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{"sheet":"WPL 2006 FM","index":0,"n_rows":128,"n_cols":17,"rows_kept":128,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2006"]
["KPL","PM"]
["FM"]
[null,null,null,"WPL 2006 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad",1,null,null,"X"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,"X BF"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,"X BF"]
["AE 0206","Hamatech-Entwickler",1,null,null,null,null,"X"]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1,null,null,null,"X"]
["RS 0208","Spincoater (Hamatech-Belacker)",1,null,null,null,null,null,null,"X"]
["OF 0209","Hotplate ",1,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0213","Umluftofen 4",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,null,null,null,"X","X"]
["AE 0215","Chromätzer CPP 70",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0217","Elektronenstrahlschreiber ","¼ ","KW4",null,null,"KW17",null,null,"KW30",null,null,"KW43","KW49"]
["OF 0218","Hotplate",1,null,null,null,null,"X"]
["AE 0219","Entwickleranlage, CEP 8 Standard",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X",null,null,"BF"]
["AE 0221","Planarätzer P300",1,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1,null,null,null,"X"]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0228","Ultraschallreinigungsgerät",1,null,null,null,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0230","Läppmaschine Myläpp",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,null,"X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,null,"X"]
["SL 0233","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF",null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF",null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF",null,null,"X"]
["GA 0243","Galvanikbad HEGA Alt  - Anlage\n                                   - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,"X"]
["GA 0245","Goldgalvanikbad",1,null,null,"X",null,null,"BF"]
["BE 0246","Mitsubishi Drahterodiermaschine","½ ",null,null,null,null,"X",null,"BF",null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0248","Weberpresse PW 40",1,null,null,null,null,null,null,null,null,null,"X"]
["PR 0249","RIM II"]
["PR 0250","Abformanlage",1,null,null,null,null,"X",null,"BF",null,"X"]
["SA 0251","Sputteranlage MED-010",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,null,null,null,null,null,null,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder Phasmaster IV",1,null,"X"]
["TS 0257","Mutronic-Säge",1]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["SL 0260","Ultraschallreinigungsgerät",1]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz",1,null,null,"X"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,null,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,"X",null,null,null,null,null,null,null,null,null,"X"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,"X",null,null,null,null,null,null,null,null,null,"X"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,null,null,null,null,null,null,"BF","X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,null,null,null,null,null,null,null,"X","X"]
["BE 0300","Universal Hochpräzisionsfräsmaschine ",1,null,null,null,null,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,null,null,"X"]
["MP 0303","Montageplatz 1 „Fasermontage“",1,null,null,null,null,null,null,null,null,null,null,"X"]
["MP 0304","Montageplatz 4 „Faserstecker“",1,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0305","Goldgalvanikbad",1,null,null,"X",null,null,"BF"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0310","Prozessor HMP 900 (Entwickler)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0311","4-TEC Planarätzer",1,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,null,null,null,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["GA 0315","Glanzgoldbad Helodor 100",1]
["GA 0316","Glanzgoldbad Helodor 100",1]
[]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,"X",null,"X",null,"X"]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["OF 0806","Versuchsstand „Tempern“",1,null,null,null,null,null,null,null,"X"]
["VS 0807","Mikromontagevorrichtung",1]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Abformanlage WMP 1000",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["OF 0812","Hotplate",1,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,null,"X"]
["BS 0815","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat",1,"X"]
["SA 0818","Sputteranlage UNIVEX 500",1,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0820","Umluftofen M",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,"X",null,null,null,"X",null,"X"]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2007 FM","index":1,"n_rows":133,"n_cols":17,"rows_kept":133,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2007"]
["KPL","PM"]
["FM"]
[null,null,null,"WPL 2007 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad",1,null,null,"X"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,"X BF",null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,"X BF",null,"X"]
["AE 0206","Hamatech-Entwickler",1,null,null,null,null,"X"]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1,null,null,null,"X"]
["RS 0208","Spincoater (Hamatech-Belacker)",1,null,null,null,null,null,null,"X"]
["OF 0209","Hotplate ",1,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0213","Umluftofen 4",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,null,null,null,"X","X"]
["AE 0215","Chromätzer CPP 70",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0218","Hotplate",1,null,null,null,null,"X"]
["AE 0219","Entwickleranlage, CEP 8 Standard",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X",null,null,"BF"]
["AE 0221","Planarätzer P300",1,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1,null,null,null,null,"X"]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0228","Ultraschallreinigungsgerät",1,null,null,null,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0230","Läppmaschine Myläpp",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,null,"X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,null,"X"]
["SL 0233","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF",null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF",null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,"BF",null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,"X"]
["GA 0245","Goldgalvanikbad",1,null,null,"X",null,null,"BF"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,"BF",null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0248","Weberpresse PW 10","1(2)",null,null,null,null,null,null,null,null,null,"X"]
["BS 0249","Elektronenstrahlschreiber VB6",1,null,null,null,null,null,"X"]
["PR 0250","Abformanlage",1,null,null,null,null,null,null,"BF",null,"X"]
["SA 0251","Sputteranlage MED-010",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder Phasmaster IV",1,null,"X"]
["TS 0257","Mutronic-Säge",1]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["SL 0260","Ultraschallreinigungsgerät",1]
["OF 0261","Klimaschrank Hygros 15",2,null,null,null,"X"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X",null,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X",null,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X",null,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
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["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz",1,null,null,"X"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,null,null,null,null,null,null,null,null,null,"X",null,"bis 2.5.08"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,"BF",null,null,null,null,null,null,"X",null,"bis 2.5.08"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0300","Universal Hochpräzisionsfräsmaschine ",1,null,null,null,null,null,"X","X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,null,null,"X"]
["MP 0303","Montageplatz 1 „Fasermontage“",1]
["MP 0304","Montageplatz 4 „Faserstecker“",1]
["GA 0305","Goldgalvanikbad",1,null,null,"X",null,null,"BF"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0310","Prozessor HMP 900 (Entwickler)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0311","4-TEC Planarätzer",1,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,null,null,null,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0315","Glanzgoldbad Helodor 100",1]
["GA 0316","Glanzgoldbad Helodor 100",1]
["VS 0320","Ball Wedge Bonder 7700 A",1,null,null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","½","X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,"X"]
["SO 0325","Nullluftgenerator  ZA 130K",1]
["OF 0329","Trockenofen UT 6060",2]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Abformanlage WMP 1000",1,null,null,null,null,null,null,null,null,"X"]
["OF 0812","Hotplate HP-155",1,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,"X"]
["BS 0815","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat",1,"X"]
["SA 0818","Sputteranlage UNIVEX 500",1,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["OF 0825","Vakuumofen",2,null,null,null,null,null,null,null,null,null,null,"X","X"]
["VS 0828","Fusionsspleissgerät S177A",1,null,null,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter","1/2",null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2008 FM","index":2,"n_rows":134,"n_cols":17,"rows_kept":134,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2008"]
["KPL","PM",null,null,null,null,null,null,null,null,null,null,null,null,null,null,"2010-11-12T08:20:24"]
["FM"]
[null,null,null,"WPL 2008 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad",1,null,null,"X"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,"X"]
["AE 0206","Hamatech-Entwickler",1,null,null,null,null,"X"]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1,null,null,null,"X"]
["RS 0208","Spincoater (Hamatech-Belacker)",1,null,null,null,null,null,null,"X"]
["OF 0209","Hotplate ",1,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0213","Umluftofen 4",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0215","Chromätzer CPP 70",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,null,null,null,null,null,"X"]
["OF 0218","Hotplate",1,null,null,null,null,"X"]
["AE 0219","Entwickleranlage, CEP 8 Standard",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0221","Planarätzer P300",1,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1,null,null,"X"]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,null,null,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,null,null,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0230","Läppmaschine Myläpp",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,null,"X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,null,"X"]
["SL 0233","Ultraschallreinigungsgerät",1,null,null,null,null,"X","X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
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["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,null,null,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,"X","X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["BS 0249","Elektronenstrahlschreiber VB6","½ ",null,null,null,null,null,"X"]
["PR 0250","Abformanlage (WUM2+WUM3)",1,null,null,null,null,null,null,null,null,"X"]
["SA 0251","Sputteranlage MED-010",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,"X",null,null,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["OF 0261","Klimaschrank Hygros 15",1,null,null,null,"X"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X",null,null,"X",null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X",null,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz",1,null,null,"X"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X",null,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X",null,null,"X",null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0287","Jenoptik-Röntgenscanner",1,null,null,null,"X",null,"X"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,"X",null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0300","Universal Hochpräzisionsfräsmaschine ",1,null,null,null,null,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0310","Prozessor HMP 900 (Entwickler)",1,null,null,null,null,null,null,null,null,null,null,"SF (X)",null,"bis 12/08"]
["AE 0311","4-TEC Planarätzer",1,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,null,null,null,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100",1,null,null,"X\nX"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101",1,null,null,"X\nX"]
["SG 0317","Niederspannungsgerät",1,null,null,null,null,null,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage",1,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,null,null,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A",1,null,null,null,null,"X","X"]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","1/2","X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,"X","X"]
["SO 0325","Nullluftgenerator ZK 130K",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,"X"]
["OF 0329","Trockenofen UT6060 Heraeus",1]
["SO 0330","Marvin-Anlage",1,"X"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Abformanlage WMP 1000",1,null,null,null,null,null,null,null,null,"X"]
["OF 0812","Hotplate HP-155",1,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,"X","X"]
["BS 0815","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat",1,"X"]
["SA 0818","Sputteranlage UNIVEX 500",1,"X"]
["OF 0819","Vakuum-Trockenofen",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0820","Umluftofen M",1,"X",null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["VS 0828","Fusionsspleissgerät S177A",1,null,null,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,"X",null,null,null,"X"]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2009 FM","index":3,"n_rows":137,"n_cols":17,"rows_kept":137,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[" ",null,null,"Wartungsplan Fertigungsmittel 2009"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-12-02T08:47:54"]
[]
[null,null,null,"WPL 2009 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["RS 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad",1,null,null,"X"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,"X"]
["AE 0206","Hamatech-Entwickler",1,null,null,null,null,"X"]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1,null,null,null,"X"]
["RS 0208","Spincoater (Hamatech-Belacker)",1,null,null,null,null,null,null,"X",null,null,null,"Ende"]
["OF 0209","Hotplate ",1,null,null,null,null,"X",null,null,null,null,null,"Ende"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["AE 0219","Entwickleranlage, CEP 8 Standard",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X","X"]
["AE 0221","Planarätzer P300",1,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1,null,null,"X"]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0230","Läppmaschine Myläpp",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,null,"X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,null,"X"]
["SL 0233","Ultraschallreinigungsgerät","1 (2)",null,null,null,null,"X","X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
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["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
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["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0248","Weberpresse PW 10",2,null,null,null,null,null,null,null,null,null,"X"]
["PR 0250","Abformanlage (WUM2+WUM3)",1,null,null,null,null,null,null,null,null,"SF",null,"X"]
["SA 0251","Sputteranlage MED-010",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["SO 0257","Positioniereinheit zur partiellen Resistmetallisierung",1,null,null,null,null,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,null,null,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15",1,null,null,null,"X"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz",1,null,null,"X"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad",1]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,null,null,null,null,"SF",null,"X"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,null,null,"SF",null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenschrank WTB Binder ED-53",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0300","Universal Hochpräzisionsfräsmaschine ",1,null,null,null,null,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0310","Prozessor HMP 900 (Entwickler)",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100",1,null,null,"X\nX"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101",1,null,null,"X\nX"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage",1,"X",null,null,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A",1,null,null,null,null,null,"X",null,null,"X"]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,"X","X",null,"X"]
["OF 0322","Rohrofen klappbar",1,null,null,null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","1/2","X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,"X"]
["OF 0329","Trockenofen UT6060 Heraeus",1]
["SO 0330","Marvin-Anlage",1,"X"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,"X",null,"X","X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,"X",null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Abformanlage WMP 1000",1,null,null,null,null,null,null,null,null,"X"]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,"X"]
["BS 0815","UV-Härtelampe DeloLux 05",1,null,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X"]
["OF 0820","Umluftofen M 53",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"SF",null,null,null,"2010-09-30"]
["VS 0828","Fusionsspleissgerät S177A",1,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]

{"sheet":"WPL 2010 FM","index":4,"n_rows":138,"n_cols":17,"rows_kept":138,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2010"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-12-13T11:09:04"]
[]
[null,null,null,"WPL 2010 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,"X","SF",null,null,"2010-12-31"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,"X","SF",null,null,"2010-12-31"]
["AE 0206","Hamatech-Entwickler",1,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,"X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["AE 0219","Entwickleranlage, CEP 8 Standard",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"SF","X"]
["AE 0221","Planarätzer P300",1,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X",null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",2,"X"]
["BE 0230","Läppmaschine Myläpp",2,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,null,"X","X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,null,"X","X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X",null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"SF","X\nX",null,null,null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"SF","X\nX",null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"SF","X\nX",null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X","X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0250","Abformanlage (WUM2+WUM3)",1,null,null,null,null,null,null,null,null,"X"]
["SA 0251","Sputteranlage MED-010",1,null,null,null,null,null,null,null,null,"Ende"]
["SL 0252","Nassprozessanlage",1,null,"SF",null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["SO 0257","Positioniereinheit zur partiellen Resistmetallisierung",1,null,null,null,null,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X",null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X",null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"SF","X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz",1,null,null,"X"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,null,null,null,null,null,null,"SF",null,null,null,null,"2010-12-31"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,null,null,null,null,"SF",null,null,null,null,"2010-12-31"]
["SG 0294","Niederspannungsgerät NTN 350-20",null,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenschrank WTB Binder ED-53",1,null,null,"X","X"]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0300","Universal Hochpräzisionsfräsmaschine ",1,null,null,null,null,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0310","Prozessor HMP 900 (Entwickler)",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,"X",null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage",1,null,null,null,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A",1,null,null,null,null,null,null,null,null,"X"]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,null,null,"X"]
["OF 0322","Rohrofen klappbar",1,null,null,null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","1/2","X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,"X"]
["SO 0330","Marvin-Anlage",1,"X"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"SF","X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X"]
["RS 0338","Spincoater Primus STT15",1,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X","X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X","X"]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1,null,"X",null,"X"]
["PR 0809","Heißprägemaschine Vickert",1,null,null,null,null,null,null,null,null,"X"]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,"X",null,"X"]
["BS 0815","UV-Härtelampe DeloLux",1,null,null,null,null,"X",null,null,null,null,null,"Ende"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0828","Fusionsspleissgerät S177A",1,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2011 FM","index":5,"n_rows":140,"n_cols":17,"rows_kept":140,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2011"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2012-12-03T11:20:06"]
[]
[null,null,null,"WPL 2011 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,"X","X"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0206","Hamatech-Entwickler",1,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,"X","X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["AE 0219","Entwickleranlage, CEP 8 Standard",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0221","Planarätzer P300",1,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,"X","X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0230","Läppmaschine Myläpp",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,null,"X","X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,null,"X","X"]
["SL 0233","Ultraschallreinigungsgerät",2,null,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X","X"]
["PR 0248","Weberpresse PW 10",2,null,null,null,null,null,null,null,null,"X"]
["PR 0250","Abformanlage (WUM2+WUM3)",1,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["SO 0257","Positioniereinheit zur partiellen Resistmetallisierung","1(5)",null,null,null,null,null,"X",null,null,null,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad HEGA II",1,null,null,null,"X",null,null,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,null,null,null,null,null,"X"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,"X",null,null,null,null,"X"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,"X",null,null,null,null,"X"]
["SG 0294","Niederspannungsgerät",1,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,null,null,null,null,null,null,null,null,"X","SF"]
["BE 0300","Universal Hochpräzisionsfräsmaschine ",1,null,null,null,null,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,"X",null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage",1,null,null,null,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A",1,null,null,null,null,"X"]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,null,null,"X"]
["OF 0322","Rohrofen klappbar",1,null,null,null,null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","1/2","X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,"X"]
["TS 0326","Sägemaschine DAD 3430",1]
["SA 0327","Parylen-Anlage PDS 2010",1,"X"]
["SO 0330","Marvin-Anlage"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X","X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,"X","X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X"]
["RS 0338","Spincoater Primus STT15",1,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Vickert",1,null,null,null,null,null,null,null,null,"X"]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,null,null,"X","X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,null,null,null,null,null,null,null,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0828","Fusionsspleissgerät S177A",1,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0831","Laser-Lithographie-Anlage",1,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2012 FM","index":6,"n_rows":141,"n_cols":17,"rows_kept":141,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2012"]
[null,null,null,"FM","PM","KPL","2012 PM",null,null,null,null,null,null,null,null,"Stand:","2013-01-14T09:27:57"]
[]
[null,null,null,"WPL 2012 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,"X",null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,"X",null,null,"X"]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,"X","X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0221","Planarätzer P300"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,"X","X"]
["BS 0225","Belichtungsgerät MA6",1]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,"X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,"X"]
["SL 0233","Ultraschallreinigungsgerät",2,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0250","Abformanlage (WUM2+WUM3)",1,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["TS 0254","Wafersäge Micro-Ace 3S3",1]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad HEGA II  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,null,null,null,null,null,"X",null,null,null,null,null,null,"bis: 28.2.13"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,null,null,null,null,"X",null,null,null,null,null,null,"bis: 28.2.13"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,null,null,"X",null,null,null,null,null,null,"bis: 28.2.13"]
["SG 0294","Niederspannungsgerät",1,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset",1,null,null,"X"]
["BE 0300","Universal Hochpräzisionsfräsmaschine "]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage",1,null,null,null,"X",null,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A",1,null,null,null,null,"X"]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,null,null,"X","X"]
["OF 0322","Rohrofen klappbar",1,null,null,null,null,null,null,"X",null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","½ ","X",null,null,null,null,null,"X",null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,"X"]
["TS 0326","Sägemaschine DAD 3430",1,null,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,"X"]
["GA 0328","Galvanik-Prozesseinheit","½ ",null,null,"X",null,null,null,null,null,"X"]
["OF 0329","Trockenofen Heratherm OMH 60",2,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0330","Marvin-Anlage"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X"]
["RS 0338","Spincoater Primus STT15",1,null,null,"X"]
["SE 0339","Sprühentwickler ST30 (organisch)",1,"X"]
["SE 0340","Sprühentwickler ST30 (anorganisch)",1,"X"]
["RS 0341","Spincoater Primus STT15",1,null,null,null,null,null,null,null,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["PR 0802","Nanoimprintanlage EVG 510HE",5,null,null,null,null,null,null,null,null,null,"X"]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Wickert",1,null,null,null,null,null,null,null,null,"X"]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,null,null,null,null,null,null,null,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0828","Fusionsspleissgerät S177A",1,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0831","Laser-Lithographie-Anlage",1,null,null,null,null,null,null,null,null,"X"]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2,null,null,null,null,null,null,null,null,"X","X"]

{"sheet":"WPL 2013 FM","index":7,"n_rows":140,"n_cols":17,"rows_kept":140,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2013"]
[null,null,null,"FM","PM","KPL","2013 PM",null,null,null,null,null,null,null,null,"Stand:","2014-01-21T10:02:05"]
[]
[null,null,null,"WPL 2013 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0201","Oxidationsanlage",1,null,null,null,null,null,null,null,null,null,"X"]
["AE 0202","Oxidationsanlage",1,null,null,null,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0211","Umluftofen UT 6050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,"X","X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0221","Planarätzer P300",2,null,null,null,null,null,null,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,"X","X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,null,"X"]
["BS 0225","Belichtungsgerät MA6",1]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["BE 0229","Läppmaschine Myläpp",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0230","Läppmaschine Myläpp",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",1,"X",null,"X",null,null,null,null,null,null,null,null,"X","unbefristet"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1,"X",null,"X",null,null,null,null,null,null,null,null,"X","unbefristet"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,"X","X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X","X",null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0248","Weberpresse PW 10",2,null,null,null,null,null,null,null,null,"X","X"]
["PR 0250","Abformanlage (WUM2+WUM3)",1,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad HEGA II  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,null,"X",null,null,null,null,null,null,null,null,null,"X","bis: 31.12.13"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,"X",null,null,null,null,null,null,null,null,null,"X","bis: 31.12.13"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,"X",null,null,null,null,null,null,null,null,null,"X","bis: 31.12.13"]
["SG 0294","Niederspannungsgerät",1,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset"]
["BE 0300","Universal Hochpräzisionsfräsmaschine "]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["SL 0313","Ultraschallreinigungsanlage für FE",1,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,"X",null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage",1,null,null,null,null,null,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A",1]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,null,null,null,"X",null,null,null,"X"]
["OF 0322","Rohrofen klappbar",1,null,null,null,null,null,null,null,"X",null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","½ ","X",null,null,null,null,null,"X","X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,"X","X"]
["TS 0326","Sägemaschine DAD 3430",1,null,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,"X"]
["GA 0328","Galvanik-Prozesseinheit","½ ",null,null,"X",null,null,null,null,null,"X"]
["SO 0330","Marvin-Anlage"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X"]
["RS 0338","Spincoater Primus STT15",1,null,null,"X"]
["SE 0339","Sprühentwickler ST30 (organisch)",1,"X"]
["SE 0340","Sprühentwickler ST30 (anorganisch)",1,"X"]
["RS 0341","Spincoater Primus STT15",1,null,null,null,null,null,null,null,null,"X","X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Wickert",1,null,null,null,null,null,null,null,null,"X"]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,null,null,null,null,null,null,null,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0828","Fusionsspleissgerät S177A",1]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,"X"]
["BS 0831","Laser-Lithographie-Anlage",1,null,"X","X",null,null,null,null,null,null,null,null,null,"bis: 28.02.13"]
["BS 0832","Nanoscribe 3D Laserlithographie-System",1,"X"]

{"sheet":"WPL 2014 FM","index":8,"n_rows":139,"n_cols":17,"rows_kept":139,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2014"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2014-12-19T10:49:57"]
[]
[null,null,null,"WPL 2014 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["AE 0201","Oxidationsanlage",1]
["AE 0202","Oxidationsanlage",1]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0211","Universalwärmeschrank UF 110plus",1,"X",null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,"X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0221","Planarätzer P300",2]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,null,"X"]
["AE 0226","SENTECH Plasmaanlage",1,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["SL 0233","Ultraschallreinigungsgerät",2,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0250","Abformanlage",1,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["VS 0258","Verklebeapparatur",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad HEGA II  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X","X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.14"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.14"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis: 31.12.14"]
["SG 0294","Niederspannungsgerät",1,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset"]
["BE 0300","Micro Milling Center MMC600-Z2",1,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A"]
["OF 0321","Rohrofen klappbar",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0322","Rohrofen klappbar",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","½ ","X",null,null,null,null,null,"X","X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,null,"X"]
["TS 0326","Sägemaschine DAD 3430",1,null,"X","X"]
["SA 0327","Parylen-Anlage PDS 2010",1,"X",null,null,null,null,null,null,null,null,null,"X"]
["GA 0328","Galvanik-Prozesseinheit"]
["OF 0329","Trockenofen Heratherm OMH 60",2,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0330","Marvin-Anlage"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X"]
["RS 0338","Spincoater Primus STT15",1,null,null,"X"]
["SE 0339","Sprühentwickler ST30 (organisch)",1,"X"]
["SE 0340","Sprühentwickler ST30 (anorganisch)",1,"X"]
["RS 0341","Spincoater Primus STT15",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0342","Laborkalander R2R",1,null,null,"X",null,null,null,null,null,"X"]
["OF 0343","Klimaschrank ICH 256",1,"X",null,null,null,null,null,null,null,"X"]
["OF 0344","Präzisionsheizplatte PZ 35 ET",1,"X"]
["GA 0345","Glasgalvanikanlage",1,null,"X"]
["OF 0346","Hotplate (Horst)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Wickert",1,null,null,null,null,null,null,null,null,"X"]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,null,null,null,null,null,null,null,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,"X"]
["BS 0831","Laser-Lithographie-Anlage",1,null,null,"X","X"]
["BS 0832","Nanoscribe 3D Laserlithographie-System",1,"X",null,"X"]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2,null,null,null,null,null,null,null,null,null,"X","X"]

{"sheet":"WPL 2015 FM","index":9,"n_rows":138,"n_cols":17,"rows_kept":138,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2015"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2015-12-21T15:41:50"]
[]
[null,null,null,"WPL 2015 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0211","Universalwärmeschrank UF 110plus",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,"X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1,null,null,null,null,null,null,null,null,null,"X"]
["AE 0226","SENTECH Plasmaanlage",1,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X"]
["BE 0231","ULTRA-Fräse Polycut E",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BE 0247","Poliermaschine Safir 355",1,null,null,null,"X"]
["PR 0248","Weberpresse PW 10",10,null,null,null,null,null,null,null,null,null,"X",null,"X"]
["PR 0250","Abformanlage",1,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X"]
["RS 0275","Resistklebeplatz"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad HEGA II  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner (Litho 3)",1,null,null,null,null,null,null,null,"X",null,null,null,null,"bis: 31.08.15"]
["BS 0287","Jenoptik-Röntgenscanner (Litho 1)",1,null,null,null,null,null,null,null,"X",null,null,null,null,"bis: 31.08.15"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,null,null,null,null,null,null,"X",null,null,null,null,"bis: 31.08.15"]
["SG 0294","Niederspannungsgerät",1,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset"]
["BE 0300","Micro Milling Center MMC600-Z2",1,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X"]
["BD 0318","IBAD-Beschichtungsanlage"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X"]
["VS 0320","Ball Wedge Bonder 7700 A"]
["OF 0321","Rohrofen klappbar",1,null,"X"]
["OF 0322","Rohrofen klappbar",1,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","½ ",null,"X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,null,null,null,null,null,"X"]
["TS 0326","Sägemaschine DAD 3430",2,null,null,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,null,null,null,null,null,null,null,null,null,null,"X","X"]
["GA 0328","Galvanik-Prozesseinheit"]
["SO 0330","Marvin-Anlage"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X"]
["RS 0338","Spincoater Primus STT15"]
["SE 0339","Sprühentwickler ST30 (organisch)",1,"X"]
["SE 0340","Sprühentwickler ST30 (anorganisch)",1,"X"]
["RS 0341","Spincoater Primus STT15",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0342","Laborkalander R2R",1,null,null,null,null,null,null,null,null,"X"]
["OF 0343","Klimaschrank ICH 256",1,null,null,null,null,null,null,null,null,"X"]
["OF 0344","Präzisionsheizplatte PZ 35 ET",1,"X"]
["GA 0345","Glasgalvanikanlage",1,null,"X",null,"X"]
["OF 0346","Hotplate (Horst)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0347","Präzisionsheizplatte PZ 35 ET",1,null,null,null,null,"X"]
["OF 0348","Präzisionsheizplatte PZ 35 ET",1,null,null,null,null,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Wickert",1,null,null,null,null,null,null,null,null,"X"]
["SO 0810","Präzisions-Lineartisch LTM 80-75-HSM",null,null,null,null,null,null,null,null,"X"]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BE 0814","Schleif- und Poliermaschine Saphir 350E",1,null,null,null,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,null,null,null,null,null,null,null,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,"X","X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["SL 0823","Ultraschallgerät Sonicator Q 125",1,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,"X"]
["BS 0831","Laser-Lithographie-Anlage",1,null,null,null,"X"]
["BS 0832","Nanoscribe 3D Laserlithographie-System",1,null,null,"X",null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2016 FM","index":10,"n_rows":138,"n_cols":17,"rows_kept":138,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2016"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2016-07-12T15:11:42"]
[]
[null,null,null,"WPL 2016 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["RS 0200","Spincoater (OPTIcoat ST22+)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0203","Kupfergalvanikbad"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,"X"]
["OF 0211","Universalwärmeschrank UF 110plus",1,null,null,null,null,null,null,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1,null,null,null,null,null,null,"X"]
["SG 0216","Präzisionsstromgeber",1,null,null,null,"X","X"]
["GA 0220","Goldgalvanikbad",1,null,null,"X"]
["AE 0222","Plasmaätzer 300E",1,null,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0224","Belichtungsgerät LH5",1]
["AE 0226","SENTECH Plasmaanlage",1,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SL 0233","Ultraschallreinigungsgerät",2,null,null,null,null,"X","X"]
["SL 0234","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["OF 0237","Umluftofen UT 5050 EK-LAF",1,null,null,null,null,null,null,null,null,"X"]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,"X","X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["OF 0244","Vakuumofen Vacutherm",1,null,null,null,null,null,null,null,null,"X"]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ ",null,null,null,null,"X",null,null,null,null,null,"X"]
["BS 0249","Elektronenstrahlschreiber EBPG5200Z","½ ","X"]
["PR 0250","Abformanlage",1,null,null,null,null,null,null,null,null,"X"]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,"X","X"]
["BS 0255","Laseranlage LAY 75 K",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["VS 0256","Heißsiegelbonder",1,null,"X"]
["SO 0257","Positioniereinheit zur partiellen Resistmetallisierung",5,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1,null,null,"X"]
["OF 0261","Klimaschrank Hygros 15"]
["SG 0262","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG0266","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,"X","X"]
["RS 0275","Resistklebeplatz"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["GA 0279","Hartnickelbad HEGA II  - Anlage\n                                     - Galvanikbad","1\n½",null,null,"X\nX",null,null,null,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,"X","X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,"X","X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,"X","X"]
["BS 0286","Jenoptik-Röntgenscanner",1,null,"X",null,null,null,null,null,"X",null,null,null,null,"bis: 31.08.16"]
["BS 0287","Jenoptik-Röntgenscanner",1,null,"X",null,null,null,null,null,"X",null,null,null,null,"bis: 31.08.16"]
["BS 0293","Jenoptik-Röntgenscanner (Litho 2)",1,null,"X",null,null,null,null,null,"X",null,null,null,null,"bis: 31.08.16"]
["SG 0294","Niederspannungsgerät",1,null,null,null,"X","X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["RS 0299","Spincoater RC8 Gyrset"]
["BE 0300","Micro Milling Center MMC600-Z2",1,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,"X","X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1,null,null,null,null,null,null,null,null,"X"]
["OF 0306","Umluftofen UT 5050 LAF",1,null,null,null,null,null,null,null,null,"X"]
["OF 0307","Vakuumofen VT 6060 M",1,null,null,null,null,null,null,null,null,"X"]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,"X"]
["GA 0315-1\nGA 0315-2","Glanzgoldbad Helodor 100"]
["GA 0316-1\nGA 0316-2","Glanzgoldbad Helodor 101"]
["SG 0317","Niederspannungsgerät",1,null,null,null,"X","X"]
["BD 0318","IBAD-Beschichtungsanlage"]
["SG 0319","Niederspannungsgerät",1,null,null,null,"X","X"]
["VS 0320","Ball Wedge Bonder 7700 A"]
["OF 0321","Rohrofen klappbar",1,null,"X"]
["OF 0322","Rohrofen klappbar",1,null,"X"]
["SL 0323","Ultraschallreinigungsanlage Powersonic","½ ","X",null,null,null,null,null,"X"]
["SO 0324","Nullluftgenerator TG 12 UP",1,"X"]
["SA 0327","Parylen-Anlage PDS 2010",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0328","Galvanik-Prozesseinheit"]
["OF 0329","Trockenofen Heratherm OMH 60",2,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0330","Marvin-Anlage"]
["SO 0331","Wasservollentsalzer Seradest S1500",1,"X"]
["SA 0332","Spincoater",1,"X"]
["VS 0333","Ultraschallschweißgerät",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["GA 0334","Goldgalvanikbad",1,null,null,"X"]
["OF 0335","Hotplate (OPTIhot SHT20)",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,"X","X"]
["RS 0338","Spincoater Primus STT15"]
["SE 0339","Sprühentwickler ST30 (organisch)",1,"X"]
["SE 0340","Sprühentwickler ST30 (anorganisch)",1,"X"]
["RS 0341","Spincoater Primus STT15",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0342","Laborkalander R2R",1,null,null,null,null,null,null,null,null,"X"]
["OF 0343","Klimaschrank ICH 256",1,null,null,null,null,null,null,null,null,"X"]
["OF 0344","Präzisionsheizplatte PZ 35 ET",1,"X"]
["GA 0345","Glasgalvanikanlage",1,null,null,null,"X"]
["OF 0346","Hotplate (Horst)",1,null,"X"]
["OF 0347","Präzisionsheizplatte PZ 35 ET",1,null,null,null,null,"X"]
["OF 0348","Präzisionsheizplatte PZ 35 ET",1,null,null,null,null,"X"]
["SO 0349","Gefriertrocknungsanlage Freezone Plus 6",1,"X"]
["PR 0801","Abformanlage WUM1",1,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Vickert",1,null,null,null,null,null,null,null,null,"X"]
["SO 0810","Präzisions-Lineartisch LTM 80-75-HSM",null,null,null,null,null,null,null,null,"X"]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["VS 0817","Dosierautomat"]
["SA 0818","Sputteranlage UNIVEX 500",1,null,null,null,null,null,null,null,"X"]
["OF 0819","Vakuum-Trockenofen",1,null,null,null,"X",null,"X"]
["OF 0820","Umluftofen M",1,null,null,null,null,null,null,null,null,"X"]
["PR 0821","Abformanlage HEX 3",1,null,null,null,null,null,null,null,null,"X"]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["SL 0823","Ultraschallgerät Sonicator Q 125",1,null,"X"]
["OF 0825","Vakuumofen",1,null,null,null,null,null,null,null,null,"X"]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,"X"]
["BS 0831","Laser-Lithographie-Anlage",1,null,null,null,"X"]
["BS 0832","Nanoscribe 3D Laserlithographie-System",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2,null,null,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2017 FM","index":11,"n_rows":100,"n_cols":17,"rows_kept":100,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2017"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:00:46"]
[]
[null,null,null,"WPL 2017 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1,null,null,"X"]
["BD 0205","Bedampfungsanlage Univex 450",1,null,null,"X"]
["OF 0214","HMDS-Ofen Star-2000",1]
["SG 0216","Präzisionsstromgeber",1,null,null,null,null,"X"]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["AE 0226","SENTECH Plasmaanlage",1,"X"]
["SG 0227A","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0227B","Präzisionsstromgeber",1,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1,null,null,null,null,null,"X"]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1,null,null,null,null,null,null,"X"]
["SG 0239","Niederspannungsgerät",1,null,null,null,null,"X"]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["PR 0250","Abformanlage",1]
["SL 0252","Nassprozessanlage",1,null,"X"]
["SL 0253","Ultraschallreinigungsgerät",1,null,null,null,null,null,null,"X"]
["BS 0255","Laseranlage LAY 75 K",1]
["OF 0259","Trockenofen ED-115",1,null,"X"]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0263","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0264","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0265","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG0266","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0267","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0268","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0269","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0270","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0271","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0272","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0273","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0274","Präzisionsstromgeber",1,null,null,null,null,"X"]
["RS 0276","Resistklebeplatz",1,null,null,"X"]
["RS 0277","Resistklebeplatz",1,null,null,"X"]
["RS 0278","Resistklebeplatz",1,null,null,"X"]
["SG 0280","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0281","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0282","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0283","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0284","Präzisionsstromgeber",1,null,null,null,null,"X"]
["SG 0285","Präzisionsstromgeber",1,null,null,null,null,"X"]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["SG 0294","Niederspannungsgerät",1,null,null,null,null,"X"]
["RS 0295","Resistklebeplatz",1,null,null,"X"]
["RS 0296","Resistklebeplatz",1,null,null,"X"]
["RS 0297","Resistklebeplatz",1,null,null,"X"]
["OF 0298","Trockenofen ",1,null,null,"X"]
["BE 0300","Micro Milling Center MMC600-Z2",1,null,"X"]
["SG 0301","Präzisionsstromgeber",1,null,null,null,null,"X"]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1,"X"]
["AE 0311","4-TEC Planarätzer",1,null,null,null,null,"X"]
["HD 0312","Maskenreiniger HMR 900",1,null,null,null,null,"X"]
["BS 0314","EVG 620 Double Side Mask Aligner",1,"X"]
["SG 0317","Niederspannungsgerät",1,null,null,null,null,"X"]
["SG 0319","Niederspannungsgerät",1,null,null,null,null,"X"]
["TS 0326","Sägemaschine DAD 3430",2,null,null,"X"]
["SA 0332","Spincoater",1,"X"]
["OF 0336","Hotplatebox (Horst)",1,"X"]
["AE 0337","Lackentferner STP 2020",1,null,null,null,null,null,null,"X"]
["SE 0339","Sprühentwickler ST30 (organisch)",1,"X"]
["SE 0340","Sprühentwickler ST30 (anorganisch)",1,"X"]
["OF 0344","Präzisionsheizplatte PZ 35 ET",1,"X"]
["OF 0346","Hotplate (Horst)",1,null,"X"]
["OF 0347","Präzisionsheizplatte PZ 35 ET",1,null,null,null,null,"X"]
["OF 0348","Präzisionsheizplatte PZ 35 ET",1,null,null,null,null,"X"]
["SO 0349","Gefriertrocknungsanlage Freezone Plus 6",1,"X"]
["PR 0801","Abformanlage WUM1",1]
["PR 0802","Nanoimprintanlage EVG 510HE",5,null,null,null,null,null,null,null,null,null,"X"]
["OF 0804","Trockenofen Memmert 500",1,null,null,"X"]
["OF 0805","Trockenofen Memmert 100",1,null,null,"X"]
["VS 0808","Verklebeapparatur",1,null,"X"]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1,"X"]
["BS 0816","UV-Härtelampe DeloLux",1,null,null,null,null,"X"]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1,null,null,null,null,null,"X"]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1,null,null,null,null,"X"]
["SL 0823","Ultraschallgerät Sonicator Q 125",1,null,"X"]
["OF 0825","Vakuumofen",1]
["VS 0829","Kleberoboter",1,null,null,null,null,null,"X"]
["AE 0830","OPT - Trockenätzanlage  (RIE/ICP, RIBE)",1,"X"]

{"sheet":"WPL 2018 FM","index":12,"n_rows":78,"n_cols":17,"rows_kept":78,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2018"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:00:23"]
[]
[null,null,null,"WPL 2018 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2,null,null,null,null,null,"X"]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["SL 0233","Ultraschallreinigungsgerät",2,null,null,null,null,null,"X"]
["SL 0234","Ultraschallreinigungsgerät",2,null,null,null,null,null,"X"]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["PR 0250","Abformanlage",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]
["RW 1001","Reinstwasseraufbereitungsanlage Super Q",2]

{"sheet":"WPL 2019 FM","index":13,"n_rows":75,"n_cols":17,"rows_kept":75,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2019"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:59:32"]
[]
[null,null,null,"WPL 2019 Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["PR 0250","Abformanlage",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2020 FM","index":14,"n_rows":88,"n_cols":17,"rows_kept":88,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2020"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",2]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2021 FM","index":15,"n_rows":85,"n_cols":17,"rows_kept":85,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2021"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2022 FM","index":16,"n_rows":88,"n_cols":17,"rows_kept":88,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2022"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",2]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2023 FM","index":17,"n_rows":85,"n_cols":17,"rows_kept":85,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2023"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2024 FM","index":18,"n_rows":88,"n_cols":17,"rows_kept":88,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2024"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",2]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2025 FM","index":19,"n_rows":86,"n_cols":17,"rows_kept":86,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2025"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["PR 0248","Weberpresse PW 10",10,null,null,null,null,null,null,null,null,null,null,null,"X"]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2026 FM","index":20,"n_rows":88,"n_cols":17,"rows_kept":88,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2026"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",2]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2027 FM","index":21,"n_rows":85,"n_cols":17,"rows_kept":85,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2027"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2028 FM","index":22,"n_rows":88,"n_cols":17,"rows_kept":88,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2028"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",2]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2029 FM","index":23,"n_rows":85,"n_cols":17,"rows_kept":85,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2029"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2030 FM","index":24,"n_rows":88,"n_cols":17,"rows_kept":88,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 2030"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T09:05:05"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0222","Plasmaätzer 300E",2]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",2]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["BS 0255","Laseranlage LAY 75 K",1]
["TS 0257","Mutronic-Säge",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]

{"sheet":"WPL 2006 PM","index":25,"n_rows":151,"n_cols":17,"rows_kept":151,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15],[2,0,2,1]]}
[null,null,null,"Wartungsplan Prüfmittel 2006"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,null,"2012-04-26T09:27:00"]
[]
[null,null,null,"WPL 2006 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","LASAIR -Partikelzählgerät 210  ",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,"X"]
["OB 0005","Oberflächenmeßgerät TENCOR P 2",1,null,null,"X"]
["MI 0006","Meßmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X"]
["OB 0009","Oberflächenmeßgerät SINUS",1,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["SO 0016","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["SO 0017","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,"X",null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,"X"]
["OM 0029","Lasersystem Toptica",1,null,"X"]
["SO 0030","Leitfähigkeitsmeßgerät inoLab LF 538",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0031","Thermohygrograph",3,null,null,null,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,null,null,"X",null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,"X",null,"X"]
["HO 0040","Kalibriernormal „Endmaß“",5,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0044","Kalibriernormal „Rauheit“",5,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0045","Kalibriernormal „Drehzahl“",1,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0047","Kalibriernormal „Puffer-Lösung“",null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["OB 0051","Kalibriernormal „SINUS“",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0052","Elektronischer Schnelltaster",1,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,"X",null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0058","Montageplatz „Spektrometerdeckelung“",1,null,null,null,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["SO 0070","Partikelmessgerät für Flüssigkeiten",2,null,"X","X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",2,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,"X","X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,"X"]
["OM 0502","Nahfeldmesssystem",1,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,"X","X",null,null,"als C-PM ab:31.1.06"]
["EM 0506","Hand-DMM Voltcraft M-4650 CR",2,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0523","Thermomechanische Analyse",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,null,null,"X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2 ",2,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,"X"]
["SO 0530","Ubbelohde Viskosimeter",1,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0537","IR-Kamera 13215 ",5,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0539","Lightwave Multimeter HP8163A",1,null,null,"X"]
["OM 0540","Reflektometer HP 8504B",5,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0541","Wellenlängenmessgerät HP86120B",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0542","AD-Wandlerkarte National Instruments",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0543","AD-Wandlerkarte National Instruments",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0544","Digital Speicheroszilloskop HP54601A",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0545","Multimeter Fluke 85 III",1,"X",null,null,null,null,null,null,null,null,null,"X"]
["OM 0546","Lightwave Multimeter HP 8153A",5,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0549","Rifocs Optisches Messsystem",1,"X"]
["EM 0550","Lock-in-Verstärker Bentham 217 IR",1,null,"X"]
["OM 0551","IR-Photodetektor",1,null,"X"]
["EM 0552","Spektrum Analyzer Modell E4403B",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0553","Multimeter Fluke 85",1,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0555","IR-Photodetektor",1,null,"X"]
["EM 0556","Lock-in-Verstärker Bentham 217 VIS",1,null,"X"]
["PS 0557","Photon Control Position Controller ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PS 0558","Photon Control Position Controller ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PS 0559","Controller Piezosystem ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PS 0560","Controller Piezosystem ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0561","Polarization Controller Agilent 11896A",1,"X"]
["PS 0562","Schrittmotorsteuerung ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PS 0563","Schrittmotorsteuerung ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["PS 0564","Position Controller PROFILE POCO ",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0565","IR-Monochromatorsystem Bentham ",1,null,null,null,null,"X"]
["OM 0566","VIS-Monochromatorsystem Bentham",1,null,null,null,null,"X"]
["SO 0567","Versuchsstand „Kryostat“",3,null,null,null,null,null,null,null,null,null,"X"]
["MI 0568","Stereomikroskop M3Z",1,null,"X"]
["SO 0569","Versuchsstand „Elastometer“",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["EM 0572","Digitalmultimeter Fluke 45",1,"X"]
["EM 0573","Digitalmultimeter Fluke 8010A",1,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,"X",null,null,null,null,"als C-PM ab:31.1.06"]
["EM 0578","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X"]
["EM 0579","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X"]
["OM 0580","Optical Power Meter ML9001A",1,null,null,"X"]
["EM 0581","Multimeter Fluke 45",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0582","Multimeter Fluke 45",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0583","Tektronix Oszilloskop 466",1,null,null,"X"]
["OM 0584","Abbe-Refraktometer B",1,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0586","Tektronix Oszilloskop THS720A",1,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i",1,null,null,null,null,null,null,null,"X","X"]
["SO 0592","Flächenwiderstandsmessgerät MR-1",1,null,null,"X",null,"X"]
["EM 0593","Digital-Multimeter Fluke 45",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",1,null,null,null,null,null,"X",null,null,"X"]
["OM 0605","Optical Spectrum Analyzer OSA ",1,null,null,null,null,null,"X",null,null,"X"]
["SD 0606","Mikrometerschraube 0-25mm (Mauser) ",1,null,null,"X"]

{"sheet":"WPL 2007 PM","index":26,"n_rows":146,"n_cols":17,"rows_kept":146,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15],[2,0,2,1]]}
[null,null,null,"Wartungsplan Prüfmittel 2007"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,null,"2011-01-11T16:57:35"]
[]
[null,null,null,"WPL 2007 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0001","LASAIR -Partikelzählgerät 210  ",1,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,"X","X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,"X",null,null,"X",null,null,null,null,null,"bis:  31.07.07"]
["MI 0004","Rasterelektronenmikroskop SEM 525 M",2,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmeßgerät TENCOR P 2",1,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X"]
["OB 0009","Oberflächenmeßgerät SINUS",1]
["HO 0010","Höhenmessgerät MT 60 M",2,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,"X"]
["OM 0029","Lasersystem Toptica",5,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",1,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,"X","X"]
["HO 0040","Kalibriernormal „Endmaß“",5,"X"]
["MI 0043","Kalibriernormal „Mikroskope“",5,"X",null,null,null,null,null,null,null,null,null,null,null,"bis:  31.12.11"]
["SO 0045","Kalibriernormal „Drehzahl“",1,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["HO 0052","Elektronischer Schnelltaster",1,null,"X","X"]
["SO 0053","Thermo-Hygrograph NSII-Q",3,null,"X"]
["SO 0054","Thermo-Hygrograph NSII-Q",3,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0058","Montageplatz „Spektrometerdeckelung“",1,null,null,null,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0063","Messmikroskop Leitz UWM SKI",3,null,null,null,null,null,"X","X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X","X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X","X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,"X"]
["MI 0072","Seitenwand-Inspektionsmikroskop",10,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,"X",null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)",1,null,null,null,"X"]
["SO 0126","Handhygrometer Testo 601",1,"X"]
["WA 0136","Analysenwaage Sartorius Handy",1,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,null,null,null,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",4,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["EM 0501","Digital-Multimeter Agilent 34410A",1,null,null,"X"]
["OM 0502","Nahfeldmesssystem",5,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,"X","X",null,null,"als C-PM ab:31.1.06"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm",2,null,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,"X","X"]
["SO 0522","Wärmestromkalorimeter DSC 204",1,"X"]
["SO 0523","Thermomechanische Analyse",1,"X"]
["HO 0526","Höhentaster MT 60M",1,"X",null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,"X",null,"X"]
["SO 0530","Ubbelohde Viskosimeter",1]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,"X",null,null,null,null,"X"]
["OM 0537","IR-Kamera 13215 ",5,"X"]
["OM 0539","Lightwave Multimeter HP8163A",5,null,null,"X"]
["OM 0540","Reflektometer HP 8504B",5,"X"]
["OM 0541","Wellenlängenmessgerät HP86120B",5,null,"X"]
["EM 0544","Digital Speicheroszilloskop HP54601A",1]
["OM 0546","Lightwave Multimeter HP 8153A",5,"X"]
["OM 0549","Rifocs Optisches Messsystem",5,"X"]
["EM 0550","Lock-in-Verstärker Bentham 217 IR",1,null,"X"]
["OM 0551","IR-Photodetektor",1,null,"X"]
["EM 0552","Spektrum Analyzer Modell E4403B",5,null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0555","IR-Photodetektor",1,null,"X"]
["EM 0556","Lock-in-Verstärker Bentham 217 VIS",1,null,"X"]
["OM 0561","Polarization Controller Agilent 11896A",5,"X"]
["OM 0565","IR-Monochromatorsystem Bentham ",1]
["OM 0566","VIS-Monochromatorsystem Bentham",1]
["SO 0567","Versuchsstand „Kryostat“",3]
["MI 0568","Stereomikroskop M3Z",1,null,"X","X"]
["SO 0569","Versuchsstand „Elastometer“",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0576","Differenzdruckaufnehmer 10 bar",1,null,null,null,null,null,null,null,null,"X",null,null,null,"als C-PM ab:31.1.06"]
["SO 0577","Gasflussregler bis 1 sccm",2,null,null,null,null,null,null,null,null,null,"X"]
["OM 0580","Optical Power Meter ML9001A",5,null,null,"X"]
["EM 0583","Tektronix Oszilloskop 466",1,null,null,"X"]
["OM 0584","Abbe-Refraktometer B",5,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0586","Tektronix Oszilloskop THS720A",5,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i",1,null,null,null,null,null,null,null,"X"]
["SO 0592","Flächenwiderstandsmessgerät MR-1",1,null,null,null,null,"X"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",1,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyzer OSA ",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0606","Mikrometerschraube 0-25mm (Mauser) ",1,null,null,"X"]
["MI 0607","Stereo Zoommikroskop SZ 61 TR",2,null,null,"X"]

{"sheet":"WPL 2008 PM","index":27,"n_rows":128,"n_cols":17,"rows_kept":128,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15],[2,0,2,1]]}
[null,null,null,"Wartungsplan Prüfmittel 2008"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:59:17"]
[]
[null,null,null,"WPL 2008 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,"X",null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmeßgerät TENCOR P 2",1,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X"]
["OB 0009","Oberflächenmeßgerät SINUS",1,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",4,null,null,"X",null,null,null,null,null,null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",1,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One",3,null,null,null,"X"]
["SD 0035","Bügelmessschraube",1,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,"X",null,"X","X",null,null,null,"bis 30.9.08"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0048","Kalibriernormal „Thermometer“",10,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["HO 0052","Elektronischer Schnelltaster EOD 1525K",1,null,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0058","Montageplatz „Spektrometerdeckelung“",1,null,null,null,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0061","Kalibriernormal „Viskosität“",10,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,"X",null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["SO 0070","Partikelmessgerät für Flüssigkeiten",2,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,"X",null,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,"X"]
["MS 0074","Digimatic Messschieber",1,"X"]
["MS 0075","Digimatic Messschieber",1,"X"]
["MS 0076","Digimatic Messschieber",1,"X"]
["MS 0077","Digimatic Messschieber",1,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,"X",null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,"X",null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["MI 0094","Messmikroskop Ergoplan",1,"X",null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)",1,null,null,null,"X",null,null,null,null,null,null,null,null,"bis 31.12.09"]
["SO 0126","Handhygrometer Testo 601",1,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,"X"]
["EM 0158","Multimeter HP 3478 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0506","Hand-DMM Voltcraft M-4650 CR",2,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",1,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,"X"]
["SO 0523","Thermomechanische Analyse",2,"X"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,"X",null,"X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2 ",2,null,null,"X",null,"X","X",null,null,null,null,null,null,"bis 30.06.08"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2",2,null,null,"X"]
["SO 0536","Kalibriernormal „Härtevergleichsplatte“",3,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0551","IR-Photodetektor",1,null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0555","IR-Photodetektor",1,null,"X"]
["MI 0568","Stereomikroskop M3Z",1,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["EM 0578","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0579","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0583","Tektronix Oszilloskop 466",1]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,"X","X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,"X","X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,"X","X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,"X","X"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",1,"X"]
["OM 0605","Optical Spectrum Analyzer OSA "]
["SD 0606","Mikrometerschraube 0-25mm (Mauser) ",1,null,null,"X"]

{"sheet":"WPL 2009 PM","index":28,"n_rows":118,"n_cols":17,"rows_kept":118,"cut":false,"hidden":false,"merged":[[2,0,2,1],[2,3,2,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2009"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:58:59"]
[null,null,null,"WPL 2009 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmeßgerät TENCOR P 2",1,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X",null,null,null,null,null,"bis 31.8.09"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X","X",null,null,null,null,null,"bis 31.8.09"]
["HO 0010","Höhenmessgerät MT 60 M",2,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["SO 0016","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["SO 0017","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X","X",null,null,null,null,null,"bis 31.8.09"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,"X",null,"X"]
["SO 0030","Leitfähigkeitsmessgerät inoLab LF 538",1,"X"]
["SO 0031","Thermohygrograph",3,null,null,null,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X",null,null,null,null,null,"bis 31.8.09"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,"X",null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,"X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,"X","X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,"X",null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0058","Montageplatz „Spektrometerdeckelung“",1,null,null,null,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,null,null,"X","X"]
["MS 0073","Digimatic Messschieber",1,"X",null,"X"]
["MS 0074","Digimatic Messschieber",1,"X",null,"X"]
["MS 0075","Digimatic Messschieber",1,"X",null,"X"]
["MS 0076","Digimatic Messschieber",1,"X",null,"X"]
["MS 0077","Digimatic Messschieber",1,"X",null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,"X","X",null,null,null,null,null,"bis 31.8.09"]
["SO 0123","Photo Ionisations Detektor (PID)",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis 31.12.09"]
["SO 0126","Handhygrometer Testo 601",1,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["SO 0155","Sekunden-Thermometer Testo 901",2,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digital-Multimeter HP-3455A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm",2,null,null,null,null,null,null,null,null,null,"X"]
["SO 0511","Gasflussregler bis 10 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X","X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,null,null,null,null,null,"X","X"]
["OM 0551","IR-Photodetektor",1,null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0555","IR-Photodetektor",1,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm",2,null,null,null,null,null,null,null,null,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,"X","X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,"X","X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,"X","X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,"X","X"]
["SO 0595","Gasflussregler bis 100 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",1,"X","X"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyzer OSA "]
["SD 0606","Mikrometerschraube 0-25mm (Mauser) ",1,null,null,"X"]
["MI 0607","Stereo Zoommikroskop SZ 61 TR",2,null,null,"X"]

{"sheet":"WPL 2010 PM","index":29,"n_rows":124,"n_cols":17,"rows_kept":124,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2010"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2011-01-03T11:14:54"]
[]
[null,null,null,"WPL 2010 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,"X",null,null,null,null,"X","X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis 28.2.11"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,"X",null,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,null,null,null,null,null,null,null,"X","X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,null,null,"X",null,null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0038","UV-Intensity Meter Model 1000 UV",5,null,null,null,null,"X",null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,"X","X"]
["SO 0046","Kalibriernormal „Strom/Spannung“",1,null,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,"X","X"]
["SO 0050","Kalibriernormal „Ebenheit“  ",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis 31.5.15"]
["OB 0051","Kalibriernormal „SINUS“"]
["SO 0053","Thermo-Hygrograph NSII-Q",3,null,"X"]
["SO 0054","Thermo-Hygrograph NSII-Q",3,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,"X",null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0063","Messmikroskop Leitz UWM SKI",2,null,null,null,null,null,null,"X","X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,"X",null,null,null,null,null,null,null,null,null,"                "]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,"X",null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,"X",null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,"X",null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,"X",null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,"X",null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digitalmultimeter HP 3455 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0506","Hand-DMM Voltcraft M-4650 CR",2,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,"X","X"]
["SO 0523","Thermomechanische Analyse",2,"X","X"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,"X","X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2 ",2,null,null,null,null,null,null,"X","X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2",2,null,null,"X"]
["OM 0551","IR-Photodetektor",5,null,"X",null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0555","IR-Photodetektor",5,null,"X",null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["EM 0578","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0579","Digital-Multimeter M-4660A",2,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,"X",null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,"X",null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,"X",null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,"X",null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",5,null,"X",null,"X"]
["OM 0605","Optical Spectrum Analyzer OSA "]

{"sheet":"WPL 2011 PM","index":30,"n_rows":124,"n_cols":17,"rows_kept":124,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2011"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2011-12-16T13:20:15"]
[]
[null,null,null,"WPL 2011 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,"X",null,null,"X",null,null,"bis 30.9.11"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,"X",null,null,null,null,null,null,null,null,null,null,null,"bis 28.2.11"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,"X",null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",2,null,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage 1574 MP8-2",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,null,"X",null,null,"X"]
["OB 0041","Kalibriernormal „TENCOR“",10,null,null,null,null,null,null,null,"X",null,null,"X"]
["MI 0042","Kalibriernormal „JSM/SEM“",10,null,null,null,null,"X",null,null,null,null,null,null,null,"bis:  31.05.16"]
["MI 0043","Kalibriernormal „Mikroskope“",5,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  31.12.11"]
["OB 0044","Kalibriernormal „Rauheit“",5,null,null,null,null,null,null,null,null,null,null,"X","X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,"X","X","X",null,null,null,null,null,null,null,"bis:  30.4.11"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,"X","X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,"X",null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,"X","X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,null,null,null,null,null,null,null,null,null,"X","bis:  29.2.12"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,"X",null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,"X",null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X",null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X",null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,"X","X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",4,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,"X","X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,"X","X"]
["SO 0156","Digitalthermometer GTH 1200 A",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digitalmultimeter HP 3455 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,"X","X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",2,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X",null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,null,null,null,null,"X",null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X",null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,null,null,null,null,"X",null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,"X","X"]
["OM 0605","Optical Spectrum Analyzer OSA "]
["MI 0607","Stereo Zoommikroskop SZ 61 TR",2,null,null,"X","X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,null,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2012 PM","index":31,"n_rows":136,"n_cols":17,"rows_kept":136,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2012"]
[null,null,null,"FM","PM","KPL","2012 FM",null,null,null,null,null,null,null,null,"Stand:","2012-12-21T11:24:10"]
[]
[null,null,null,"WPL 2012 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,"X","X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["SO 0016","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["SO 0017","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0029","Lasersystem Toptica",5,null,"X"]
["SO 0031","Thermohygrograph",3,null,null,null,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0040","Kalibriernormal „Endmaß“",5,"X",null,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0056","Analysenwaage 1801 MP8",1,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0063","Messmikroskop Leitz UWM SKI",2,null,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,"X","X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,null,"X","X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,"X","X",null,null,null,null,null,null,null,null,null,"bis:  29.2.12"]
["OB 0082","Scanning Probe Microscope D3100S",1,null,null,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,null,null,"X","X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,null,"X","X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["OM 0502","Nahfeldmesssystem",5,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digitalmultimeter HP 3455 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,null,"X",null,null,"X",null,null,null,null,null,null,null,"bis:  31.5.12"]
["SO 0523","Thermomechanische Analyse",2,null,"X",null,null,"X",null,null,null,null,null,null,null,"bis:  31.5.12"]
["SO 0524","Dynamic Stress Rheometer SR500",2,null,null,null,null,null,null,null,null,"X"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2 ",2,null,null,null,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,"X","X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,"X","X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["OM 0537","IR-Kamera 13215 ",5,"X"]
["OM 0539","Lightwave Multimeter HP8163A",5,null,null,"X"]
["OM 0540","Reflektometer HP 8504B",5,"X"]
["OM 0541","Wellenlängenmessgerät HP86120B",5,null,"X"]
["OM 0546","Lightwave Multimeter HP 8153A",5,"X"]
["OM 0549","Rifocs Optisches Messsystem",5,"X"]
["EM 0552","Spektrum Analyzer Modell E4403B",5,null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0561","Polarization Controller Agilent 11896A",5,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["OM 0580","Optical Power Meter ML9001A",5,null,null,"X"]
["OM 0584","Abbe-Refraktometer B",5,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0586","Tektronix Oszilloskop THS720A",5,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OM 0605","Optical Spectrum Analyzer OSA "]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord",1,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2013 PM","index":32,"n_rows":119,"n_cols":17,"rows_kept":119,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2013"]
[null,null,null,"FM","PM","KPL","2013 FM",null,null,null,null,null,null,null,null,"Stand:","2013-11-27T17:10:57"]
[]
[null,null,null,"WPL 2013 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,null,null,null,null,null,null,null,null,null,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,"X",null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X","X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",2,null,null,null,null,"X","X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,"X","X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X","X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0028","Dicken-Messbrücke für 4\"-Wafer",2]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,"X","X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SO 0053","Thermo-Hygrograph NSII-Q",3,null,"X"]
["SO 0054","Thermo-Hygrograph NSII-Q",3,null,"X"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X","X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,"X","X"]
["MS 0066","Messschieber",1,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,null,"X","X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,"X",null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A",1,null,null,"X"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,"X","X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,"X","X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digitalmultimeter HP 3455 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0506","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000",2,null,null,null,null,"X"]
["SO 0523","Thermomechanische Analyse"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["EM 0579","Digitalmultimeter Voltcraft VC 920",2,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0605","Optical Spectrum Analyzer OSA "]
["MI 0607","Stereo Zoommikroskop SZ 61 TR",2,null,null,null,"X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord",1,null,null,null,null,null,null,null,null,"X"]

{"sheet":"WPL 2014 PM","index":33,"n_rows":120,"n_cols":17,"rows_kept":120,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2014"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2014-12-08T10:42:51"]
[]
[null,null,null,"WPL 2014 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät APC 300 A"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X","X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,"X","X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube Digital",1,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,"X","X"]
["OB 0051","Kalibriernormal „SINUS“"]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0063","Messmikroskop Leitz UWM SKI",2,null,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,"X"]
["MS 0066","Messschieber",1,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony",1,null,null,null,null,null,"X"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,"X","X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,"X","X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,null,"X","X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,"X",null,"X"]
["SO 0088","Strombox",1,"X",null,null,null,null,null,null,null,null,null,"X","X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,"X","X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,"X","X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,"X",null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digitalmultimeter HP 3455 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,null,null,null,"X"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2 ",2,null,null,null,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,"X",null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0605","Optical Spectrum Analyzer OSA "]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord"]

{"sheet":"WPL 2015 PM","index":34,"n_rows":130,"n_cols":17,"rows_kept":130,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2015"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2016-07-04T15:22:24"]
[]
[null,null,null,"WPL 2015 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät SOLAIR 3100",1,null,null,"X"]
["MI 0003","Rasterelektronenmikroskop JSM-6600",1,"X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,"X",null,null,null,null,"X",null,"X",null,null,null,null,"bis 30.06.15"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,null,null,"X","X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0007","Digitale Bügelmessschraube (100-200mm)",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["HO 0010","Höhenmessgerät MT 60 M",2,null,null,null,null,null,"X"]
["HO 0011","Höhenmessgerät SONY U 30",1,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["SO 0016","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["SO 0017","Thermohygrograph digital",3,null,null,null,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,"X","X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["SD 0026","Digital Bügelmessschraube",1,null,null,null,null,null,"X"]
["SO 0031","Thermohygrograph",3,null,null,null,null,null,null,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SD 0035","Bügelmessschraube Digital",1,null,null,null,null,null,"X"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0038","UV-Intensity Meter Model 1000 UV",5,null,null,null,null,null,null,null,"X",null,null,null,null,"bis 31.12.16"]
["MI 0039","3D-Koordinatenmessgerät Video-Check",1,null,null,null,null,"X"]
["SD 0047","Bügelmessschraube (75-100 mm)",1,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,"X","X"]
["SO 0050","Kalibriernormal „Ebenheit“  ",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis 31.5.15"]
["OB 0051","Kalibriernormal „SINUS“"]
["SO 0053","Thermo-Hygrograph NSII-Q",3]
["SO 0054","Thermo-Hygrograph NSII-Q",3]
["SD 0055","Digimatic Bügelmessschraube",1,null,null,null,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["MS 0060","Messschieber",1,null,null,null,null,null,null,null,null,"X"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,"X","X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,"X","X"]
["MS 0066","Messschieber",1,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony"]
["SD 0068","Bügelmessschraube (25-50 mm)",1,null,null,null,null,null,null,"X","X"]
["SD 0069","Bügelmessschraube (50-75 mm)",1,null,null,null,null,null,null,"X","X"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,"X",null,null,null,"X"]
["MS 0073","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0074","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0075","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0076","Digimatic Messschieber",1,null,null,null,"X"]
["MS 0077","Digimatic Messschieber",1,null,null,null,"X"]
["HO 0079","Höhenmessgerät CERTO CT 60 M",1,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A"]
["SD 0083","Bügelmessschraube (Bügeltiefe 100 mm)",1,null,null,null,null,null,null,"X","X"]
["SO 0088","Strombox",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,null,null,"X","X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,null,"X","X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,null,"X","X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,"X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["WA 0142","Analysenwaage Mettler Toledo ML54",1,null,null,null,null,null,null,"X"]
["WA 0143","Präzisionswaage Kern EG 220-3NM",1,null,null,null,null,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",2,null,null,null,null,null,"X","X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",1,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",1,null,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,"X",null,null,null,null,null,null,"X"]
["SD 0500","Bügelmessschraube (0-30 mm)",1,null,null,null,null,null,null,"X","X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0505","Digitalmultimeter HP 3455 A",1,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["SD 0529","Digital Mikrometerschraube",1,null,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["OM 0551","IR-Photodetektor",5,null,null,null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0555","IR-Photodetektor",5,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",5,null,null,null,"X"]
["MI 0607","Stereo Zoommikroskop SZ 61 TR",2,null,null,null,"X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord"]

{"sheet":"WPL 2016 PM","index":35,"n_rows":102,"n_cols":17,"rows_kept":102,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2016"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2016-07-21T11:12:52"]
[]
[null,null,null,"WPL 2016 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0001","Partikelzählgerät SOLAIR 3100+",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0002","Partikelmessgerät SOLAIR 3100",1,null,null,"X","X"]
["MI 0004","Rasterelektronenmikroskop SUPRA 60 ",1,null,null,null,null,null,null,null,null,null,null,null,"X"]
["OB 0005","Oberflächenmessgerät TENCOR P 2",1,null,null,null,null,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X","X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0013","Inspektionsmikroskop INM 20",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["MI 0015","Messmikroskop Leitz 3",1,null,null,null,null,null,"X"]
["HO 0018","Höhenmessgerät MT 60",1,null,null,null,null,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["MI 0024","Messmikroskop ERGOLUX 200",1,null,null,null,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X","X"]
["MI 0033","Stereomikroskop MZ6",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0034","Laser-Partikelmeßgerät Met One"]
["SO 0036","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0037","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["SO 0038","UV-Intensity Meter Model 1000 UV",5,null,null,null,null,null,null,null,null,null,null,null,"X","bis 31.12.16"]
["MI 0042","Kalibriernormal „JSM/SEM“",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis:  31.05.16"]
["OB 0044","Kalibriernormal „Rauheit“",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0049","Kalibriernormal „Temperatur“",1,null,null,null,null,null,null,null,"X"]
["OB 0051","Kalibriernormal „SINUS“"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["MP 0059","Montageplatz „Charakterisierung NIR“"]
["SO 0062","pH-Messgerät",1,null,null,null,null,null,null,"X"]
["MI 0063","Messmikroskop Leitz UWM SKI",2,null,null,null,null,null,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,null,"X"]
["SD 0067","Digital Mikrometerschraube M 30 Sony"]
["OB 0071","Tastschnittgerät DEKTAK V220-Si",1,null,null,null,null,null,null,null,"X"]
["OB 0080","Oberflächenmessgerät DEKTAK II A"]
["SO 0088","Strombox",1,"X",null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0089","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["EM 0090","Digital-Multimeter HP 34401A",1,null,null,null,null,"X"]
["EM 0091","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0092","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,null,null,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,"X","X"]
["SO 0123","Photo Ionisations Detektor (PID)"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["WA 0142","Analysenwaage Mettler Toledo ML54",1,null,null,"X"]
["WA 0143","Präzisionswaage Kern EG 220-3NM",1,null,null,"X"]
["SO 0146","pH-Messgerät \"pH-Meter-654\"",1,null,null,null,null,null,null,null,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["SO 0150","Pipetten \"Bio-SAW 2\"",null,null,null,null,null,null,null,null,"X"]
["SO 0151","Pipetten \"Bio-SAW 3\"",null,null,null,null,null,null,null,null,"X"]
["SO 0156","Digitalthermometer GTH 1200 A",5,null,null,null,null,null,null,null,null,null,null,null,"X"]
["EM 0158","Multimeter HP 3478 A",1,null,null,null,null,null,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["EM 0507","Tektronix TDS 430 A (Oszilloskop)",1,null,"X"]
["SO 0509","Gasflussmonitor bis 10 sccm"]
["SO 0511","Gasflussregler bis 10 sccm"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["SO 0517","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0518","Thermo-Hygrometer Testo 608-H2",1,null,null,null,null,null,null,null,null,null,null,"X"]
["SO 0522","Wärmestromkalorimeter DSC 204",2,null,null,null,null,null,null,"X"]
["SO 0521","Simultane Thermoanalyse PL STA 1000"]
["SO 0523","Thermomechanische Analyse"]
["SO 0524","Dynamic Stress Rheometer SR500"]
["HP 0525","Kleinlasthärteprüfgerät Leitz Miniload 2 ",2,null,null,null,null,null,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,"X",null,"X"]
["WA 0527","Waage Mettler MT5",1,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["SO 0533","Microtester",2,null,null,null,null,null,null,"X"]
["SO 0534","UV-VIS Spektrometer Lambda 2"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["SO 0577","Gasflussregler bis 1 sccm"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0587","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0588","Digital-Multimeter HP 34401A",1,null,null,null,null,null,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["SO 0591","pH-Mehrparametermessgerät Multi 340i"]
["SO 0592","Flächenwiderstandsmessgerät MR-1"]
["EM 0593","Digital-Multimeter Fluke 45",1,null,null,null,null,null,"X"]
["EM 0594","Digitalmultimeter HP 34401A",1,null,null,null,null,null,"X"]
["SO 0595","Gasflussregler bis 100 sccm"]
["SO 0598","Gasflussregler bis 200 sccm"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]
["SO 0612","UV-VIS Spektralphotometer Specord"]

{"sheet":"WPL 2017 PM","index":36,"n_rows":64,"n_cols":17,"rows_kept":64,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2017"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2016-07-07T13:53:05"]
[]
[null,null,null,"WPL 2017 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["SO 0002","Partikelmessgerät SOLAIR 3100",1,null,null,null,"X"]
["MI 0006","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["SD 0008","Schichtdickenmessgerät MPV-SP",1,null,null,null,null,null,"X"]
["MI 0009","Messmikroskop Leica DM RME",1,null,null,null,null,null,"X"]
["MI 0012","Inspektionsmikroskop Leitz Aristomet",1,null,null,null,null,null,"X"]
["MI 0014","Messmikroskop Metalloplan HL",1,null,null,null,null,null,"X"]
["WA 0019","Analysenwaage R 200 D",1,null,null,"X"]
["WA 0020","Analysenwaage AT 460",1,null,null,"X"]
["WA 0021","Präzisionswaage Precisa ES 4200C",1,null,null,"X"]
["WA 0022","Präzisionswaage U 4800 P-XD2",1,null,null,"X"]
["WA 0023","Analysenwaage A 120 S",1,null,null,"X"]
["WA 0025","Präzisionswaage 1507 B MP8-1",1,null,null,"X"]
["OM 0029","Lasersystem Toptica",5,null,"X"]
["MI 0032","Messmikroskop ERGOLUX",1,null,null,null,null,null,"X"]
["HO 0040","Kalibriernormal „Endmaß“",5,null,null,"X"]
["WA 0057","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["SO 0064","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,null,"X"]
["SO 0065","Temperatur- u. Feuchte- Überw.syst.",1,null,null,null,null,null,null,"X"]
["MI 0072","Seitenwand-Inspektionsmikroskop",10,"X"]
["SO 0078","Universalprüfmaschine Instron 4505",3,null,null,null,"X"]
["MI 0093","Olympus Mikroskop BH-2",1,null,null,null,"X"]
["MI 0094","Messmikroskop Ergoplan",1,null,null,null,null,null,"X"]
["WA 0141","Analysenwaage Masterpro LA120S",1,null,null,"X"]
["WA 0142","Analysenwaage Mettler Toledo ML54",1,null,null,"X"]
["WA 0143","Präzisionswaage Kern EG 220-3NM",1,null,null,"X"]
["SO 0147","Kalibriernormal \"Puffer-Lösung\"",2,"X"]
["WA 0148","Analysenwaage Sartorius A200S",1,null,null,"X"]
["WA 0149","Mikrowaage Sartorius M2P",1,null,null,"X"]
["OM 0502","Nahfeldmesssystem",5,null,null,"X"]
["MI 0503","Stereomikroskop M650",1,null,"X"]
["MI 0504","Stereomikroskop M3Z ",1,null,"X"]
["WA 0516","Mettler AE240 Waage ",1,null,null,"X"]
["HO 0526","Höhentaster MT 60M",1,null,null,null,null,null,"X"]
["WA 0528","Waage Mettler AG245",1,null,null,"X"]
["WA 0531","Laborwaage LC 220S",1,null,null,"X"]
["MI 0532","Messmikroskop ARISTOMET ",1,null,null,null,null,null,"X"]
["OM 0539","Lightwave Multimeter HP8163A",5,null,null,"X"]
["OM 0540","Reflektometer HP 8504B",5,"X"]
["OM 0541","Wellenlängenmessgerät HP86120B",5,null,"X"]
["OM 0546","Lightwave Multimeter HP 8153A",5,"X"]
["OM 0549","Rifocs Optisches Messsystem",5,"X"]
["EM 0552","Spektrum Analyzer Modell E4403B",5,null,"X"]
["MI 0554","Inspektionsmikroskop LEITZ Aristomet",1,null,null,null,null,null,"X"]
["OM 0561","Polarization Controller Agilent 11896A",5,"X"]
["WA 0570","Präzisionswaage 1413 MP8-1",1,null,null,"X"]
["WA 0571","Waage Kern 510-33",1,null,null,"X"]
["WA 0574","Präzisionswaage U 5000D",1,null,null,"X"]
["EM 0578","Digital-Multimeter M-4660A",2,"X"]
["OM 0580","Optical Power Meter ML9001A",5,null,null,"X"]
["OM 0584","Abbe-Refraktometer B",5,null,"X"]
["WA 0585","Analysenwaage 1801 MP8",1,null,null,"X"]
["EM 0586","Tektronix Oszilloskop THS720A",5,"X"]
["WA 0589","Präzisionswaage Scaltec",1,null,null,"X"]
["MI 0607","Stereo Zoommikroskop SZ 61 TR",2,null,null,null,"X"]
["WA 0608","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0609","Analysenwaage ED224S",1,null,null,"X"]
["WA 0610","Präzisionswaage ED5201-CW",1,null,null,"X"]
["WA 0611","Präzisionswaage Kern PLJ 3100-2F",1,null,null,"X"]

{"sheet":"WPL 2018 PM","index":37,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2018"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:56:11"]
[]
[null,null,null,"WPL 2018 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2019 PM","index":38,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2019"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 2019 Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2020 PM","index":39,"n_rows":14,"n_cols":17,"rows_kept":14,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2020"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
[]
[]
[]
[]
["SO 0050","Kalibriernormal „Ebenheit“  ",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis 31.5.20"]
["OM 0551","IR-Photodetektor",5,null,null,null,"X"]
["OM 0555","IR-Photodetektor",5,null,null,null,"X"]
["OM 0599","Powermeter 8164B/Tuneable Laser 81680",5,null,null,null,"X"]

{"sheet":"WPL 2021 PM","index":40,"n_rows":7,"n_cols":17,"rows_kept":7,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2021"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]
[]
["MI 0042","Kalibriernormal „JSM/SEM“",5,null,null,null,null,"X",null,null,null,null,null,null,null,"bis:  31.05.21"]

{"sheet":"WPL 2022 PM","index":41,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2022"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2023 PM","index":42,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2023"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2024 PM","index":43,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2024"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2025 PM","index":44,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2025"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2026 PM","index":45,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2026"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2027 PM","index":46,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2027"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2028 PM","index":47,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2028"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2029 PM","index":48,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2029"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 2030 PM","index":49,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 2030"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 20XX PM","index":50,"n_rows":5,"n_cols":17,"rows_kept":5,"cut":false,"hidden":false,"merged":[[3,3,3,15]]}
[null,null,null,"Wartungsplan Prüfmittel 20XX"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2010-05-07T08:52:29"]
[]
[null,null,null,"WPL 20XX Prüfmittel (PM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe"]

{"sheet":"WPL 20XX FM","index":51,"n_rows":110,"n_cols":17,"rows_kept":110,"cut":false,"hidden":false,"merged":[[3,0,3,1],[3,3,3,15]]}
[null,null,null,"Wartungsplan Fertigungsmittel 20XX"]
[null,null,null,"FM","PM","KPL",null,null,null,null,null,null,null,null,null,"Stand:","2012-07-20T11:05:47"]
[]
[null,null,null,"WPL 20XX Fertigungsmittel (FM)"]
["PM/FM-Nr.","Prüfmittel-/Fertigungsmittelname","W-Interv. (Jahr)","Jan","Febr","März","April","Mai","Juni","Juli","Aug","Sep","Okt","Nov","Dez","Sonder-freigabe","Qutlook-Aufgaben"]
["AE 0201","Oxidationsanlage",1]
["AE 0202","Oxidationsanlage",1]
["GA 0203","Kupfergalvanikbad",1]
["SA 0204","Magnetron Sputteranlage Z 700 P 1",1]
["BD 0205","Bedampfungsanlage Univex 450",1]
["AE 0206","Hamatech-Entwickler",1]
["HD 0207","Hamatech-Reiniger (Maskenreiniger)",1]
["OF 0211","Umluftofen UT 6050 LAF",1]
["OF 0214","HMDS-Ofen Star-2000",1]
["AE 0219","Entwickleranlage, CEP 8 Standard",1]
["GA 0220","Goldgalvanikbad",1]
["AE 0221","Planarätzer P300",1]
["AE 0222","Plasmaätzer 300E",1]
["AE 0223","Spin Processor (Entwickler)",1]
["BS 0224","Belichtungsgerät LH5",1]
["BS 0225","Belichtungsgerät MA6",1]
["AE 0226","RIE-Anlage, Plasmalab 80 Plus",1]
["BE 0229","Läppmaschine Myläpp",2]
["BE 0230","Läppmaschine Myläpp",2]
["BE 0231","ULTRA-Fräse Polycut E",1]
["BE 0232","ULTRA-Fräse Polycut E SP 2600",1]
["SL 0233","Ultraschallreinigungsgerät",2]
["SL 0234","Ultraschallreinigungsgerät",1]
["OF 0235","Vakuumofen Vacutherm",1]
["OF 0236","Vakuumofen Vacutherm",1]
["OF 0237","Umluftofen UT 5050 EK-LAF",1]
["BS 0238","Laserbeschriftungsgerät",1]
["GA 0240","Galvanikbad HEGA I     - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0241","Galvanikbad HEGA III   - Anlage\n                                  - Galvanikbad","1\n½"]
["GA 0242","Galvanikbad HEGA VI  - Anlage\n                                  - Galvanikbad","1\n½"]
["OF 0244","Vakuumofen Vacutherm",1]
["BE 0246","Mitsubishi Drahterodiermaschine\nDWC 90 SZ AE","½ "]
["BE 0247","Poliermaschine Safir 355",1]
["PR 0248","Weberpresse PW 10",1]
["BS 0249","Elektronenstrahlschreiber VB6",1]
["PR 0250","Abformanlage (WUM2+WUM3)",1]
["SA 0251","Sputteranlage MED-010",1]
["SL 0252","Nassprozessanlage",1]
["SL 0253","Ultraschallreinigungsgerät",1]
["TS 0254","Wafersäge Micro-Ace 3S3",1]
["BS 0255","Laseranlage LAY 75 K",1]
["VS 0256","Heißsiegelbonder",1]
["TS 0257","Mutronic-Säge",1]
["VS 0258","Verklebeapparatur",1]
["OF 0259","Trockenofen ED-115",1]
["GA 0260","Goldgalvanikbad",1]
["OF 0261","Klimaschrank Hygros 15",1]
["SG 0262","Niederspannungsgerät",1]
["SG 0263","Niederspannungsgerät",1]
["SG 0264","Niederspannungsgerät",1]
["SG 0265","Niederspannungsgerät",1]
["SG0266","Niederspannungsgerät",1]
["SG 0267","Niederspannungsgerät",1]
["SG 0268","Präzisionsstromgeber",1]
["SG 0269","Präzisionsstromgeber",1]
["SG 0270","Präzisionsstromgeber",1]
["SG 0271","Präzisionsstromgeber",1]
["SG 0272","Präzisionsstromgeber",1]
["SG 0273","Präzisionsstromgeber",1]
["SG 0274","Präzisionsstromgeber",1]
["RS 0275","Resistklebeplatz",1]
["RS 0276","Resistklebeplatz",1]
["RS 0277","Resistklebeplatz",1]
["RS 0278","Resistklebeplatz",1]
["SG 0280","Niederspannungsgerät",1]
["SG 0281","Niederspannungsgerät",1]
["SG 0282","Niederspannungsgerät",1]
["SG 0283","Niederspannungsgerät",1]
["SG 0284","Präzisionsstromgeber",1]
["SG 0285","Präzisionsstromgeber",1]
["BS 0286","Jenoptik-Röntgenscanner",1]
["BS 0287","Jenoptik-Röntgenscanner",1]
["RS 0295","Resistklebeplatz",1]
["RS 0296","Resistklebeplatz",1]
["RS 0297","Resistklebeplatz",1]
["OF 0298","Trockenofen ",1]
["RS 0299","Spincoater RC8 Gyrset",1]
["SG 0301","Präzisionsstromgeber",1]
["OF 0302","Vakuum-/Inertgasofen VT 6060 P-500",1]
["OF 0306","Umluftofen UT 5050 LAF",1]
["OF 0307","Vakuumofen VT 6060 M",1]
["SL 0309","Megaschallgeber",1]
["AE 0310","Prozessor HMP 900 (Entwickler)",1]
["AE 0311","4-TEC Planarätzer",1]
["HD 0312","Maskenreiniger HMR 900",1]
["PR 0801","Abformanlage WUM1",1]
["OF 0802","Umluftofen LUT 5050 EK",1]
["OF 0803","Umluftofen",1]
["OF 0804","Trockenofen Memmert 500",1]
["OF 0805","Trockenofen Memmert 100",1]
["OF 0806","Versuchsstand „Tempern“",1]
["VS 0808","Verklebeapparatur",1]
["PR 0809","Heißprägemaschine Vickert",1]
["VS 0811","Ultraschallbad",1]
["OF 0812","Hotplate",1]
["VS 0813","Wedge-Wedge Bonder 7400A",1]
["BS 0815","UV-Härtelampe DeloLux",1]
["BS 0816","UV-Härtelampe DeloLux",1]
["VS 0817","Dosierautomat",1]
["SA 0818","Sputteranlage UNIVEX 500",1]
["OF 0819","Vakuum-Trockenofen",1]
["OF 0820","Umluftofen M",1]
["PR 0821","Abformanlage HEX 3",1]
["BS 0822","UV-Härtelampe DeloLux 04",1]
["OF 0825","Vakuumofen",1]