Kleberoboter/English
Device name: Gluing Robot
Operator/Responsible for this device: Birgit Hübner
Position: building 307, room 132c
Device designation: VS 0829
Specifiaction number:
Short Description
The Gluing Robot is a three-axis-table-robot (Janome JR 2400) of GLT-Pforzheim and it can be used to stick PMMA-resist foils onto wafers and insert moulds.
For this you use a glue of 4 components (PMMA-solution, BPO, MEMO and DMA).
(work instruction: AA665)
Alternatives
Device Specifications
The process gas is argon.
Nitrogen is required to operate the robot.
The robot is programmed by the software JR Points version 4.6.
operating range: 400 x 400 x 150 mm
Established Processes
Standard successfully processes are:
gluing PMMA-foils on:
- 4", 6" - silicon wafers
- 4" - ceramics wafers
- 4" - glass wafers
The foils can have a thickness of 100 µm to 3 mm.
The usual foil sizes are:
- 75 x 30 mm²
- 63 x 23 mm²
- round foils with flat/ without flat and a diameter of 80 mm²
- the smallest possible foil which you can glue on has a size of 59 x 19 mm²
Restrictions
The robot is used exclusively for the PMMA adhesive mixture.
