User:Birgit.Huebner/English

Birgit Hübner

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Department: MF - Working Group Microfabrikation

Research Field: resist laboratory, laboratory for etching, ChemA

Bau: 310

Raum: 252

Telephone: 0721/608-22601

e-mail: mailto:birgit.huebner2@kit.edu

Substitute: Wolf, Julia

Job Description

I'm employee of the microfabrication and the substitute of Mrs Julia Wolf in the field of developing.

Expertise

I'm a chemical loboratory assistant.

Due to my part-time job, I'm only in the morning in the IMT.

Further Tasks at IMT

• ChemA - Administrator of the clean room area

Therefore everyone, who wants to bring chemicals into the clean room, has to contact me and to register his chemicals with the associated material safety data sheet.

Devices

• Kleberoboter
• Sputteranlage UNIVEX 500
• Oxidationsanlage
• Laserbeschriftungsgerät
• Oberflächenmessgerät TENCOR P 2
• Nassprozessanlage
• Ultraschallreinigungsgerät: Sonorex
• Messmikroskop Metalloplan HL
• Höhentaster MT 60M
• Analysenwaage AT 460
• Vakuumofen Vacutherm
• Vakuumofen VT 6060 P
• Vakuum-Trockenschrank WTB Binder
• Umluftofen UT 5050 EK-LAF
• Umluftofen UT 5050
• Zeit-Drucksteuergerät

Processes

• Direct-LIGA

Software

• JR Points (version 4.6 - Software for the robot of gluing)
• AnalySIS
• MS Office

Materials

• PMMA-foils
• Durimide

Further Tasks at IMT

• ChemA - Administrator of the clean room area