Oberflächenmessgerät TENCOR P 2

The purpose of these instructions is to give you a quick overview on how to work with the devices. To use the device please contact the responsible person to receive a proper introduction.

Device location: Resistlabor

Phone number: 22723

Lab responsible: Birgit Hübner

Principal users: Heike Fornasier, Margarita Zakharova, Abrar Faisal, etc

Access: the device is located in the end of Resist Lab, near the optical microscope.

Short Description

The Tencor P2 Long Scan Profiler is a computerized, high-sensitive surface profiler that measures step height and roughness in a variety of applications.

Start-up Procedure

1. Enable p2. Power should be on all the time! (If power is off: Press the Power Button: Turn AC power by pressing the Red Power switch to the on the position on Auxiliary Panel. The Operating system will boot up automatically.
2. Press “Enter” Key after Logo appears on the screen.

Mounting the Sample

1. Open the Measurement Area Door. Stage should be in front, measurement head including stylus up.(If not: Press the LOAD button on the Built-in Keyboard or the F7/LOAD-UNLOAD button on the Remote Keyboard.)
2. Place the sample on the stage.
3. Press the LOAD button (stage moves back).
4. Close the Measurement Area Door.

Lowering the Measurement Head Unit

1. Press the Zq button on the Built-in keyboard or press F5/ Zq button of the Remote Keyboard.
2. Press the [ ¯ ] button on both keyboards for Low speed head motion.
3. Press the SEL + [ ¯ ] button on the Built-in Keyboard and Space bar + [ ¯ ] button on the Remote Keyboard for High Speed Head motion. CAUTION: Do not lower the head onto the sample in high speed mode!

1. Lower Measurement Head unit till the stylus makes contact with surface of sample and release [ ¯ ] button.

Optical Zoom

Optical Zoom can be enable when sample has been loaded and measurement head is lowered and focus on sample.

1. Press the Zoom button on the Built-in Keyboard or the F11/ZOOM button on the Remote Keyboard.
2. Press the [ ¯ ] button to decrease magnification.
3. Press the [ ­ ] button to increase magnification.
4. Press the XY or Zq button for motion control.

Selecting a Scan Recipe

1. Press the MENU button on the Built-in Keyboard or the ESC/MENU button on the Remote Keyboard.
2. Select the Recipe Menu.
3. Select the Catalog. Press Enter.
4. Select the desired Recipe. Press Enter.

Unloading of Sample

1. Press LOAD, stylus moves up and stage moves forward.
2. Open the Measurement Area Door.
3. Remove sample from stage.
4. Close the Measurement Area Door