Kleberoboter/English

< Gluing Robot >

Device name: Gluing Robot

Operator/Responsible for this device: Birgit Hübner

Position: building 307, room 132c

Device designation: VS 0829

Specifiaction number:

Short Description

The Gluing Robot is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and it can be used to stick PMMA-resist foils onto wafers and insert moulds.

For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA).

(work instruction: AA665)

Device Specifications

The process gas is argon.

Nitrogen is required to operate the robot.

The robot is programmed by the software JR Points version 4.6.

operating range: 400 x 400 x 150 mm

Established Processes

Standard successfully processes are:

gluing PMMA-foils on:

• 4", 6" - silicon wafers

• 4" - ceramics wafers

• 4" - glass wafers

The foils can have a thickness of 100 µm to 3 mm.

The usual foil sizes are:

• 75 x 30 mm²

• 63 x 23 mm²

• round foils with flat/ without flat and a diameter of 80 mm²

• the smallest possible foil which you can glue on has a size of 59 x 19 mm²

Restrictions

The robot is used exclusively for the PMMA adhesive mixture.

Instructed Users

• Hübner, Birgit

• Wolf, Julia