User:Birgit.Huebner/English: Difference between revisions

Revision as of 10:33, 6 November 2013

Department: MF - Working Group Microfabrikation

Research Field: resist laboratory, laboratory for etching, ChemA

Bau: 310

Raum: 252

Telephone: 0721/608-22601

e-mail: mailto:birgit.huebner2@kit.edu

Substitute: Wolf, Julia

I'm an employee of the microfabrication and the substitute of Mrs Julia Wolf in the field of developing.

I'm a chemical loboratory assistant. Due to my part-time job, I'm only in the morning in the IMT.

@@ Line 27: / Line 27: @@
 === Devices ===
-* [[4TEC-Plasmaätzer]]
-* [[ANKA LIGA 1]]
+*[[Kleberoboter]]
-* [[ANKA LIGA 2]]
+*[[Sputteranlage UNIVEX 500]]
+*[[Oxidationsanlage]]
-* [[Hotplatebox (Horst)]]
+*[[Laserbeschriftungsgerät]]
-* [[Hotplate (OPTIhot SHT20)]]
+*[[Oberflächenmessgerät TENCOR P 2]]
-* [[Laserbeschriftungsgerät]]
+*[[Nassprozessanlage]]
-* [[RIE-Anlage, Plasmalab 80 Plus]]
+*[[Ultraschallreinigungsgerät: Sonorex]]
-* [[Rasterelektronenmikroskop JSM-6600]]
+*[[Messmikroskop Metalloplan HL]]
-* [[Spincoater Primus STT15]]
+*[[Höhentaster MT 60M]]
+*[[Analysenwaage AT 460]]
+*[[Vakuumofen Vacutherm]]
+*[[Vakuumofen VT 6060 P]]
+*[[Vakuum-Trockenschrank WTB Binder]]
+*[[Umluftofen UT 5050 EK-LAF]]
+*[[Umluftofen UT 5050]]
+*[[Zeit-Drucksteuergerät]]
 === Processes ===
@@ Line 41: / Line 49: @@
 === Software ===
-* JR Points (version 4.6 - Software for the robot for gluing)
+* JR Points (version 4.6 - Software for the robot of gluing)
+* AnalySIS
-*
+* MS Office
 === Materials ===
+* PMMA-foils
-* [[mr-L/mr-X|mr-X]]
+* Durimide
-* [[Silizium/Silicon|Silizium]]
-** [[4"-Wafer 525 µm]]
-** [[4"-Wafer 200 µm]]
-** [[4"-Wafer 100 µm]]
-* [[Titan/Titanium|Titanium]]
-** 50 µm foils
-* [[Thermo-Klebefolien - Thermal Release Tape|Thermal Release Tape]]
 == Further Tasks at IMT ==