User:Birgit.Huebner/English

Birgit Hübner

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Department: MF - Working Group Microfabrikation

Research Field: resist laboratory, laboratory for etching, ChemA

Bau: 310

Raum: 252

Telephone: 0721/608-22601

e-mail: mailto:birgit.huebner2@kit.edu

Substitute: Wolf, Julia

Job Description

I'm an employee of the microfabrication and the substitute of Mrs Julia Wolf in the field of developing.

Expertise

I'm a chemical loboratory assistant. Due to my part-time job, I'm only in the morning in the IMT.

Devices

• Kleberoboter
• Sputteranlage UNIVEX 500
• Oxidationsanlage
• Laserbeschriftungsgerät
• Oberflächenmessgerät TENCOR P 2
• Nassprozessanlage
• Ultraschallreinigungsgerät: Sonorex
• Messmikroskop Metalloplan HL
• Höhentaster MT 60M
• Analysenwaage AT 460
• Vakuumofen Vacutherm
• Vakuumofen VT 6060 P
• Vakuum-Trockenschrank WTB Binder
• Umluftofen UT 5050 EK-LAF
• Umluftofen UT 5050
• Zeit-Drucksteuergerät

Processes

• Direct-LIGA

Software

• JR Points (version 4.6 - Software for the robot of gluing)
• AnalySIS
• MS Office

Materials

• PMMA-foils
• Durimide

Further Tasks at IMT

• ChemA - Administrator of the cleanroom area