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Equipment and Facilities

Our research and development projects are supported by a large variety of manufacturing processes, test methods, and state-of-the-art equipment which are available on site. A substantial part of the devices and facilities are accommodated in our cleanrooms on a total area of approximately 600 m².

The complete equipment for manufacture of microstructures using the LIGA process is available on KIT Campus North: CAD, electron beam writer, synchrotron radiation source for deep X-ray lithography, and a large number of machines for hot embossing of microcomponents and thermoforming processes.

The technical infrastructure and the know-how of the employees at IMT are partially made available, cost-free, to external industrial and academic institutions through proposals to the KNMF (Karlsruhe Nano Micro Facility) high-tech platform.