Historically, lithography is a method to print text or artwork onto e.g. paper by using a structured rigid plate. Several methods - which do not include engraving – exist to bring the structures onto the plate. Offset lithography is a still common form of printing technology.
Lithography in our context here means structuring materials on a fine scale below 10 µm (microlithography) or below 100 nm (nanolithography) using complex and mostly expensive equipment, particular chemicals and materials, electrons or light of different wave lengths and human expertise. The Institute of Microstructure Technology has been gaining expertise over many years in structuring diverse polymeric materials and selected metals down to the nanometer range.
Below you will find a survey of IMT’s capabilities in micro and nanolithography.