Mr-X/English

Type

mr-X (formerly: mr-L) is a negative tone resist. It was developped by micro resist technology, based on SU-8, and is particularly suited for high aspect ratio structures fabricated by deep X-Ray lithography.

Properties

- e.g. chemical composition, in what form do you buy it at which prize etc.

At IMT

Availability

• mr-X10: Layers up to ca. 40 µm
• mr-X50: Layers up to ca. 300 µm

Machines

• for application to substrates:
  • Spincoater
• for Lithography:
  • Litho 1
  • Litho 2
  • Litho 3
• Electroplating baths

Processes

• LIGA
  • X-Ray gratings
  • X-Ray lenses

Contact person

• Danays Kunka
• Frieder Koch
• Alexandra Karbacher
• Pascal Meyer
• Jan Meiser
• Felix Marschall
• Heike Fornasier

Alternatives

• SU-8