Kleberoboter/English: Difference between revisions
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[[File:<File name>|<Display width in pixel>|thumb|right|<Figure caption>]] |
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[[file:Reinraum_Sicherheit_001.jpg|250px|thumb|right|< Gluing Robot >]] |
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'''Device name:''' |
'''Device name:''' Gluing Robot |
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'''Operator/Responsible for this device:''' Birgit Hübner |
'''Operator/Responsible for this device:''' Birgit Hübner |
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== Short Description == |
== Short Description == |
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The |
The Gluing Robot is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and it can be used to stick PMMA-resist foils onto wafers and insert moulds. |
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For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA). |
For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA). |
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The process gas is argon. |
The process gas is argon. |
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Nitrogen is required to operate the robot. |
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The robot |
The robot is programmed by the software JR Points version 4.6. |
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operating range: 400 x 400 x 150 mm |
operating range: 400 x 400 x 150 mm |
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== Established Processes == |
== Established Processes == |
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The usual sizes |
The usual foil sizes are: |
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* 75 x 30 mm² |
* 75 x 30 mm² |
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== Restrictions == |
== Restrictions == |
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The robot |
The robot is used exclusively for the PMMA adhesive mixture. |
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== Instructed Users == |
== Instructed Users == |
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* [[ |
* [[User:Birgit.Huebner | Hübner, Birgit]] |
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* [[ |
* [[User:Julia.Wolf | Wolf, Julia]] |
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Latest revision as of 19:47, 20 November 2016
Device name: Gluing Robot
Operator/Responsible for this device: Birgit Hübner
Position: building 307, room 132c
Device designation: VS 0829
Specifiaction number:
Short Description
The Gluing Robot is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and it can be used to stick PMMA-resist foils onto wafers and insert moulds.
For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA).
(work instruction: AA665)
Alternatives
Device Specifications
The process gas is argon.
Nitrogen is required to operate the robot.
The robot is programmed by the software JR Points version 4.6.
operating range: 400 x 400 x 150 mm
Established Processes
Standard successfully processes are:
gluing PMMA-foils on:
- 4", 6" - silicon wafers
- 4" - ceramics wafers
- 4" - glass wafers
The foils can have a thickness of 100 µm to 3 mm.
The usual foil sizes are:
- 75 x 30 mm²
- 63 x 23 mm²
- round foils with flat/ without flat and a diameter of 80 mm²
- the smallest possible foil which you can glue on has a size of 59 x 19 mm²
Restrictions
The robot is used exclusively for the PMMA adhesive mixture.
