User:Birgit.Huebner/English

Birgit Hübner

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Department: MF - Working Group Microfabrikation

Research Field: resist laboratory, laboratory for etching, ChemA

Bau: 310

Raum: 252

Telephone: 0721/608-22601

e-mail: mailto:birgit.huebner2@kit.edu

Substitute: Wolf, Julia

Job Description

I'm employee of the microfabrication and the substitute of Mrs Julia Wolf in the field of developing.

Further Tasks at IMT

• ChemA - Administrator of the clean room area (IMT-clean room)

Therefore everyone, who wants to bring chemicals into the clean room, has to contact me and to register his chemicals with the associated material safety data sheet.

Expertise

I'm a chemical loboratory assistant.

Due to my part-time job, I'm only in the morning at IMT.

• glue on resist foils (with the three-axis-table-robot, the thickness of foils can be 100 µm to 3 mm)
• resist casting on Invar-mask blancs and 4" wafers
• casting of mould inserts
• sputtering of carbon layers
• freeze drying with cyclohexane
• oxidation
• wet-chemical developing of irradiated resists (per pro.)
• wet-chemical etching with KOH and hydrofluoric acid (HF)
• gluing of fibre glass in V-ditches on Si-wafers
• organisation of the resist laboratory
• management of the ChemA for the clean room area

Devices

• Kleberoboter
• Sputteranlage UNIVEX 500
• Oxidationsanlage
• Laserbeschriftungsgerät
• Oberflächenmessgerät TENCOR P 2
• Nassprozessanlage
• Ultraschallreinigungsgerät: Sonorex
• Messmikroskop Metalloplan HL
• Höhentaster MT 60M
• Analysenwaage AT 460
• Vakuumofen Vacutherm
• Vakuumofen VT 6060 P
• Vakuum-Trockenschrank WTB Binder
• Umluftofen UT 5050 EK-LAF
• Umluftofen UT 5050
• Zeit-Drucksteuergerät

Processes

• gluing of resists
• sputtering of carbon layers
• freeze drying
• oxidation
• wet-chemical etching
• wet-chemical developing

Software

• JR Points (version 4.6 - Software for the robot of gluing)
• AnalySIS
• MS Office

Materials

• PMMA-foils
• Durimide