Kleberoboter/English: Difference between revisions
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[[File:<File name>|<Display width in pixel>|thumb|right|<Figure caption>]] |
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[[file:Reinraum_Sicherheit_001.jpg|250px|thumb|right|< Gluing Robot >]] |
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'''Position:''' |
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'''Position:''' building 307, room 132c |
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'''Specifiaction number:''' |
'''Specifiaction number:''' |
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== Short Description == |
== Short Description == |
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The Gluing Robot is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and it can be used to stick PMMA-resist foils onto wafers and insert moulds. |
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For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA). |
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(work instruction: AA665) |
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== Alternatives == |
== Alternatives == |
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Are there other devices at IMT with the same or a similar application? Please name them and their differences or similarities, and link them here. YOu can find the correct link name in the [[Prüfmittel_Liste_-_List_of_Measurement_Devices| list of measurement devices]] or in the [[Liste der Fertigungsmittel - List of Manufacturing Equipment| list of fabrication devices]]. |
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== Device Specifications == |
== Device Specifications == |
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(Additional) equipment and functions, e.g. process gasses, wavelengths, resolution, smallest achievable feature size |
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The process gas is argon. |
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(Zusätzliche) Ausstattung und Funktionen, z.B. Prozessgase, Wellenlängen, Auflösung, Strukturdimensionen |
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Nitrogen is required to operate the robot. |
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The robot is programmed by the software JR Points version 4.6. |
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operating range: 400 x 400 x 150 mm |
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== Established Processes == |
== Established Processes == |
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Which processes have been compelted successfully with this device, what materials have been structured, testet or processed? |
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Standard successfully processes are: |
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Please don't enter any process parameters and sensible details into the wiki, but add the path to J: network drive where the detaisl are described or link a user who knows about the process. |
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gluing PMMA-foils on: |
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* 4", 6" - silicon wafers |
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* 4" - ceramics wafers |
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* 4" - glass wafers |
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The foils can have a thickness of 100 µm to 3 mm. |
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The usual foil sizes are: |
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* 75 x 30 mm² |
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* 63 x 23 mm² |
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* round foils with flat/ without flat and a diameter of 80 mm² |
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* the smallest possible foil which you can glue on has a size of 59 x 19 mm² |
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== Restrictions == |
== Restrictions == |
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What can not and/or should not be done with the device, i.e. are there materials that could impair the performance of the device if they are structured with, e.g. nickel inside the RIE? Are there other precautions that have to be taken for sample preparation? |
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The robot is used exclusively for the PMMA adhesive mixture. |
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== Instructed Users == |
== Instructed Users == |
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Persons who have recieved an instruction and thus are allowed to operate the device. |
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* [[User:Birgit.Huebner | Hübner, Birgit]] |
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Please create a list and link them to the user profiles: |
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* [[Benutzer:Vorname.Nachname | Nachname, Vorname]] |
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* [[User:Julia.Wolf | Wolf, Julia]] |
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Latest revision as of 19:47, 20 November 2016
Device name: Gluing Robot
Operator/Responsible for this device: Birgit Hübner
Position: building 307, room 132c
Device designation: VS 0829
Specifiaction number:
Short Description
The Gluing Robot is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and it can be used to stick PMMA-resist foils onto wafers and insert moulds.
For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA).
(work instruction: AA665)
Alternatives
Device Specifications
The process gas is argon.
Nitrogen is required to operate the robot.
The robot is programmed by the software JR Points version 4.6.
operating range: 400 x 400 x 150 mm
Established Processes
Standard successfully processes are:
gluing PMMA-foils on:
- 4", 6" - silicon wafers
- 4" - ceramics wafers
- 4" - glass wafers
The foils can have a thickness of 100 µm to 3 mm.
The usual foil sizes are:
- 75 x 30 mm²
- 63 x 23 mm²
- round foils with flat/ without flat and a diameter of 80 mm²
- the smallest possible foil which you can glue on has a size of 59 x 19 mm²
Restrictions
The robot is used exclusively for the PMMA adhesive mixture.
