{"text_format":"1","workbook":"xlsx","n_sheets":26,"sheets":["KPL 2006 PM","KPL 2007 PM","KPL 2008 PM","KPL 2009 PM","KPL 2010 PM","KPL 2011 PM","KPL 2012 PM","KPL 2013 PM","KPL 2014 PM","KPL 2015 PM","KPL 2016 PM","KPL 2017 PM","KPL 2018 PM","KPL 2019 PM","KPL 2020 PM","KPL 2021 PM","KPL 2022 PM","KPL 2023 PM","KPL 2024 PM","KPL 2025 PM","KPL 2026 PM","KPL 2027 PM","KPL 2028 PM","KPL 2029 PM","KPL 2030 PM","KPL 20XX PM"],"not_rendered":{"charts":0,"images":1,"macros":1,"external_links":0,"defined_names":104,"comments":12,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900"}

{"sheet":"KPL 2006 PM","index":0,"n_rows":116,"n_cols":16,"rows_kept":116,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2006)"]
["WPL","PM"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","LASAIR -Partikelzählgerät 210  ",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SEM 525 M",1,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","½  ",null,null,"X",null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ",null,null,null,null,null,"X",null,null,null,null,null,"X"]
["OB 0009","Oberflächenmeßgerät SINUS","½ ",null,null,null,null,null,"X"]
["HO 0010","Höhenmeßgerät MT 60 M",1,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X","X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X","X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X","X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X","X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,"X",null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,null,null,"X",null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,"X",null,"X"]
["HO 0040","Kalibriernormal „Endmaß“",5,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0044","Kalibriernormal „Rauheit“",5,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0045","Kalibriernormal „Drehzahl“",1,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["OB 0051","Kalibriernormal „SINUS“",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0052","Elektronischer Schnelltaster",1,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,"X",null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0058","Montageplatz „Spektrometerdeckelung“",1,null,null,null,null,null,"X","X"]
["MP 0059","Montageplatz „Charakterisierung NIR“",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,"X","X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["SO 0070","Partikelmessgerät für Flüssigkeiten",2,null,"X","X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",2,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,"X","X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,"X"]
["SD 0081","Einstellmaße für Digitale Bügelmessschr.",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,"X","X",null,null,"als C-PM ab:31.1.06"]
["EM 0506","Hand-DMM Voltcraft M-4650 CR",2,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",2,null,null,null,null,null,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",2,null,null,null,null,null,null,null,"X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",2,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0523","Thermomechanische Analyse",1,"X",null,null,null,null,null,null,null,null,"X"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,null,null,"X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2",2,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X","X"]
["SO 0534","UV-VIS Spektrometer Lambda 2",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0545","Multimeter Fluke 85 III",5,"X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,null,null,null,null,"X","X"]
["EM 0553","Multimeter Fluke 85",5,"X"]
["SO 0567","Versuchsstand „Kryostat“",3,null,null,null,null,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["EM 0572","Digitalmultimeter Fluke 45",5,"X"]
["EM 0573","Digitalmultimeter Fluke 8010A",5,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,"X",null,null,null,null,"als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X"]
["EM 0579","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0588","Digitalmultimeter 34401A",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i","½",null,"X","X",null,null,null,null,"X","X"]
["SO 0592","Flächenwiderstandsmessgerät MR-1",1,null,null,"X",null,"X"]
["EM 0593","Digital-Multimeter Fluke 45",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter 34401A",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",1,null,null,"X"]

{"sheet":"KPL 2007 PM","index":1,"n_rows":127,"n_cols":16,"rows_kept":127,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2007)"]
["WPL","PM"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0001","LASAIR -Partikelzählgerät 210  ",1,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,"X","X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,"X",null,null,"X",null,null,null,null,null,"bis:  31.07.07"]
["MI 0004","Rasterelektronenmikroskop SEM 525 M",1,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","½  ",null,null,"X",null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0009","Oberflächenmeßgerät SINUS","½ "]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ",null,null,null,null,null,"X",null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",1,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,"X","X"]
["HO 0040","Kalibriernormal „Endmaß“",5,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,"X",null,null,null,null,null,null,null,null,null,null,null,"bis:  31.12.11"]
["SO 0045","Kalibriernormal „Drehzahl“",1,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["HO 0052","Elektronischer Schnelltaster",1,null,"X","X"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0058","Montageplatz „Spektrometerdeckelung“",1,null,null,null,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,"X",null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X","X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X","X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,"X",null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0100","Trübungssensor Turbimax-W CUS 31",1,null,null,null,"X"]
["EM 0108","Multimeter Keithley 2001",1,null,null,null,null,"X"]
["EM 0118","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,"X"]
["EM 0120","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)",1,null,null,null,"X"]
["SO 0126","Handhygrometer Testo 601",1,"X"]
["WA 0136","Analysenwaage Sartorius Handy",1,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,null,null,null,null,null,"X"]
["EM 0145","Netzwerkanalysator HP 8712ES",1,null,null,null,null,null,null,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",4,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,"X"]
["EM 0154","Digital-Multimeter HP-34401 A",5,null,null,null,null,null,null,"X"]
["SO 0156","Digitalthermometer GTH 1200 A",1,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0161","Datenlogger Combilog 420101",1,null,null,null,"X"]
["SO 0163","Digitaler Durchflussmesser",2,null,null,null,"X"]
["SO 0164","Kompakt Widerstandsthermometer",2,null,null,null,"X"]
["SO 0166","Druckmessumformer PU-01.1.1.1.F",1,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,"X","X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,"X","X",null,null,"als C-PM ab:31.1.06"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,"X","X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,"X"]
["SO 0523","Thermomechanische Analyse",1,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,"X",null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,"X",null,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,null,null,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,"X",null,null,null,null,"X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,null,null,null,null,null,"X","X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,"X",null,null,null,"als C-PM ab:31.1.06"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",3,null,"X"]
["EM 0588","Digitalmultimeter 34401A",3,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i","½",null,"X",null,null,null,null,null,"X"]
["SO 0592","Flächenwiderstandsmessgerät MR-1",1,null,null,null,null,"X"]
["EM 0593","Digital-Multimeter Fluke 45",3,null,"X"]
["EM 0594","Digitalmultimeter 34401A",3,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyser OSA",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",1,null,null,"X"]

{"sheet":"KPL 2008 PM","index":2,"n_rows":166,"n_cols":16,"rows_kept":166,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2008)"]
["WPL","PM"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,"X",null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","½  ",null,null,"X",null,null,null,null,null,"X","X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ",null,null,null,null,null,"X",null,null,null,null,null,"X"]
["OB 0009","Oberflächenmeßgerät SINUS","½ ","X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,"X",null,null,null,null,null,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",1,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One",3,null,null,null,"X"]
["SD 0035","Bügelmessschraube",1,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,"X",null,"X","X",null,null,null,"bis: 30.9.08"]
["SO 0045","Kalibriernormal „Drehzahl“",1,null,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0048","Kalibriernormal „Thermometer“",10,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["HO 0052","Elektronischer Schnelltaster EOD 1525K",1,null,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0061","Kalibriernormal „Viskosität“",10,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,"X",null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["SO 0070","Partikelmessgerät für Flüssigkeiten",2,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,"X",null,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,"X"]
["MS 0074","Digimatic Messschieber",1,"X"]
["MS 0075","Digimatic Messschieber",1,"X"]
["MS 0076","Digimatic Messschieber",1,"X"]
["MS 0077","Digimatic Messschieber",1,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,"X",null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",3,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",3,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",3,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",3,null,null,"X"]
["MI 0094","Messmikroskop Ergoplan",1,"X",null,null,null,null,"X"]
["SO 0100","Trübungssensor Turbimax-W CUS 31",1,null,null,null,"X",null,null,null,null,null,null,null,null,"bis: 31.12.09"]
["SO 0102","Temperatur-Messgerät Testo 922",1,"X"]
["EM 0106","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,"X"]
["SO 0107","LeCroy Oszillograph",1,null,null,null,null,null,"X"]
["EM 0108","Multimeter Keithley 2001",1,null,null,null,null,"X","X"]
["EM 0112","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0115","Multimeter Keithley 195A",3,null,null,null,null,null,"X"]
["EM 0118","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,"X"]
["SO 0119","Multifunktionsmessgerät TESTO 400",1,null,null,null,null,null,"X"]
["EM 0120","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-1","Massflowcontroller (MFC)",1,"X"]
["SO 0121-2","Massflowcontroller (MFC)",1,"X"]
["SO 0121-3","Massflowcontroller (MFC)",1,"X"]
["SO 0121-4","Massflowcontroller (MFC)",1,"X"]
["SO 0121-5","Massflowcontroller (MFC)",1,"X"]
["SO 0121-6","Massflowcontroller (MFC)",1,"X"]
["SO 0121-7","Massflowcontroller (MFC)",1,"X"]
["SO 0121-8","Massflowcontroller (MFC)",1,"X",null,null,null,null,null,null,null,null,"X"]
["SO 0121-9","Massflowcontroller (MFC)",1,"X"]
["SO 0121-10","Massflowcontroller (MFC)",1,"X"]
["SO 0121-11","Massflowcontroller (MFC)",1,"X"]
["SO 0121-12","Massflowcontroller (MFC)",1,"X"]
["SO 0121-13","Massflowcontroller (MFC)",1,"X"]
["SO 0121-14","Massflowcontroller (MFC)",1,"X"]
["SO 0121-15","Massflowcontroller (MFC)",1,"X"]
["SO 0121-16","Massflowcontroller (MFC)",1,"X"]
["SO 0121-17","Massflowcontroller (MFC)",1,"X"]
["SO 0121-18","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-19","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-20","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-21","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-22","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-23","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)",1,null,null,null,"X",null,null,null,null,null,null,null,null,"bis: 31.12.09"]
["SO 0126","Handhygrometer Testo 601",1,"X"]
["EM 0128","Multimeter Keithley 2001",1,"X"]
["SO 0130","Handhygrometer Testo 645",1,"X"]
["SO 0138","Spektrometer BTC112E",1,null,null,null,null,"X"]
["SD 0139","Ellipsometer SE 400",1,null,null,null,null,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["EM 0145","Netzwerkanalysator HP 8712ES",1,null,null,null,null,null,null,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,"X"]
["SO 0156","Digitalthermometer GTH 1200 A",1,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0161","Datenlogger Combilog 420101",1,null,null,null,"X",null,null,null,null,null,null,null,null,"bis: 31.12.09"]
["SO 0166","Druckmessumformer PU-01.1.1.1.F",1,null,null,null,"X",null,null,null,null,null,null,null,null,"bis: 31.12.09"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0506","Hand-DMM Voltcraft M-4650 CR",2,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,"X","X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",2,null,null,null,null,null,null,null,"X","X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",2,null,null,null,null,null,null,null,"X","X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",2,null,null,null,null,null,null,null,"X","X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,"X","X"]
["SO 0523","Thermomechanische Analyse",1,"X",null,null,null,null,null,null,null,null,null,"X"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,"X",null,"X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2",2,null,null,"X",null,"X","X",null,null,null,null,null,null,"bis 30.06.08"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,null,null,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2",2,null,null,"X"]
["SO 0536","Kalibriernormal „Härtevergleichsplatte“",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,null,null,null,null,null,null,"X",null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,"X",null,null,null,"als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0579","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X","X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyser OSA"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",1,null,null,"X"]

{"sheet":"KPL 2009 PM","index":3,"n_rows":156,"n_cols":17,"rows_kept":156,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2009)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,null,"2011-01-12T11:30:28"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","½  ",null,null,"X",null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X",null,"X",null,null,null,null,"bis: 31.8.09"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ",null,null,null,null,null,"X",null,"X",null,null,null,null,"bis: 31.8.09"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X",null,"X",null,null,null,null,"bis: 31.8.09"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,"X",null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",2,"X",null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X",null,null,null,null,null,"bis: 31.8.09"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,"X",null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,"X"]
["SO 0045","Kalibriernormal „Drehzahl“",2,null,null,null,null,"X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["MI 0048","Kalibriernormal \"SUPRA 60VP\"",10,null,null,null,null,null,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,"X","X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,"X",null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,null,null,"X","X"]
["MS 0073","Digimatic Messschieber",1,"X",null,"X"]
["MS 0074","Digimatic Messschieber",1,"X",null,"X"]
["MS 0075","Digimatic Messschieber",1,"X",null,"X"]
["MS 0076","Digimatic Messschieber",1,"X",null,"X"]
["MS 0077","Digimatic Messschieber",1,"X",null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0084","MKS Ansteuerung PR-4000",2,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,null,null,"X",null,null,null,null,"bis: 31.8.09"]
["SO 0095","Gasflusssensor (200 sccm)",2,"X",null,null,"X"]
["SO 0096","Gasflusssensor (500 sccm)",2,"X",null,null,"X"]
["SO 0097","Gasflusssensor (1000 sccm)",2,"X",null,null,"X"]
["SO 0100","Trübungssensor Turbimax-W CUS 31",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.09"]
["SO 0102","Temperatur-Messgerät Testo 922",1,"X"]
["EM 0106","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,"X"]
["SO 0107","LeCroy Oszillograph",5,null,null,null,null,null,"X","X"]
["EM 0108","Multimeter Keithley 2001",1,null,null,null,null,null,"X"]
["EM 0112","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0118","Multimeter Keithley 2001",1,null,null,null,null,null,"X",null,null,"X"]
["SO 0119","Multifunktionsmessgerät TESTO 400",1,null,null,null,null,null,"X","X"]
["EM 0120","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-1","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-2","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-3","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-4","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-5","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-6","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-7","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-8","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-9","Massflowcontroller (MFC)",1,"X"]
["SO 0121-10","Massflowcontroller (MFC)",1,"X"]
["SO 0121-11","Massflowcontroller (MFC)",1,"X"]
["SO 0121-12","Massflowcontroller (MFC)",1,"X"]
["SO 0121-13","Massflowcontroller (MFC)",1,"X"]
["SO 0121-14","Massflowcontroller (MFC)",1,"X"]
["SO 0121-15","Massflowcontroller (MFC)",1,"X","X"]
["SO 0121-16","Massflowcontroller (MFC)",1,"X"]
["SO 0121-17","Massflowcontroller (MFC)",1,"X"]
["SO 0121-18","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-19","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-20","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-21","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-22","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-23","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-24","Massflowcontroller (MFC)",1,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.09"]
["SO 0126","Handhygrometer Testo 601",1,"X"]
["SO 0127","Handhygrometer Testo 601",1,null,"X"]
["EM 0128","Multimeter Keithley 2001",1,null,"X"]
["SO 0130","Handhygrometer Testo 645",1,"X"]
["SO 0138","Spektrometer BTC112E",1,null,null,null,null,"X","X"]
["SD 0139","Ellipsometer SE 400",1,null,null,null,null,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["EM 0145","Netzwerkanalysator HP 8712ES",1]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,null,null,null,null,null,null,"X"]
["SO 0156","Digitalthermometer GTH 1200 A",1,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0161","Datenlogger Combilog 420101",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.09"]
["SO 0163","Digitaler Durchflussmesser",2,null,null,null,"X"]
["SO 0164","Kompakt Widerstandsthermometer",2,null,null,null,"X"]
["SO 0166","Druckmessumformer PU-01.1.1.1.F",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.09"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,"X","X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,"X","X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,"X","X",null,null,"als C-PM ab:31.1.06"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyser OSA"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",3,null,null,"X"]

{"sheet":"KPL 2010 PM","index":4,"n_rows":168,"n_cols":17,"rows_kept":168,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2010)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2011-01-17T15:36:24"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,"X",null,null,null,null,"X","X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,"X",null,null,null,null,null,null,null,null,null,null,"X","bis:  28.2.11"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","½  ",null,null,"X",null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ","X",null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X","X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X","X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,null,null,null,null,null,null,null,"X","X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,null,null,"X",null,null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0038","UV-Intensity Meter Modell 1000 UV",5,null,null,null,null,"X",null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,"X","X"]
[" SO 0050","Kalibriernormal „Ebenheit“  ",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis 31.5.15"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,"X",null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,null,"X","X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,"X",null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,null,"X",null,"X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,"X"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,"X"]
["SO 0102","Temperatur-Messgerät Testo 922",1,"X","X"]
["EM 0106","Multimeter Keithley 2001",1,null,null,null,null,null,null,"X","X",null,null,null,null,"bis 31.7.10"]
["EM 0108","Multimeter Keithley 2001",1,null,null,null,null,null,"X","X","X",null,null,null,null,"bis 31.7.10"]
["EM 0112","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0118","Multimeter Keithley 2001",1,null,null,null,null,null,"X","X","X",null,null,null,null,"bis 31.7.10"]
["SO 0119","Multifunktionsmessgerät TESTO 400",1,null,null,null,null,null,null,"X"]
["EM 0120","Multimeter Keithley 2001",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-1","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-2","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-3","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-4","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-5","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-6","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-7","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-8","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-15","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-19","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-20","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-21","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-22","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-23","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-24","Massflowcontroller (MFC)",1,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601",1,"X","X"]
["SO 0127","Handhygrometer Testo 601",1,null,"X"]
["EM 0128","Multimeter Keithley 2001",1,null,"X","X"]
["SO 0130","Handhygrometer Testo 645",1,"X","X"]
["SO 0138","Spektrometer BTC112E",1,null,null,null,null,null,"X"]
["SD 0139","Ellipsometer SE 400",1,null,null,null,null,null,null,"X",null,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,null,null,null,null,null,"X"]
["SO 0156","Digitalthermometer GTH 1200 A",1,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["SO 0163","Digitaler Durchflussmesser"]
["SO 0164","Kompakt Widerstandsthermometer"]
["SO 0166","Druckmessumformer PU-01.1.1.1.F"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X"]
["EM 0506","Hand-DMM Voltcraft M-4650 CR",2,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,"X",null,null,"X"]
["SO 0523","Thermomechanische Analyse",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,"X","X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2",2,null,null,null,null,null,null,"X","X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X","X"]
["SO 0534","UV-VIS Spektrometer Lambda 2",2,null,null,"X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,null,"X","X",null,"als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0579","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",3,null,"X",null,null,null,"X"]
["EM 0588","Digitalmultimeter 34401A",3,null,"X",null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",3,null,"X",null,null,null,"X"]
["EM 0594","Digitalmultimeter 34401A",3,null,"X",null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyser OSA"]

{"sheet":"KPL 2011 PM","index":5,"n_rows":172,"n_cols":17,"rows_kept":172,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2011)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2011-12-16T13:35:48"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X",null,null,"X",null,null,"bis:  30.9.11"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,"X",null,null,null,null,null,null,null,null,null,null,null,"bis:  28.2.11"]
["OB 0005","Oberflächenmessgerät TENCOR P 2","½  ",null,null,"X",null,"X",null,null,null,null,null,"X",null,"bis:  29.2.12"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ","X",null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X","X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",2,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,null,"X",null,null,"X"]
["OB 0041","Kalibriernormal „TENCOR“",10,null,null,null,null,null,null,null,"X"]
["MI 0042","Kalibriernormal „JSM/SEM“",10,null,null,null,null,"X",null,null,null,null,null,null,null,"bis:  31.05.16"]
["MI 0043","Kalibriernormal „Mikroskope“",5,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  31.12.11"]
["OB 0044","Kalibriernormal „Rauheit“",5,null,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0045","Kalibriernormal „Drehzahl“",2,null,null,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,"X","X","X",null,null,null,null,null,null,null,"bis:  30.4.11"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,"X","X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,"X",null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,"X","X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  29.2.12"]
["SD 0081","Einstellmaße für Digitale Bügelmessschr.",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0084","MKS Ansteuerung PR-4000",2,null,null,null,"X","X"]
["SO 0088","Strombox",3,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0089","Digital-Multimeter HP 34401A",3,null,null,"X",null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",3,null,null,"X",null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X",null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,"X","X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,"X","X"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,"X","X"]
["SO 0102","Temperatur-Messgerät Testo 922",1,null,"X"]
["EM 0106","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X"]
["EM 0108","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X"]
["EM 0112","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X"]
["EM 0115","Multimeter Keithley 195A",3,null,null,null,null,null,"X"]
["EM 0118","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X"]
["SO 0119","Multifunktionsmessgerät TESTO 400"]
["EM 0120","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X"]
["SO 0121-1","Massflowcontroller (MFC)"]
["SO 0121-2","Massflowcontroller (MFC)"]
["SO 0121-3","Massflowcontroller (MFC)"]
["SO 0121-4","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-5","Massflowcontroller (MFC)",1,null,"X"]
["SO 0121-6","Massflowcontroller (MFC)"]
["SO 0121-7","Massflowcontroller (MFC)"]
["SO 0121-8","Massflowcontroller (MFC)"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-15","Massflowcontroller (MFC)",1,null,"X",null,null,null,null,null,null,null,"X"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)"]
["SO 0121-19","Massflowcontroller (MFC)"]
["SO 0121-20","Massflowcontroller (MFC)"]
["SO 0121-21","Massflowcontroller (MFC)"]
["SO 0121-22","Massflowcontroller (MFC)"]
["SO 0121-23","Massflowcontroller (MFC)"]
["SO 0121-24","Massflowcontroller (MFC)",3,null,"X",null,null,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601",1,null,"X"]
["SO 0127","Handhygrometer Testo 601"]
["SO 0130","Handhygrometer Testo 645",1,null,"X"]
["SO 0138","Spektrometer BTC112E"]
["SD 0139","Ellipsometer SE 400",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X","X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",4,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X","X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X","X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,"X"]
["EM 0154","Digital-Multimeter HP-34401 A",5,null,null,null,null,null,null,null,null,"X"]
["SO 0156","Digitalthermometer GTH 1200 A",1,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X","X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X","X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,null,null,null,null,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,null,"X",null,null,null,"X",null,null,null,null,null,null,"bis:  30.4.11"]
["SO 0523","Thermomechanische Analyse",1,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,null,null,"X","X","als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,"X","X"]
["OM 0605","Optical Spectrum Analyser OSA"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,null,null,null,null,null,null,null,null,null,"X"]

{"sheet":"KPL 2012 PM","index":6,"n_rows":158,"n_cols":17,"rows_kept":158,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2012)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2012-12-21T11:25:22"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X","X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,"X","X",null,"X",null,null,null,null,null,null,null,"bis:  29.2.12"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ","X","X",null,null,null,null,"X",null,null,null,null,null,"bis:  29.2.12"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X",null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X","X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,null,"X","X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0040","Kalibriernormal „Endmaß“",5,"X",null,"X"]
["OB 0041","Kalibriernormal „TENCOR“",5,null,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,"X",null,null,null,null,null,null,null,null,null,null,"X","bis:  31.12.12"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,"X",null,"X",null,null,null,null,null,null,null,"bis:  31.05.12"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Digital-pH-Meter 646\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X","X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,null,"X","X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,"X","X",null,null,null,null,null,null,null,null,null,"bis:  29.2.12"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0101","800 µm Meierskop AFM",1,null,null,null,null,null,null,null,"X"]
["SO 0102","Temperatur-Messgerät Testo 922"]
["SO 0119","Multifunktionsmessgerät TESTO 400"]
["SO 0121-1","Massflowcontroller (MFC)"]
["SO 0121-2","Massflowcontroller (MFC)"]
["SO 0121-3","Massflowcontroller (MFC)"]
["SO 0121-4","Massflowcontroller (MFC)",2,null,"X",null,null,"X"]
["SO 0121-5","Massflowcontroller (MFC)",1,null,"X",null,null,"X"]
["SO 0121-6","Massflowcontroller (MFC)"]
["SO 0121-7","Massflowcontroller (MFC)"]
["SO 0121-8","Massflowcontroller (MFC)"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-15","Massflowcontroller (MFC)",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)"]
["SO 0121-19","Massflowcontroller (MFC)"]
["SO 0121-20","Massflowcontroller (MFC)"]
["SO 0121-21","Massflowcontroller (MFC)"]
["SO 0121-22","Massflowcontroller (MFC)"]
["SO 0121-23","Massflowcontroller (MFC)"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601"]
["SO 0127","Handhygrometer Testo 601"]
["SO 0130","Handhygrometer Testo 645"]
["SO 0138","Spektrometer BTC112E"]
["SD 0139","Ellipsometer SE 400",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,"X","X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,null,null,null,null,null,"X",null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,null,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,null,"X",null,null,"X",null,null,null,null,null,null,null,"bis:  31.5.12"]
["SO 0523","Thermomechanische Analyse",1,null,"X",null,null,"X",null,null,null,null,null,null,null,"bis:  31.5.12"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,null,"X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2",2,null,null,null,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X","X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X","X"]
["SO 0530","Ubbelohde Viskosimeter",1,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X",null,"X"]
["SO 0533","Microtester",2,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X","X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,null,null,null,"X","als C-PM ab:31.1.06"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyser OSA"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",3,null,null,"X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord",1,null,null,null,null,null,null,null,null,"X"]

{"sheet":"KPL 2013 PM","index":7,"n_rows":159,"n_cols":17,"rows_kept":159,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2013)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2014-01-28T16:07:34"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,"X",null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ","X",null,null,null,null,"X","X",null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X",null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,"X","X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X","X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",2,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SO 0036","pH-Messgerät","½","X","X",null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X","X",null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,"X",null,null,null,null,null,null,null,null,null,null,null,"bis:  31.12.15"]
["SO 0045","Kalibriernormal „Drehzahl“",2,null,null,null,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,null,null,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,"X","X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Seven Compact pH/Ion S220\"","½","X","X",null,null,null,null,"X"]
["MI 0063","Messmikroskop UWK SKI",1,null,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,"X","X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,"X","X"]
["MS 0066","Messschieber",1,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,null,"X","X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,"X",null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0084","MKS Ansteuerung PR-4000",2,null,null,null,null,"X",null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X","X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0101","800 µm Meierskop AFM",1,null,null,null,null,null,null,null,"X","X"]
["SO 0102","Temperatur-Messgerät Testo 922"]
["SO 0119","Multifunktionsmessgerät TESTO 400"]
["SO 0121-1","Massflowcontroller (MFC)"]
["SO 0121-2","Massflowcontroller (MFC)"]
["SO 0121-3","Massflowcontroller (MFC)"]
["SO 0121-5","Massflowcontroller (MFC)",1,null,null,null,null,"X",null,"X"]
["SO 0121-6","Massflowcontroller (MFC)"]
["SO 0121-7","Massflowcontroller (MFC)"]
["SO 0121-8","Massflowcontroller (MFC)"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-15","Massflowcontroller (MFC)",2,"X"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)"]
["SO 0121-19","Massflowcontroller (MFC)"]
["SO 0121-20","Massflowcontroller (MFC)"]
["SO 0121-21","Massflowcontroller (MFC)"]
["SO 0121-22","Massflowcontroller (MFC)"]
["SO 0121-23","Massflowcontroller (MFC)"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601"]
["SO 0127","Handhygrometer Testo 601"]
["SO 0130","Handhygrometer Testo 645"]
["SO 0138","Spektrometer BTC112E"]
["SD 0139","Ellipsometer SE 400",1,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000"]
["SO 0510","MKS-Ansteuerung PR-4000",1,"X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,"X","X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0522","Wärmestromkalorimeter DSC 204"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,null,"X"]
["SO 0530","Ubbelohde Viskosimeter"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X","X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,"X","X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X",null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,"X",null,null,null,null,null,null,null,null,null,null,null,"als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0588","Digitalmultimeter 34401A",3,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter 34401A",3,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0605","Optical Spectrum Analyser OSA"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord",1,null,null,null,null,null,null,null,null,"X"]

{"sheet":"KPL 2014 PM","index":8,"n_rows":160,"n_cols":17,"rows_kept":160,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2014)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2016-06-28T16:04:07"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ",null,null,null,null,null,"X",null,"X",null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X","X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X","X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X","X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube Digital",1,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,"X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,null,null,null,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,"X","X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Seven Compact pH/Ion S220\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWM SKI",1,null,null,null,null,null,null,null,"X","X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony ",1,null,null,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X","X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X","X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,null,"X","X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X",null,"X"]
["SO 0088","Strombox",3,null,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0089","Digital-Multimeter HP 34401A",3,null,null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",3,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,"X","X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0101","800 µm Meierskop AFM",1,null,null,null,null,null,null,null,null,"X"]
["SO 0102","Temperatur-Messgerät Testo 922"]
["EM 0106","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X",null,"X"]
["SO 0107","LeCroy Oszillograph",5,null,null,null,null,null,null,"X"]
["EM 0108","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X"]
["EM 0112","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X",null,"X"]
["EM 0118","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X",null,"X"]
["SO 0119","Multifunktionsmessgerät TESTO 400"]
["EM 0120","Multimeter Keithley 2001",3,null,null,null,null,null,null,null,"X",null,"X"]
["SO 0121-1","Massflowcontroller (MFC)"]
["SO 0121-2","Massflowcontroller (MFC)"]
["SO 0121-3","Massflowcontroller (MFC)"]
["SO 0121-4","Massflowcontroller (MFC)",2,null,null,null,null,"X"]
["SO 0121-5","Massflowcontroller (MFC)",1,null,null,null,null,null,null,"X"]
["SO 0121-6","Massflowcontroller (MFC)"]
["SO 0121-7","Massflowcontroller (MFC)"]
["SO 0121-8","Massflowcontroller (MFC)"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)"]
["SO 0121-19","Massflowcontroller (MFC)"]
["SO 0121-20","Massflowcontroller (MFC)"]
["SO 0121-21","Massflowcontroller (MFC)"]
["SO 0121-22","Massflowcontroller (MFC)"]
["SO 0121-23","Massflowcontroller (MFC)"]
["SO 0121-24","Massflowcontroller (MFC)",3,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601"]
["SO 0127","Handhygrometer Testo 601"]
["SO 0130","Handhygrometer Testo 645"]
["SO 0138","Spektrometer BTC112E"]
["SD 0139","Ellipsometer SE 400",1,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X",null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,"X","X"]
["SO 0508","MKS-Ansteuerung PR-4000"]
["SO 0510","MKS-Ansteuerung PR-4000",1,"X","X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,null,null,null,null,null,null,"X"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2",2,null,null,null,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,null,"X"]
["SO 0530","Ubbelohde Viskosimeter"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X",null,"X"]
["SO 0533","Microtester",2,null,null,null,"X",null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,null,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,"X",null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X","X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,"X","X",null,null,null,null,null,null,null,null,null,null,"als C-PM ab:31.1.06"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0605","Optical Spectrum Analyser OSA"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord"]
["SO 0613","Schmelzpunktmessgerät M-560",1,"X"]

{"sheet":"KPL 2015 PM","index":9,"n_rows":159,"n_cols":17,"rows_kept":159,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2015)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2016-01-21T14:44:52"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät SOLAIR 3100",1,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,"X",null,null,null,null,"X",null,null,null,null,null,"X","bis:  30.06.15"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,null,null,"X","X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP","½  ",null,null,null,null,null,"X",null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",1,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,"X","X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",2,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube Digital",1,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0038","UV-Intensity Meter Modell 1000 UV",5,null,null,null,null,null,null,null,"X",null,null,null,null,"bis:  31.12.16"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  31.12.15"]
["SO 0045","Kalibriernormal „Drehzahl“",2,null,null,null,null,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,null,null,null,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,"X","X"]
[" SO 0050","Kalibriernormal „Ebenheit“  ",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis 31.5.15"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät \"Seven Compact pH/Ion S220\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWM SKI",1,null,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,null,"X","X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,null,"X","X"]
["MS 0066","Messschieber",1,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony "]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,null,"X","X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,null,"X","X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,"X",null,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A"]
["SD 0081","Einstellmaße für Digitale Bügelmessschr.",5]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,null,null,"X","X"]
["SO 0084","MKS Ansteuerung PR-4000",2,null,null,null,null,null,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,null,"X","X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0100","BioScope Catalyst Rasterkraftmikroskop",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0101","800 µm Meierskop AFM",1,null,null,null,null,null,null,null,null,"X"]
["SO 0102","Temperatur-Messgerät Testo 922"]
["SO 0119","Multifunktionsmessgerät TESTO 400"]
["SO 0121-1","Massflowcontroller (MFC)"]
["SO 0121-2","Massflowcontroller (MFC)"]
["SO 0121-3","Massflowcontroller (MFC)"]
["SO 0121-5","Massflowcontroller (MFC)",1,null,null,null,null,null,null,"X"]
["SO 0121-6","Massflowcontroller (MFC)"]
["SO 0121-7","Massflowcontroller (MFC)"]
["SO 0121-8","Massflowcontroller (MFC)"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-15","Massflowcontroller (MFC)",2,"X"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)"]
["SO 0121-19","Massflowcontroller (MFC)"]
["SO 0121-20","Massflowcontroller (MFC)"]
["SO 0121-21","Massflowcontroller (MFC)"]
["SO 0121-22","Massflowcontroller (MFC)"]
["SO 0121-23","Massflowcontroller (MFC)"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601"]
["SO 0127","Handhygrometer Testo 601"]
["SO 0130","Handhygrometer Testo 645"]
["SO 0138","Spektrometer BTC112E"]
["SD 0139","Ellipsometer SE 400",1,"X","X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["WA 0142","Analysenwaage Mettler Toledo ML54",1,null,null,null,null,null,null,"X"]
["WA 0143","Präzisionswaage Kern EG 220-3NM",1,null,null,null,null,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",2,null,null,null,null,null,"X","X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,null,"X","X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,null,"X","X"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,"X",null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X",null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,null,"X",null,null,null,null,null,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,null,null,null,null,"X",null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X",null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,"X",null,null,null,null,null,null,null,null,"X",null,"als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0605","Optical Spectrum Analyser OSA"]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",3,null,null,"X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord"]
["SO 0613","Schmelzpunktmessgerät M-560",1,"X"]

{"sheet":"KPL 2016 PM","index":10,"n_rows":143,"n_cols":17,"rows_kept":143,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2016)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2016-07-21T11:20:34"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät SOLAIR 3100",1,null,null,"X","X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,"X",null,null,null,null,"X","X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X","X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SO 0036","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät","½","X",null,null,null,null,null,"X"]
["SO 0038","UV-Intensity Meter Modell 1000 UV",5,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  31.12.16"]
["MI 0042","Kalibriernormal „JSM/SEM“",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis:  31.05.16"]
["OB 0044","Kalibriernormal „Rauheit“",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,null,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["SO 0062","pH-Messgerät \"Seven Compact pH/Ion S220\"","½","X",null,null,null,null,null,"X"]
["MI 0063","Messmikroskop UWM SKI",1,null,null,null,null,null,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony "]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A"]
["EM 0091","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,null,null,"X"]
["SO 0095","Gasflusssensor (200 sccm)"]
["SO 0096","Gasflusssensor (500 sccm)"]
["SO 0097","Gasflusssensor (1000 sccm)"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,"X"]
["OB 0101","800 µm Meierskop AFM",1,null,null,"X"]
["SO 0102","Temperatur-Messgerät Testo 922"]
["EM 0106","Multimeter Keithley 2001"]
["SO 0107","LeCroy Oszillograph"]
["EM 0108","Multimeter Keithley 2001"]
["EM 0112","Multimeter Keithley 2001"]
["EM 0118","Multimeter Keithley 2001"]
["SO 0119","Multifunktionsmessgerät TESTO 400"]
["EM 0120","Multimeter Keithley 2001"]
["SO 0121-1","Massflowcontroller (MFC)"]
["SO 0121-2","Massflowcontroller (MFC)"]
["SO 0121-3","Massflowcontroller (MFC)"]
["SO 0121-4","Massflowcontroller (MFC)"]
["SO 0121-5","Massflowcontroller (MFC)"]
["SO 0121-6","Massflowcontroller (MFC)"]
["SO 0121-7","Massflowcontroller (MFC)"]
["SO 0121-8","Massflowcontroller (MFC)"]
["SO 0121-9","Massflowcontroller (MFC)"]
["SO 0121-10","Massflowcontroller (MFC)"]
["SO 0121-11","Massflowcontroller (MFC)"]
["SO 0121-12","Massflowcontroller (MFC)"]
["SO 0121-13","Massflowcontroller (MFC)"]
["SO 0121-14","Massflowcontroller (MFC)"]
["SO 0121-15","Massflowcontroller (MFC)"]
["SO 0121-16","Massflowcontroller (MFC)"]
["SO 0121-17","Massflowcontroller (MFC)"]
["SO 0121-18","Massflowcontroller (MFC)"]
["SO 0121-19","Massflowcontroller (MFC)"]
["SO 0121-20","Massflowcontroller (MFC)"]
["SO 0121-21","Massflowcontroller (MFC)"]
["SO 0121-22","Massflowcontroller (MFC)"]
["SO 0121-23","Massflowcontroller (MFC)"]
["SO 0121-24","Massflowcontroller (MFC)"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["SO 0126","Handhygrometer Testo 601"]
["SO 0127","Handhygrometer Testo 601"]
["SO 0130","Handhygrometer Testo 645"]
["SO 0138","Spektrometer BTC112E"]
["SD 0139","Ellipsometer SE 400",1,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["WA 0142","Analysenwaage Mettler Toledo ML54",1,null,null,"X"]
["WA 0143","Präzisionswaage Kern EG 220-3NM",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",null,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",null,null,null,null,null,null,null,null,"X"]
["EM 0152","Netzwerkanalysator HP 8712C",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",null,null,null,null,null,null,null,null,"X"]
["EM 0160","Datenlogger Combilog 420101"]
["EM 0161","Datenlogger Combilog 420101"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,null,null,"X"]
["SO 0508","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,"X"]
["SO 0510","MKS-Ansteuerung PR-4000",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm"]
["EM 0512","Digital-Multimeter Agilent 34410A",1,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0520","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,null,null,null,null,null,null,"X"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2",2,null,null,null,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X",null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X","X"]
["SO 0533","Microtester",2,null,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X","X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,null,"X",null,null,null,null,null,"X"]
["SO 0548","Differenzdruckaufnehmer 5 bar",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,null,null,"X",null,"als C-PM ab:31.1.06"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0588","Digitalmultimeter 34401A",3,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter 34401A",3,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0605","Optical Spectrum Analyser OSA"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord"]
["SO 0613","Schmelzpunktmessgerät M-560",1,"X","X"]

{"sheet":"KPL 2017 PM","index":11,"n_rows":60,"n_cols":17,"rows_kept":60,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2017)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:04"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0002","Partikelmessgerät SOLAIR 3100",1,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SO 0027","Präzisionsstromgeber DIGISTANT 6426",1,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",2,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["HO 0040","Kalibriernormal „Endmaß“",5,null,null,"X"]
["OB 0041","Kalibriernormal „TENCOR“",5,null,"X"]
["SO 0045","Kalibriernormal „Drehzahl“",2,null,null,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["SO 0064","Temp.- u. Feuchte-Überwachung CAN 1",1,null,null,null,null,null,null,"X"]
["SO 0065","Temp.- u. Feuchte-Überwachung CAN 2",1,null,null,null,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,null,null,"X"]
["SO 0084","MKS Ansteuerung PR-4000",2,null,null,null,null,null,null,null,null,null,"X"]
["SO 0088","Strombox",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",3,null,null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",3,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,null,null,"X"]
["OB 0098","Dimension Icon Rasterkraftmikroskop",1,null,null,"X"]
["OB 0099","Dimension Icon Rasterkraftmikroskop",1,null,null,"X"]
["OB 0101","800 µm Meierskop AFM",1,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["WA 0142","Analysenwaage Mettler Toledo ML54",1,null,null,"X"]
["WA 0143","Präzisionswaage Kern EG 220-3NM",1,null,null,"X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",2,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,null,null,null,"X"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET",1,null,null,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["SO 0547","MKS Ansteuerung PR 4000-F2V1N",1,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0613","Schmelzpunktmessgerät M-560",1,null,"X"]

{"sheet":"KPL 2018 PM","index":12,"n_rows":7,"n_cols":17,"rows_kept":7,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2018)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:04"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
[]
["SD 0606","Mikrometerschraube 0-25 mm (Mauser)",3,null,null,"X"]

{"sheet":"KPL 2019 PM","index":13,"n_rows":12,"n_cols":17,"rows_kept":12,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2019)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:04"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["MI 0048","Kalibriernormal \"SUPRA 60VP\"",10,null,null,null,null,null,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0588","Digitalmultimeter 34401A",3,null,null,null,null,null,"X"]
["EM 0593","Digital-Multimeter Fluke 45",3,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter 34401A",3,null,null,null,null,null,"X"]

{"sheet":"KPL 2020 PM","index":14,"n_rows":9,"n_cols":17,"rows_kept":9,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2020)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
[]
[]
["MI 0043","Kalibriernormal „Mikroskope“",5,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  31.12.20"]
[" SO 0050","Kalibriernormal „Ebenheit“  ",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis: 31.5.20"]

{"sheet":"KPL 2021 PM","index":15,"n_rows":6,"n_cols":17,"rows_kept":6,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2021)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["MI 0042","Kalibriernormal „JSM/SEM“",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis:  31.05.21"]

{"sheet":"KPL 2022 PM","index":16,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2022)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2023 PM","index":17,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2023)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2024 PM","index":18,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2024)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2025 PM","index":19,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2025)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2026 PM","index":20,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2026)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2027 PM","index":21,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2027)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2028 PM","index":22,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2028)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2029 PM","index":23,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2029)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 2030 PM","index":24,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (2030)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"KPL 20XX PM","index":25,"n_rows":4,"n_cols":17,"rows_kept":4,"cut":false,"hidden":false,"merged":[]}
[null,null,null,"Kalibrierplan Prüfmittel (20XX)"]
["WPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,"Stand:","2010-06-09T15:47:37"]
[]
["PM/FM-Nr.","Prüfmittel- / Fertigungsmittelname","K-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]