Kleberoboter/English: Difference between revisions
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[[File:<File name>|<Display width in pixel>|thumb|right|<Figure caption>]] |
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[[Datei:Reinraum_Sicherheit_001.jpg|250px|thumb|right|< robot for gluing >]] |
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'''Device name:''' robot for |
'''Device name:''' robot for gluing |
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'''Operator/Responsible for this device:''' Birgit Hübner |
'''Operator/Responsible for this device:''' Birgit Hübner |
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== Short Description == |
== Short Description == |
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The robot for |
The robot for gluing is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and you can use it for sticking on PMMA-resist foils on wafers and insert moulds. |
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For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA). |
For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA). |
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Revision as of 08:30, 19 July 2013
250px|thumb|right|< robot for gluing >
Device name: robot for gluing
Operator/Responsible for this device: Birgit Hübner
Position: building 307, room 132c
Device designation: VS 0829
Specifiaction number:
Short Description
The robot for gluing is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and you can use it for sticking on PMMA-resist foils on wafers and insert moulds.
For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA).
(work instruction: AA665)
Alternatives
Device Specifications
The process gas is argon.
You need nitrogen to operate the robot.
The robot will be programmed by the software JR Points version 4.6.
operating range: 400 x 400 x 150 mm
Established Processes
Standard successfully processes are:
gluing PMMA-foils on:
- 4", 6" - silicon wafers
- 4" - ceramics wafers
- 4" - glass wafers
The foils can have a thickness of 100 µm to 3 mm.
The usual sizes of foils are:
- 75 x 30 mm²
- 63 x 23 mm²
- round foils with flat/ without flat and a diameter of 80 mm²
- the smallest possible foil which you can glue on has a size of 59 x 19 mm²
Restrictions
The robot will be used exclusively for the adhesive mixture of PMMA.
