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Karlsruhe Institute of Technology
Campus North
Institute of Microstructure Technology
Hermann-von-Helmholtz-Platz 1
76344 Eggenstein-Leopoldshafen

building 301
(Head of Institute)

phone: +49 721 608-22740

e-mail: infoLtz5∂imt kit edu

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Map KIT Campus North
Map KIT Campus North

Map KIT Campus North (PDF, 960 KB)

Welcome to the Institute of Microstructure Technology (IMT)

IMT is a one-stop-shop for advanced micro and nano system development and upscaling. For every posed challenge, our skilled multidisciplinary teams develop novel technological and application-oriented solutions at forefront of the state-of-the-art. Our up-to-date technology platform is also accessible through the KNMF services. The in-house lithography capabilities range down to 6 nm lateral resolution, and is coupled with our extensive know-how in fabrication process development. Our talented young scientists cover a wide range of applications and technology platforms. We extensively educate M.Sc. and Ph.D. thesis students, and our alumni hold key positions at the top technology addresses.



Photograph of a bendable laser carbon test structure on Kapton (Photo: KIT).
Publication in npj|Flexible Electronics

Researchers from IMT and IFG (Institute of Functional Interfaces) developed carbon-based flexible urea sensors that can be rolled-up to fit inside a catheter for ”point-of-care” diagnostics (Photo: KIT).

Printed colored perovskite solar cells in the form of the KIT logo (Photo: IMT/KIT).
Photovoltaics – Versatile in Form and Color

Researchers and industrial partners develop printed perovskite solar modules for flexible use in buildings (Photo: IMT/KIT).

PD Dr. B. Rapp (Photo: M. Breig, KIT)
IMT Congratulates PD Dr. Bastian Rapp On His Professorship

Former IMT group leader PD Dr. B. Rapp has been appointed as professor of Process Technology at IMTEK of the University of Freiburg. He completed his academic education in Karlsruhe and received many scientific prices, including the important ERC Consolidator Grant (Photo: M. Breig, KIT).


International Bionic Award 2018  (Photo: VDI)
International Bionic Award 2018 for Bio-inspired Boost of Solar Cells

Junior scientists Siddique (Caltech), Donie (KIT), and Gomard (KIT) received the International Bionic Award for their work on disordered nanostructures which increase the efficiency of solar cells, OLEDS, and biosensors. Structures on the wings of the butterfly Pachliopta aristolochiae inspired this study (Photo: VDI).

IUVSTA-Elsevier Students Award for Sofia Toto

For her project within the EC-ITN MIGRATE, IMT PhD student Sofia Toto received the IUVSTA-Elsevier Student Award at the 15th European Vacuum Conference in Geneva (Switzerland).


Logo 3DMM2O
IMT Participates in Cluster of Excellence

Three Scientists from IMT are co-proposer and PI of the Cluster of Excellence “3D Matter Made to Order”. The cluster pursues a highly interdisciplinary approach combining natural and engineering sciences with the vision of ultimate digitisation of 3D manufacturing and material processing.

Scanning electron microscopy: 3D-printed optical waveguide connecting two silicon photonics chips. (Photo: DELPHI/KIT)
Innovation Award for Photonics Project

For his work in the DELPHI project (3D Laser Lithography for Photonic Integration), an IPQ/IMT team headed by Prof. Koos received the Second Prize of the “Berthold Leibinger Innovationspreis 2018” (Photo: DELPHI/KIT).
Award ceremony

Prof. Wolfgang Menz (Photo: KIT)
Congratulations to Prof. Menz!

Prof. Wolfgang Menz celebrated his 80th birthday. After 20 years in industry, in 1989 he became the first director of the IMT in Karlsruhe. In 1995 he changed to Freiburg as Founding Dean of today’s Technical Faculty of the University of Freiburg (Photo: KIT).

Picture of the awards ceremony, iCAN 18 competition in Hongkong (Photo: “heat_it”)
IMT course leads to the winning of iCAN 18 competition in Hongkong

“heat_it” is a group of four KIT students that made, during the IMT course “MEMS product design for young entrepreneurs”, an innovative product to reduce the itching after an insect bite. After winning the German COSIMA competition they could now also win the first prize at the international innovation competition iCAN 2018 in Hongkong (Photo: “heat_it”).

More about “heat_it”
Award ceremony