{"text_format":"1","workbook":"xlsx","n_sheets":1,"sheets":["Liste FM"],"not_rendered":{"charts":0,"images":1,"macros":1,"external_links":0,"defined_names":15,"comments":1,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"Liste FM","index":0,"n_rows":208,"n_cols":11,"rows_kept":208,"cut":false,"hidden":false,"merged":[[207,2,207,5],[205,2,205,5],[206,2,206,5],[203,2,203,5],[204,2,204,5],[200,2,200,5],[201,2,201,5],[202,2,202,5],[195,2,195,5],[196,2,196,5],[197,2,197,5],[199,2,199,5],[191,2,191,5],[192,2,192,5],[198,2,198,5],[2,8,2,15],[193,2,193,5],[194,2,194,5],[189,2,189,5],[190,2,190,5],[188,2,188,5]]}
["Liste der Fertigungsmittel",null,null,null,"Betriebsmittel","PM-Liste","Wartungsplan","Kalibrier-plan",null,"Stand:","2016-07-20T16:49:45"]
["Kurzbez. mit lfd.Nr. *","Fertigungsmittelname","Anlagen-/ Inventar-Nr.","Standort","Geräteverantw./Stellvertreter","Wartungs- intervall","WPL PL501","Anlagen-buch"]
[null,null,"\n",null,null,"[Jahr]","Ext../ Int. ","Ja / nein","*Schlüssel für Kurzbezeichnung, ** Reinraumzelt, \n*** Wartung/Kalibrierung erfolgt im Hause, A* nur bei Bedarf"]
["RS 0200","Spincoater (OPTIcoat ST22+)","---","B 301\nR 142","Fr. Fornasier Fr. Nees",1,"I","ja"]
["AE 0201","Oxidationsanlage","---","B 301\nR 142","Köhler             Fr. Fornasier",1,"I","ja","Aus der Instandhaltung genommen"]
["AE 0202","Oxidationsanlage","---","B 301\nR 142","Köhler             Fr. Fornasier",1,"I","ja","Aus der Instandhaltung genommen"]
["GA 0203","Kupfergalvanikbad","---","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1","99009890 / 00936432","B 301\nR 302","Heiler",1,"I","ja"]
["BD 0205","Bedampfungsanlage Univex 450 mit Depositions Monitor XTM/2","40000779 / 00967986","B 301\nR 302","Heiler",1,"I","ja"]
["AE 0206","Hamatech-Entwickler","40000221 / 00954372","B 301\nR 142","Fr. Fornasier Nees",1,"I","ja","Aus der Instandhaltung genommen"]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)","40000222 / 00954373","B 301\nR 142","Fr. Nees         Fr. Fornasier",1,"I","ja","Aus der Instandhaltung genommen"]
["RS 0208","Spincoater (Hamatech-Belacker)","40000220 / 00954367","B 301\nR 142","Fr. Nees         Fr. Fornasier",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0209","Hotplate ","60014958 / 00965834","B 301\nR 142","Fr. Fornasier Fr. Nees",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0211","Universalwärmeschrank UF 110plus","60106822","B 309\nR 142","Fr. Karbacher          Fr. Fornasier ",1,"E***","ja"]
["OF 0213","Umluftofen 4 (UT 5050 EK-LAF),\nFa. Heraeus","60000915 / 00958967","B 309\nR 148","Röder",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0214","HMDS-Ofen Star-2000, Fa. IMTEC","60000915 / 00954365","B 301\nR 142","Fr. Fornasier",1,"I","ja"]
["AE 0215","Chromätzer CPP 70","40000430 / 00958969","B 301\nR 148","Röder",1,"I","ja","Aus der Instandhaltung genommen"]
["SG 0216","Stromgeber","790019\n(Campus Süd)","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["OF 0218","Hotplate, Fa. Convac","---","B 301\nR 142","Fr. Fornasier Fr. Nees",1,"I","ja","Aus der Instandhaltung genommen"]
["AE 0219","Entwickleranlage, CEP 8 Standard, Fa. Convac","40000430 / 00958969","B 309\nR 148","Fr. Nees        Bacher",1,"I","ja","Aus der Instandhaltung genommen"]
["GA 0220","Goldgalvanikbad","---","B 301\nR 141","Fr. Matthis",1,"I","ja"]
["AE 0221","Planarätzer P300","40000361 / 00963053","B 310\nR 154","Schneider",2,"I","ja","Aus der Instandhaltung genommen"]
["AE 0222","Plasmaätzer 300E, Technics Plasma GmbH","99011611 / 00943806","B 301\nR 302","Heiler",2,"I","ja",null,null," "]
["AE 0223","Spin Processor (Entwickler)",60063837,"B 301\nR 142","Fr. Fornasier",1,"I","ja"]
["BS 0224","Belichtungsgerät LH5","99013508 / 00952758","B 301\nR 142","Fr. Fornasier",1,"I","ja"]
["BS 0225","Belichtungsgerät MA6, Fa. Karl Süss","99013609 / 00953120","B 301\nR 142","Fr. Fornasier",1,"I","ja","Aus der Instandhaltung genommen"]
["AE 0226","SENTECH Plasmaanlage","1400033150","B 301 \nR 142","Köhler            Fr. Karbacher",1,"I","ja"]
["SG 0227A","Stromgeber","00972538","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["SG 0227B","Stromgeber","00972539","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["SL 0228","Ultraschallreinigungsgerät","00966769","B 301\nR 142","Köhler\nFr. Fornasier",1,"I","ja","Aus der Instandhaltung genommen"]
["BE 0229","Läppmaschine Myläpp, Fa. Stähli / Schweiz","00943785","B 310\nR 152","Heiler",2,"I","ja","Aus der Instandhaltung genommen"]
["BE 0230","Läppmaschine Myläpp, Fa. Stähli / Schweiz","00936523","B 310\nR 152","Heiler",2,"I","ja","Aus der Instandhaltung genommen"]
["BE 0231","ULTRA-Fräse Polycut E, Fa. Reichert-Jung","40000498 / 00965371","B 310\nR 152","Heiler",2,"I","ja","Aus der Instandhaltung genommen"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600, Fa. Reichert-Jung","60006517 / 00962029","B 310\nR 152","Heiler",2,"I","ja","Aus der Instandhaltung genommen"]
["SL 0233","Ultraschallreinigungsgerät: Sonorex Super RK 514 BH, Fa. Bandelin","00947136","B 301\nR 302","Heiler",2,"I","ja"]
["SL 0234","Ultraschallreinigungsgerät: Sonorex 510 H, Fa. Bandelin","---","B 301\nR 302","Heiler",2,"I","ja"]
["OF 0235","Vakuumofen Vacutherm, Fa. Heraeus","00978348","B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["OF 0236","Vakuumofen Vacutherm, Fa. Heraeus","00978349","B 307\nR 132c","Fr. Hübner",1,"E***","ja"]
["OF 0237","Umluftofen UT 5050 EK-LAF, Fa. Heraeus",60049765,"B 307\nR 132c","Fr. Hübner",1,"E***","ja"]
["BS 0238","Laserbeschriftungsgerät",60063532,"B 309\nR 137","Heneka",1,"I","ja"]
["SG 0239","Niederspannungsgerät NTN 350M - 20, Fa. Fug","---","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["GA 0240","Galvanikbad: HEGA I - Anlage\n- Galvanikbad",60000952,"B 301\nR 109","Guttmann Benkel",1,"I","ja"]
["GA 0241","Galvanikbad: HEGA III - Anlage\n- Galvanikbad",60000950,"B 301\nR 109","Guttmann Benkel",1,"I","ja"]
["GA 0242","Galvanikbad: HEGA IV - Anlage\n- Galvanikbad",40001561,"B 301\nR 140","Fr. Matthis",1,"I","ja"]
["GA 0243","Galvanikbad: HEGA Alt  - Anlage\n- Galvanikbad",99056403,"B 301\nR 109","Fr. Matthis\nLaier",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0244","Vakuumofen Vacutherm","00978352","B 301\nR 109","Fr. Matthis",1,"E***/I","ja"]
["GA 0245","Goldgalvanikbad","---","B 301\nR 141","Fr. Matthis",1,"I","ja","Aus der Instandhaltung genommen"]
["BE 0246","Mitsubishi Drahterodiermaschine DWC 90 SZ AE",40001179,"B 301\nR 102","Heidt","½ ","I","ja"]
["BE 0247","Poliermaschine Safir 355",60061279,"B 310\nR 152","Heiler",1,"I","ja","Aus der Instandhaltung genommen"]
["PR 0248","Weberpresse PW 10","00976076","B 310\nR 154","Schneider",10,"I","ja"]
["BS 0249","Elektronenstrahlschreiber EBPG5200Z","892956","B 301\nR 107.8/9","Hahn     Bacher","½ ","E***","ja"]
["PR 0250","Abformanlage (WUM2+WUM3)",40001382,"B 310\nR 154","Schneider Worgull",1,"E***/I","ja"]
["SA 0251","Sputteranlage MED-010","60029135 / 00973981","B 307\nR 133**","Schneider, Worgull",1,"I","ja","Aus der Instandhaltung genommen"]
["SL 0252","Nassprozessanlage",40002206,"B 307\nR 132c","Fr. Hübner Börner",1,"I","ja"]
["SL 0253","Ultraschallreinigungsgerät: Sonorex",60041918,"B 309\nR 148","Fr. Hübner",1,"I","ja"]
["TS 0254","Wafersäge Micro-Ace 3S3",40001388,"B 301\nR 210","Papagno",1,"I","ja","Aus der Instandhaltung genommen"]
["BS 0255","Laseranlage LAY 75K","00969460","B 301\nR 210","Papagno",1,"I","ja"]
["VS 0256","Heißsiegelbonder Phasemaster IV",60049513,"B 301\nR 107.3","Ahrens           Fr. Humbert",1,"I","ja","Aus der Instandhaltung genommen"]
["SO 0257","Positioniereinheit zur partiellen Resistmetallisierung","---","B 307 \nR 132a","Wissmann Guttmann",5,"I","ja"]
["VS 0258","Verklebeapparatur",60058280,"B 301\nR 107.3","Ahrens           Fr. Humbert",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0259","Trockenofen ED-115",60059063,"B 310\nR 156","Ahrens          Fr. Humbert",1,"I","ja"]
["GA 0260","Goldgalvanikbad","---","B 301,\nR 141","Fr. Matthis",1,"I","ja"]
["OF 0261","Klimaschrank Hygros 15 C","920003\n(Campus Süd)","B 301","Heneka",2,"E***/I","ja"]
["SG 0262","Niederspannungsgerät NTN 350M - 20, Fa. Fug","00941116","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0263","Niederspannungsgerät NTN 350M - 20, Fa. Fug","00945879","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0264","Niederspannungsgerät NTN 350M - 20, Fa. Fug","00935592","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0265","Niederspannungsgerät NLN 35M - 20, Fa. Fug","00946723","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0266","Niederspannungsgerät NTN 350M - 20, Fa. Fug","---","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0267","Niederspannungsgerät NLN 35M - 12,5 Fa. Fug","00934977","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0268","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster",60055210,"B 301\nR 141","Fr. Matthis",1,"I","ja"]
["SG 0269","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00972477","B 301\nR 141","Fr. Matthis",1,"I","ja"]
["SG 0270","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00976418","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0271","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00970906","B 301\nR 141","Fr. Matthis",1,"I","ja"]
["SG 0272","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00970908","B 301\nR 141","Fr. Matthis",1,"I","ja"]
["SG 0273","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00972476","B 301\nR 141","Fr. Matthis",1,"I","ja"]
["SG 0274","Präzisionsstromgeber DIGISTANT 6425T, Fa. Burster","00908322","B 301\nR 141","Fr. Matthis",1,"I","ja"]
["RS 0275","Resistklebeplatz","---","B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["RS 0276","Resistklebeplatz","---","B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["RS 0277","Resistklebeplatz","---","B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["RS 0278","Resistklebeplatz","---","B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["GA 0279","Hartnickelbad HEGA II","60000951/\n00954353","B 301\nR 140","Fr. Matthis",1,"I","ja"]
["SG 0280","Niederspannungsgerät NLN 35M - 12,5 Fa. Fug","---","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["SG 0281","Niederspannungsgerät NLN 35M - 12,5 Fa. Fug","00951115","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["SG 0282","Niederspannungsgerät NLN 35M - 12,5 Fa. Fug",60055347,"B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0283","Niederspannungsgerät NLN 35M - 12,5 Fa. Fug",60055346,"B 301\nR 109","Fr. Matthis",1,"I","ja"]
["SG 0284","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00978419","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["SG 0285","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster","00970907","B 301\nR 206","Fr. Matthis",1,"I","ja"]
["BS 0286","Jenoptic-Scanner, Fa. Jenoptik (Litho 3)","40001349","B 348\n(Anka)","Münch Pantenburg",1,"I","ja"]
["BS 0287","Jenoptic-Scanner, Fa. Jenoptik (Litho 1)","40001790","B 348\n(Anka)","Münch Pantenburg",1,"I","ja"]
["EA 0288","Becherglas-Entwickleranlage","---",null,"Börner\nPantenburg",1,"I","ja","Aus der Instandhaltung genommen"]
["EA 0289","Becherglas-Entwickleranlage","---",null,"Börner\nPantenburg",1,"I","ja","Aus der Instandhaltung genommen"]
["EA 0290","Becherglas-Entwickleranlage","---",null,"Börner\nPantenburg",1,"I","ja","Aus der Instandhaltung genommen"]
["EA 0291","Becherglas-Entwickleranlage","---",null,"Börner\nPantenburg",1,"I","ja","Aus der Instandhaltung genommen"]
["EA 0292 ","Becherglas-Entwickleranlage","---",null,"Börner\nPantenburg",1,"I","ja","Aus der Instandhaltung genommen"]
["BS 0293","Jenoptic-Scanner, Fa. Jenoptik (Litho 2)","40001348","B 348\n(Anka)","Münch Pantenburg",1,"I","ja"]
["SG 0294","Niederspannungsgerät NTN, Fa. Fug","---","B 301\nR 109","Fr. Matthis",1,"I","ja"]
["RS 0295","Resistklebeplatz",60052959,"B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["RS 0296","Resistklebeplatz",60053088,"B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["RS 0297","Resistklebeplatz",60052880,"B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["OF 0298","Trockenschrank WTB Binder ED-53",60059062,"B 321\nR 202a","Ahrens Humbert",1,"I","ja"]
["RS 0299","RC8 THP Wafer Processing System, Fa. Süss","---","B 301\nR 142","Fr. Fornasier",1,"I","ja"]
["BE 0300","Micro Milling Center MMC600-Z2",1400032940,"B 307\nR 121","Fr. Moritz",1,"I","ja"]
["SG 0301","Präzisionsstromgeber DIGISTANT 6426, Fa. Burster",60055209,"B 301\nR 109","Fr. Matthis",1,"I","ja"]
["OF 0302","Vakuum-/Inertgasofen 500°C, VT 6060 P-500",60071620,"B 301\nR 142","Fr. Fornasier Ahrens",1,"E***","ja"]
["MP 0303","Montageplatz 1 „Fasermontage“","---","B 301\nR 212","Böhm",1,"I","ja","Aus der Instandhaltung genommen"]
["MP 0304","Montageplatz 4 „Faserstecker“","---","B 301\nR 212","Böhm",1,"I","ja","Aus der Instandhaltung genommen"]
["GA 0305","Goldgalvanikbad","---","B 301\nR 141","Fr. Matthis\nKöhler",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0306","Umluftofen UT 5050 LAF, Fa. Kendro",60072766,"B 301\nR 142","Fr. Fornasier Köhler",1,"E***","ja"]
["OF 0307","Vakuumofen VT 6060 M, Fa. Kendro",60072764,"B 301\nR 142","Fr. Fornasier Köhler",1,"E***","ja"]
[]
["SL 0309","Megaschallgeber",60058013,"B 309\nR 148","Fr. Fornasier",1,"I","ja"]
["AE 0310","Prozessor HMP 900 (Entwickler)",40002271,"B 301\nR 142","Köhler\nLaier",1,"I","ja","Aus der Instandhaltung genommen"]
["AE 0311","4-TEC Plasmaätzer","---","B 309\nR 148","Köhler",1,"I","ja"]
["HD 0312","Maskenreiniger HMR 900","---","B 301\nR 142","Fr. Nees         Fr. Fornasier",1,"I","ja"]
["SL 0313","Ultraschallreinigungsanlage für FE","60087179 / \n60082637","B 310\nR 151","Guttmann",1,"I","ja","Aus der Instandhaltung genommen"]
["BS 0314","EVG 620 Double Side Mask Aligner","---","B 301\nR 142","Fornasier Duttenhofer",1,"E***","ja"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100","---","B 301\nR 141","Fr. Matthis Köhler",1,"I","ja"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101","---","B 301\nR 141","Fr. Matthis Köhler",1,"I","ja"]
["SG 0317","Niederspannungsgerät NTN 350M - 20, Fa. Fug",null,"B 301\nR 140","Fr. Matthis",1,"I","ja"]
["BD 0318","IBAD-Beschichtungsanlage",40002710,"B 321\nR 308","Sommer Augustin\nAugustin",1,"I","ja","Aus der Instandhaltung genommen"]
["SG 0319","Niederspannungsgerät NTN 350M - 20, Fa. Fug","---","B 301\nR 140","Fr. Matthis",1,"I","ja"]
["VS 0320","Ball Wedge Bonder 7700 A","60027240 / 00971776","B 301,\nR 153","Sommer",1,"E***","ja","Aus der Instandhaltung genommen"]
["OF 0321","Rohrofen klappbar","00933660","B 321\nR 202","Adib",1,"I","ja","Aus der Instandhaltung genommen"]
["OF 0322","Rohrofen klappbar","00935484","B 321\nR 202","Adib",1,"I","ja","Aus der Instandhaltung genommen"]
["SL 0323","Ultraschallreinigungsanlage Powersonic",60065725,"B 321\nR 314","Adib","1/2","I","ja","Aus der Instandhaltung genommen"]
["SO 0324","Null-Luft-Generator TG 12 UP",60096195,"B 321\nR 315","Sommer    Adib",1,"I","ja","Aus der Instandhaltung genommen"]
["SO 0325","Null-Luft-Generator ZA 130K",60062581,"B 321\nR 202","Benz",1,"E***","ja","Aus der Instandhaltung genommen"]
["TS 0326","Sägemaschine DAD 3430","40009350","B 301\nR 210","Papagno",2,"E***","ja"]
["SA 0327","Parylen-Anlage PDS 2010",60061262,"B 321\nR 108","Rapp  Dirschka",1,"I","ja"]
["GA 0328","Galvanik-Prozesseinheit (Silicet)",60103764,"B 301\nR 109","Guttmann Karbacher",0.5,"I","ja"]
["OF 0329","Trockenofen Heratherm OMH 60",60105688,"B 321\nR 112","Sachsenheimer Dirschka",2,"I","ja"]
["SO 0330","Marvin-Anlage","---","B 321\nR 108","Rapp  Dirschka",1,"I","ja"]
["SO 0331","Wasservollentsalzer Seradest S1500",99069492,"B 321\nR 314","Sommer",1,"I","ja","Aus der Instandhaltung genommen"]
["SA 0332","Spincoater","60096386","B 421\nR 112","Dirschka       Fr. Richter",1,"I","ja"]
["VS 0333","Ultraschallschweißgerät","---","B 301,\nR 107.3","Ahrens",1,"I","ja"]
["GA 0334","Goldgalvanikbad (FMK, WA wie GA 0220)","---","B 301,\nR 141","Fr. Matthis",1,"I","ja"]
["OF 0335","Hotplate (OPTIhot SHT20)","---","B 301\nR 142","Fr. Fornasier Fr. Nees",1,"I","ja"]
["OF 0336","Hotplatebox (Horst)","---","B 301\nR 142","Fr. Fornasier Fr. Nees",1,"I","ja"]
["AE 0337","Lackentferner STP 2020","40002924","B 309\nR 148","Köhler  Heneka",1,"I","ja"]
["RS 0338","Spincoater Primus STT15","10001957 (Campus Süd)","B 301\nR 142","Fr. Fornasier Köhler",1,"I","ja"]
["SE 0339","Sprühentwickler ST30 (organisch)","---","B 309\nR 148","Fr. Nees Bacher",1,"I","ja"]
["SE 0340","Sprühentwickler ST30 (anorganisch)","---","B 301\nR 142","Fr. Fornasier Köhler",1,"I","ja"]
["RS 0341","Spincoater Primus STT15",null,"B 307\nR 132c","Fr. Karbacher Köhler",1,"I","ja"]
["SO 0342","Laborkalander R2R",1400032840,"B 310\nR 154","Schneider","10, 1","E***/I","ja"]
["OF 0343","Klimaschrank ICH 256",60105606,"B 309\nR 142","Fr. Karbacher Fr. Fornasier",1,"E***","ja"]
["OF 0344","Präzisionsheizplatte PZ 35 ET",60106052,"B 309\nR 142","Fr. Karbacher Fr. Fornasier",1,"I","ja"]
["GA 0345","Glasgalvanikanlage",null,"B 301\nR 148","Fr. Matthis Köhler",1,"I","ja"]
["OF 0346","Hotplate (Horst)",1601039480,"B 307\nR 133","Rupp",1,"I","ja"]
["OF 0347","Präzisionsheizplatte PZ 35 ET","0301-11313","B 307\nR 132c","Fr. Karbacher         Fr. Hübner",1,"I","ja"]
["OF 0348","Präzisionsheizplatte PZ 35 ET","0301-11314","B 307\nR 132c","Fr. Karbacher         Fr. Hübner",1,"I","ja"]
["SO 0349","Gefriertrocknungsanlage Freezone Plus 6",1601076640,"B 307\nR 132c","Fr. Karbacher Fr. Hübner",1,"I","ja"]
[]
["PR 0801","Abformanlage WUM 1",40001279,"B 310\nR 154","Worgull Schneider",1,"E***/I","ja"]
["PR 0802","Nanoimprintanlage EVG 510HE",40003179,"B 307\nR 132c","Worgull Schneider",5,"E***","ja"]
[]
["OF 0804","Trockenofen Memmert 500","60047154","B 301\nR 211","Fr. Humbert Ahrens",1,"I","ja"]
["OF 0805","Trockenofen Memmert 100","---","B 301\nR 211","Fr. Humbert Ahrens",1,"I","ja"]
["OF 0806","Versuchsstand „Tempern“","---","B 301\nHalle","Pinneker",1,"I","ja","Aus der Instandhaltung genommen"]
["VS 0807","Mikromontagevorrichtung",60053066,"B 301\nR 211","Humbert\nBoehm",1,"I","ja","Aus der Instandhaltung genommen"]
["VS 0808","Verklebeapparatur",60044056,"B 301\nR 211","Ahrens          Fr. Humbert",1,"I","ja"]
["PR 0809","Abformanlage WMP 1000","40002611","B 301\nR 107.7","Schneider",1,"E***/I","ja"]
["SO 0810","Präzisions-Lineartisch LTM 80-75-HSM",1601107150,"B 301\nR 107.4","Lutz",1,"I","ja"]
[]
["OF 0812","Hotplate HP-155","60097820","B 301\nR 211","Fr. Humbert",1,"I","ja"]
["VS 0813","Wedge-Wedge Bonder 7400A","00971777","B 301\nR 211","Boehm\nFr. Humbert",1,"E***","ja","Aus der Instandhaltung genommen"]
["BE 0814","Schleif- und Poliermaschine Saphir 350E","60082686","B 310\nR 152","Heiler",1,"I","ja","Aus der Instandhaltung genommen"]
["BS 0815","UV-Härtelampe DeloLux 05",60047349,"B 301\nR 211","Fr. Humbert Ahrens",1,"I","ja","Aus der Instandhaltung genommen"]
["BS 0816","UV-Härtelampe DeloLux 04",60055155,"B 301\nR 211","Fr. Humbert Ahrens",1,"I","ja"]
["VS 0817","Dosierautomat",60072221,"B 307\nR 132c","Köhler",1,"I","ja"]
["SA 0818","Sputteranlage UNIVEX 500","40001770","B 309\nR 137/138","Köhler",1,"I","ja"]
["OF 0819","Vakuum-Trockenschrank","---","B 307\nR 132c","Fr. Hübner Köhler",1,"I","ja"]
["OF 0820","Umluftofen UT 5050","60049457","B 307\nR 132c","Fr. Hübner Köhler",1,"E***","ja"]
["PR 0821","Abformanlage HEX 03 ",40001942,"B 310\nR 154","Worgull",1,"E***/I","ja"]
["BS 0822","UV-Härtelampe DeloLux 04","60059394","B 301\nR 107.3","Fr. Humbert Ahrens",1,"I","ja"]
["SL 0823","Ultraschallgerät Sonicator Q 125","---","B 301\nR 107.4","Syurik",1,"I","ja"]
["XX 0824",null,"---","B\nR",null,null,null,null,"Frei"]
["OF 0825","Vakuumofen VT 5050 EK","00929745","B 310\nR 151","Wissmann",2,"E***/I","ja"]
[]
[]
["VS 0828","Fusionsspleissgerät S177A","07-039554 (Campus Süd)","B 307\nR 027a","Hollenbach",1,"I","ja","Aus der Instandhaltung genommen"]
["VS 0829","Kleberoboter",60090555,"B 307\nR 132c","Fr. Hübner",1,"I","ja"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)","80000990","B 307\nR 132 a+b","Muslija",1,"E***/I","ja"]
["BS 0831","Laser-Lithographie-Anlage",40003100,"B 301\nR 142","Hengsbach Köhler",1,"E***","ja"]
["BS 0832","Nanoscribe 3 D Laserlithographie-System","40003261","B 309\nR 147","Hengsbach Köhler",1,"E***","ja"]
[]
[]
[]
[]
[null,null,"*Kurzbezeichnung der Fertigungsmittel"]
[null,null,"AE -   Ätzanlage"]
[null,null,"BD -   Bedampfungsanlage"]
[null,null,"BE -   Bearbeitungsanlage"]
[null,null,"BS -   Bestrahlungsanlage"]
[null,null,"EA -   Entwickleranlage"]
[null,null,"GA -   Galvanikanlage"]
[null,null,"HD -   Hochdruckreinigungsanlage"]
[null,null,"MP -   Montageplatz "]
[null,null,"OF -   Ofen"]
[null,null,"PR -   Presse"]
[null,null,"RS -   Resistanlage"]
[null,null,"SA -   Sputteranlage"]
[null,null,"SG -   Stromgeber"]
[null,null,"SL -   Schallanlage"]
[null,null,"SO -   Sonstiges"]
[null,null,"TB -   Thermostatbad"]
[null,null,"TS -   Trennanlage"]
[null,null,"VS -   Verbindungsanlage"]
[null,null,"SE - Sprühentwickler"]