommer","C",1,"entfällt","E","entfällt"]
["SO 0127","Handhygrometer Testo 601",null,"B 321\nR 315","Sommer","C",1,"entfällt","E","entfällt"]
[]
["SO 0129","Photo Ionisations Detektor (PID)","60058703","B 321\nR 315","Sommer","C",1,1,"I","I","SO 0123","SO 0123"]
["SO 0130","Handhygrometer Testo 645","6006293","B 321\nR 315","Sommer","C",1,"entfällt","E","entfällt"]
[]
[]
[]
["Frei"]
["Frei"]
[]
["Frei"]
["SO 0138","Spektrometer BTC112E","60094551","B 321\nR 202b","Sommer","C",1,"entfällt","E","entfällt"]
["SD 0139","Ellipsometer SE 400",60066183,"B 321\nR 315","Benz","C*",1,"entfällt","I","entfällt"]
[]
["WA 0141","Analysenwaage Masterpro LA120S",null,"B 321\nR 108","Länge","C",1,1,"E***","E***"]
["WA 0142","Analysenwaage Mettler ML54","60104758","B 321\nR 208","Ridder","C",1,1,"E***","E***"]
["WA0143","Präzisionswaage Kern EG 220-3NM","69019358","B 321\nR 208","Ridder","C",1,1,"E***","E***"]
[]
[]
["SO 0146","pH-Messgerät  \"pH-Meter-654\"","00938425","B 321\nR 105","Länge         M. Rapp","C","½",1,"I","I"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",null,"B 321\nR 105","Länge         Dirschka","B",2,2,"E","I"]
["WA 0148","Analysenwaage Sartorius A200S",null,"B 321\nR 105","Länge         M. Rapp","C",1,1,"E***","E***"]
["WA 0149","Mikrowaage Sartorius M2P",60073607,"B 321\nR 105","Länge         M. Rapp","C",1,1,"E***","E***"]
["SO 0150","Pipetten \"Bio-SAW 2\"",null,"B 321\nR 105","Länge         M. Rapp","C*",1,1,"I","I","SO 0150","SO 0150"]
["SO 0151","Pipetten \"Bio-SAW 3\"",null,"B 321\nR 105","Länge         M. Rapp","C*",1,1,"I","I","SO 0150","SO 0150"]
["EM 0152","Netzwerkanalysator HP 8712 C","60060069","B 321\nR 108","Voigt","C*",1,"entfällt","I","entfällt"]
[]
[]
["SO 0155","Sekunden-Thermometer Testo 901",null,"B 321\nR 317","Sommer","C",2,"entfällt","E","entfällt"]
["SO 0156","Digitalthermometer GTH 1200 A",null,"B 321\nR 120","Voigt","D","entfällt",5,"entfällt","I"]
[]
["EM 0158","Multimeter HP 3478 A","99058063","B 321\nR 315","Sommer","D","entfällt",1,"entfällt","I"]
[]
["EM 0160","Datenlogger Combilog 420101",60085630,"B 321\nR 202","Sommer","C",1,"entfällt","E","entfällt"]
["EM 0161","Datenlogger Combilog 420101",60095643,"B 321\nR 202","Sommer","C",1,"entfällt","E","entfällt"]
[]
[]
[]
[]
[]
[]
["SD 0500","Bügelmessschraube mit Digitalanzeige \n(0-30 mm)",null,"B 310\nR 154","Schneider Worgull","C",1,1,"I","I"]
["EM 0501","Digital-Multimeter Agilent 34410A","60092725","B 301\nR 107.3","Ahrens","B",1,"entfällt","E","entfällt"]
["OM 0502","Nahfeldmesssystem",60077638,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
["MI 0503","Stereomikroskop M650","60014145 / 00965837","B 301\nR 211","Humbert Ahrens","D","entfällt",1,"entfällt","I"]
["MI 0504","Stereomikroskop M3Z ",60049076,"B 301\nR 211","Humbert Ahrens","D","entfällt",1,"entfällt","I"]
["EM 0505","Digitalmultimeter HP 3455 A","00934548","B 301\nR 107.3","Ahrens ","D","entfällt",1,"entfällt","I","EM 0089"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",null,"B 310\nR 154","Ahrens","C",2,"entfällt","E","entfällt",null,"EM 0506"]
["EM 0507","Digitales Speicheroszilloskop\nTektronix TDS 430 A",60054865,"B 301\nR 107.4","Ahrens ","D","entfällt",1,"entfällt","I"]
["SO 0508","MKS Ansteuerung PR-4000",null,"B 301\nR 107.3","Ahrens","C",1,"entfällt","I","entfällt",null,"SO 0508"]
["SO 0509","Gasflussmonitor bis 10 sccm",null,"B 301\nR 107.3","Ahrens","D","entfällt",2,"entfällt","I","SO 0509"]
["SO 0510","MKS Ansteuerung PR 4000-F2V1N",60068368,"B 301\nR 107.3","Ahrens ","C",1,"entfällt","I","entfällt",null,"SO 0508"]
["SO 0511","Gasflussregler bis 10 sccm ",60058176,"B 301\nR 107.3","Ahrens","C",1,1,"E","E",null,"SO 0511"]
["EM 0512","Digital-Multimeter Agilent 34410A","69009749","B 301\nR 107.3","Ahrens","C",1,"entfällt","E","entfällt"]
[]
[]
[]
["WA 0516","Mettler AE240 Waage ","60028477 / 00973939","B 321\nR 305","Althuon","C",1,1,"E***","E***"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",null,"B 301\nR 107.3","Ahrens","D","entfällt",1,"entfällt","I"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",null,"B 301\nR 211","Ahrens  Humbert","D","entfällt",1,"entfällt","I"]
[]
["SO 0520","Thermo-Hygrometer Testo 608-H2",null,"B 301\nR 211","Ahrens","C*",1,"entfällt","I","entfällt"]
["SO 0521","Simultane Thermoanalyse PL STA 1000","00976090","B 321\nR 306","Feit","C*",1,2,"I","E***"]
["SO 0522","Wärmestromkalorimeter DSC 204 \"Phoenix\"","60071809","B 321\nR 306","Dinglreiter","C*",2,2,"I","E***"]
["SO 0523","Thermomechanische Analyse TMA402",60056011,"B 321\nR 306","Feit","C*",1,2,"I","E***"]
["SO 0524","Dynamic Stress Rheometer SR500",60051366,"B 321\nR 306","Feit","C",2,2,"E***","E***"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2","860003\n(Uni)","B 301\nR 305","Guttmann","C",2,2,"E***","E***"]
["HO 0526","Höhentaster MT 60M",60044295,"B 310\nR 154","Schneider","C",1,1,"I","I"]
["WA 0527","Waage Mettler MT5","00973940","B 321\nR 306","Keller","C",1,1,"E***","E***"]
["WA 0528","Waage Mettler AG245","60046175","B 301\nR 306","Guttmann","C",1,1,"E***","E***"]
["SD 0529","Digital-Mikrometerschraube M 30 Sony\nµ-mate","00972482","B 310\nR 154","Schneider","C",1,1,"I","I"]
["SO 0530","Ubbelohde Viskosimeter","00946048","B 301\nR 305","Feit","C",1,"entfällt","I","entfällt"]
["WA 0531","Laborwaage LC 220S","00969228","B 321\nR 212","Hahn","C",1,1,"E***","E***"]
["MI 0532","Messmikroskop ARISTOMET"," 00976426","B 301\nR 107.3","Ahrens  Humbert","C",1,1,"I","E***"]
["SO 0533","Microtester","60025512 / 00970948","B 301\nR 211","Humbert Ahrens","C",2,2,"E***","E***"]
["SO 0534","UV-VIS Spektrometer Lambda 2","00963068","B 301\nR 206","Bade","C",2,2,"E***","E***"]
[]
[]
[]
[]
["OM 0539","Lightwave Multimeter HP8163A","60061646","B 307\nR 027a","Hollenbach Boehm","D","entfällt ",5,"entfällt ","I"]
["OM 0540","Reflektometer HP 8504B",40001711,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
["OM 0541","Wellenlängenmessgerät HP86120B",60056969,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
[]
[]
[]
[]
["OM 0546","Lightwave Multimeter HP 8153A",60061646,"B 307\nR 027a","Hollenbach Boehm","D","entfällt ",5,"entfällt ","I"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",60072142,"B 301\nR 107.3","Ahrens","C",1,"entfällt","I","entfällt ",null,"SO 0508"]
["SO 0548","Differenzdruckaufnehmer 5 bar ",60072141,"B 301\nR 107.3","Ahrens","C*",1,"entfällt ","I, E","entfällt "]
["OM 0549","Rifocs Optisches Messsystem",60070947,"B 307\nR 027a","Hollenbach Boehm","D","entfällt ",5,"entfällt ","I"]
[]
["OM 0551","IR-Photodetektor",null,"B 307\nR 027a","Hollenbach Boehm","D","entfällt ",5,"entfällt ","I"]
["EM 0552","Spectrum Analyzer Modell E4403B",null,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
[]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet","00973931","B 301\nR 107.7","Last","C",1,1,"I","E***"]
["OM 0555","IR-Photodetektor",null,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
[]
[]
[]
[]
[]
["OM 0561","Polarization Controller Agilent 11896 A",60071598,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
[]
[]
[]
[]
[]
[]
[]
[]
["WA 0570","Präzisionswaage 1413 MP8-1","99064122 / 00941219","B 301\nR 107.7","Schneider","C",1,1,"E***","E***"]
["WA 0571","Waage Kern 510-33",60040892,"B 301\nR 209","Gültig      Kohl","C",1,1,"E***","E***"]
[]
[]
["WA 0574","Präzisionswaage U 5000D","60002137 / 00954671","B 301\nR 306","Guttmann","C",1,1,"E***","E***"]
["Frei"]
["SO 0576","Differenzdruckaufnehmer 10 bar ",60068369,"B 301\nR 107.3","Ahrens ","B",1,"entfällt","E","entfällt"]
["SO 0577","Gasflussregler bis 1 sccm ",60068370,"B 301\nR 107.3","Ahrens","D","entfällt",2,"entfällt","I","SO 0509"]
["EM 0578","Digital-Multimeter Voltcraft M-4660A",null,"B 301\nR 107.3","Ahrens  Humbert","C",2,2,"E","E",null,"EM 0506"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",null,"B 301\nR 107.3 ","Ahrens","C",2,"entfällt","E","entfällt",null,"EM 0506"]
["OM 0580","Optical Power Meter ML9001A",60070795,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
[]
[]
[]
["OM 0584","Abbe-Refraktometer B","/100/24/07","B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
["WA 0585","Analysenwaage 1801 MP8","00943790","B 301\nR 211","Humbert","C",1,1,"E***","E***"]
["EM 0586","Tektronix Oszilloskop THS720 A",60072779,"B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
["EM 0587","Digital-Multimeter Fluke 45",60074132,"B 301\nR 212c","Gültig      Kohl","C",3,"entfällt","I","entfällt"]
["EM 0588","Digital-Multimeter HP 34401A","60074130","B 301\nR 209","Gültig      Kohl","C",3,"entfällt","I","entfällt"]
["WA 0589","Präzisionswaage Scaltec",60074353,"B 301\nR 206","Bade","C",1,1,"E***","E***"]
[]
["SO 0591","pH-Mehrparametermessgerät Multi 340i","60074272","B 301\nR 306","Guttmann","C","½",1,"I","I"]
["SO 0592","Flächenwiderstandsmessgerät MR-1",60073630,"B 301\nR 306","Guttmann","C",1,1,"E","E"]
["EM 0593","Digital-Multimeter Fluke 45",60074131,"B 301\nR 209","Gültig      Kohl","C",3,"entfällt","I","entfällt"]
["EM 0594","Digital-Multimeter HP 34401A",60074129,"B 301\nR 209","Gültig      Kohl","C",3,"entfällt","I","entfällt"]
["SO 0595","Gasflussregler bis 100 sccm ",null,"B 301\nR 107.3","Ahrens","C",1,1,"E","E",null,"SO 0511"]
["MP 0596","Montageplatz 2 \"Charakterisierung Spektrometer 0603\" ",null,"B 307\nR 027a","Last","C"]
[]
["SO 0598","Gasflussregler bis 200 sccm ",null,"B 301\nR 107.3","Ahrens","C",1,1,"E","E",null,"SO 0511"]
["OM 0599","Powermeter 8164B mit Tuneable Laser 81680A","03-006376\n(Uni)","B 307\nR 027a","Hollenbach Boehm","D","entfällt",5,"entfällt","I"]
[]
[]
[]
["SO 0603","Bronkhorst Betriebsgerät E-7500-10-AAA","60087137-1","B 301\nR 107.3","Ahrens","C",1,"entfällt","I","entfällt"]
["SO 0604","Bronkhorst Massedurchflussregler 80 g/h","60087137","B 301\nR 107.3","Ahrens","C",1,1,"E","E"]
["OM 0605","Optical Spectrum Analyser OSA AQ6317B","6008006862","B 307\nR 027a","Hollenbach Boehm","C",3,1,"E","I"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",null,"B 301\nR 211","Humbert Ahrens","C",3,"entfällt","I","entfällt"]
["MI 0607","Stereo  Zoommikroskop SZ 61 TR",null,"B 307\nR 132c","Hübner Köhler","D","entfällt",2,"entfällt","I"]
["WA 0608","Präzisionswaage ED5201-CW",60104243,"B 301\nR 142","Köhler","C",1,1,"E***","E***"]
["WA 0609","Analysenwaage ED224S",60104242,"B 301\nR 142","Köhler","C",1,1,"E***","E***"]
["WA 0610","Präzisionswaage ED5201-CW",60104389,"B 310\nR 151","Köhler Hübner","C",1,1,"E***","E***"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",69020192,"B 307\nR 123","Giraud","C",1,1,"E***","E***"]
["SO 0612","UV-VIS Spektralphotometer Specord 200",60106009,"B 301\nR 306","Guttmann","C",1,1,"E***","E***"]
["SO 0613","Schmelzpunktmessgerät M-560","60103764","B 301\nR 306","Guttmann Karbacher","C*",1,"entfällt","I","entfällt"]
[]
[]
[]
[]
[]
[null,null,"*Kurzbezeichnung der Prüfmittel",null,null,null,"Verantwortliche für PM-Gruppen"]
[null,null,"EM - Elektronisches Messgerät"]
[null,null,"HO - Höhenmessgerät"]
[null,null,"HP - Härteprüfgerät"]
[null,null,"MI - Mikroskop",null,null,null,"Feit"]
[null,null,"MP - Montageplatz"]
[null,null,"MS - Messschieber"]
[null,null,"OB - Oberflächenmessgerät"]
[null,null,"OM - Optisches Messgerät"]
[null,null,"PS - Positioniersystem "]
[null,null,"SD - Schichtdickenmessgerät"]
[null,null,"SO - Sonstiges"]
[null,null,"WA - Waage",null,null,null,"Feit"]
[]
["*Schlüssel für Kurzbezeichnung, **RRK = Reinraumkabine,  *** Wartung/Kalibrierung erfolgt im Hause"]