Reinraum - Cleanroom/english

Clean Rooms at IMT

The IMT possesses ca. 500 m² of class ISO 7 (DIN EN ISO 14644) clean rooms. These rooms are under the supervision of the Core Technologies (CTE) Department, represented by the group leader microtechnologies, Uwe Köhler. Devices in the clean rooms include the Electron Beam lithography and UV lithography facilities such as Direct Laser Writing, an EVG mask aligner and two NANOSCRIBE devices, as well as the surrounding infrastructure like Spin-Coater, Developer and Plasma Etching facilities.

For any work in the clean room, the rules of working instruction AA505.xx apply (see here also). Employees with a general safety instruction may enter the clean room accompanied by or under the supervision of an employee with entrance permit and use the facilities therein or do other things like SEM inspections or easy measurement tasks.

Anyone planning extensive independent work in the clean room has to request permission from CTE using form FB516.xx. In this form you need to describe the planned work and give the corresponding project number, state the estimated weekly working time, and have it signed by your leader of department. Employees with up to 3 month at IMT, are normally not allowed, others need at least 4 weeks of practice under supervision. After this period, your KIT card can be coded to open the doors to the clean room.

• Access with a personal ID-Card is only granted for intensive and regular work. Once a week is not enough. Organize your work flow!
• Candidates for personal access will have a kick-off meeting with the clean room team and their mentor or adviser, where an * instruction plan will be discussed and decided.
• Access with a personal ID-Card is a privilege! It is never permanent!
• There will be a user meeting every 3 month for an evaluation of your efforts and further necessity of a personal clean room access.
• Standard access to the clean room is reduced to 7 a.m. to 5 p.m. Other times must be applied for and need to be well founded.
• Every misbehavior reduces your admission in access or time.

But: access is always possible with an adviser, mentor or team member. You can also always instruct someone of the team by Laufkarte. If necessary a new kick-off meeting will be arranged and we discuss your cause and further actions. In case of severe misdoings your access will be totally canceled for a limited time.

Bereich	Mentor(en)
FuE1-BSS	Vüllers
FuE1-NM	Meissner
FuE1-SMD	Muslija
FuE2-BBM	von der Ecken
FuE2-PA	Kiss
FuE3-TN	Nees, Rupp, Hengsbach
FuE3-XOM	Karbacher, Börner
FuE4-3GP	Dottermusch
CTE	Köhler, Abaffy, Fornasier, Hübner, Matthis