Reinraum - Cleanroom/english: Difference between revisions
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'''Clean Rooms at IMT''' |
'''Clean Rooms at IMT''' |
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The IMT possesses ca. 500 m² of class ISO 7 (DIN EN ISO 14644) clean rooms. These rooms are under the supervision of the [[Mikrofertigung (MF)|Microfabrication (MF)]] Department. Devices in the clean rooms include the Electron Beam lithography and UV lithography facilities such as Direct Laser Writing, an EVG mask aligner and two [[Nanoscribe_3_D_Laserlithographie-System|NANOSCRIBE]] devices, as well as the surrounding infrastructure like Spin-Coater, Developer and Plasma Etching facilities. |
The IMT possesses ca. 500 m² of class ISO 7 (DIN EN ISO 14644) clean rooms. These rooms are under the supervision of the [[Mikrofertigung (MF)|Microfabrication (MF)]] Department. Devices in the clean rooms include the Electron Beam lithography and UV lithography facilities such as Direct Laser Writing, an [[EVG_620_Double_Side_Mask_Aligner|EVG mask aligner]] and two [[Nanoscribe_3_D_Laserlithographie-System|NANOSCRIBE]] devices, as well as the surrounding infrastructure like Spin-Coater, Developer and Plasma Etching facilities. |
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Independent work in the clean room can only be done with permission from MF. The rules of working instruction AA505.xx apply. Employees with a general safety instruction may enter the clean room accompanied by or under the supervision of an employee with entrance permit and use the facilities therein or do other things like SEM inspections or easy measurement tasks. Anyone planning extensive independent work in the clean room has to request permission from the group leader of Manufacturing Execution using form FB516.xx. In this form you need to write down the reasons for independant working, the estimated weekly working time and it must be signed by your leader of department. Employees with up to 3 month at IMT, are normally not allowed, others need at least 4 weeks of practice under supervision. |
Independent work in the clean room can only be done with permission from MF. The rules of working instruction AA505.xx apply. Employees with a general safety instruction may enter the clean room accompanied by or under the supervision of an employee with entrance permit and use the facilities therein or do other things like SEM inspections or easy measurement tasks. Anyone planning extensive independent work in the clean room has to request permission from the group leader of Manufacturing Execution using form FB516.xx. In this form you need to write down the reasons for independant working, the estimated weekly working time and it must be signed by your leader of department. Employees with up to 3 month at IMT, are normally not allowed, others need at least 4 weeks of practice under supervision. |
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Revision as of 12:29, 2 July 2013
Clean Rooms at IMT
The IMT possesses ca. 500 m² of class ISO 7 (DIN EN ISO 14644) clean rooms. These rooms are under the supervision of the Microfabrication (MF) Department. Devices in the clean rooms include the Electron Beam lithography and UV lithography facilities such as Direct Laser Writing, an EVG mask aligner and two NANOSCRIBE devices, as well as the surrounding infrastructure like Spin-Coater, Developer and Plasma Etching facilities.
Independent work in the clean room can only be done with permission from MF. The rules of working instruction AA505.xx apply. Employees with a general safety instruction may enter the clean room accompanied by or under the supervision of an employee with entrance permit and use the facilities therein or do other things like SEM inspections or easy measurement tasks. Anyone planning extensive independent work in the clean room has to request permission from the group leader of Manufacturing Execution using form FB516.xx. In this form you need to write down the reasons for independant working, the estimated weekly working time and it must be signed by your leader of department. Employees with up to 3 month at IMT, are normally not allowed, others need at least 4 weeks of practice under supervision.
