Institute of Microstructure Technology (IMT)



  1. K.V. Poletkin, Z. Lu, A. Moazenzadeh, S.G. Mariappan, J.G. Korvink, U. Wallrabe, V. Badilita, “Polymer Magnetic Composite Core Boosts Performance of Three-Dimensional Micromachined Inductive Contactless Suspension”, IEEE Magn. Lett., Vol. 7 (2016), 1307604 (4pp). (PDF)
  2. R. Lausecker, V. Badilita, U. Gleißner, U. Wallrabe, “Introducing natural thermoplastic shellac to microfluidics: A green fabrication method for point-of-care devices”, Biomicrofluidics, 10, 044101 (2016). (PDF)
  3. N. Spengler, J. Höfflin, A. Moazenzadeh, D. Mager, N. MacKinnon, V. Badilita, U. Wallrabe, J.G. Korvink, “Heteronuclear Micro-Helmholtz Coil Facilitates μm-Range Spatial and Sub-Hz Spectral Resolution NMR of nL-Volume Samples on Customisable Microfluidic Chips”,  PLoS ONE 11(1): e0146384 (2016); doi:10.1371/ journal.pone.0146384. (PDF)
  4. K. Poletkin, Z. Lu, U. Wallrabe, V. Badilita, “A New Hybrid Micromachined Contactless Suspension With Linear and Angular Positioning and Adjustable Dynamics”, IEEE J Microelectromechanical Systems, Vol. 24, No. 5, Oct. 2015. (PDF)



  1. Z. Lu, Kirill Poletkin, B. den Hartogh, U. Wallrabe, V. Badilita, “3D micro-machined inductive contactless suspension: Testing and modeling”, Sensors Actuators A 220 (2014) 134–143. (PDF)
  2. A. Moazenzadeh, F.S. Sandoval, N. Spengler, V. Badilita, U. Wallrabe, “3-D Microtransformers for DC–DC On-Chip Power Conversion”, IEEE Trans. Power Electronics, Vol. 30, No 9, Sept. 2015. (PDF)
  3. Z. Lu, K. Poletkin, U. Wallrabe, V. Badilita, “Performance Characterization of Micromachined Inductive Suspensions Based on 3D Wire-Bonded Microcoils”, Micromachines 2014, 5, 1469-1484; doi:10.3390/mi5041469.
  4. R.Ch. Meier, J. Höfflin, V. Badilita, U. Wallrabe, J.G Korvink, “Microfluidic integration of wirebonded microcoils for on-chip applications in nuclear magnetic resonance”, J. Micromech. Microeng. 24 (2014) 045021 (12pp). (PDF)
  5. N. Spengler, A. Moazenzadeh, R.Ch. Meier, V. Badilita, J.G. Korvink, and U. Wallrabe, “Micro-fabricated Helmholtz coil featuring disposable microfluidic sample inserts for applications in nuclear magnetic resonance”, J. Micromech. Microeng., 2014, 24, 034004 (10pp). (PDF)
  6. V. Badilita, R.Ch. Meier, N. Spengler, U. Wallrabe, M. Utz, J.G. Korvink, “Microscale nuclear magnetic resonance: a tool for soft matter research”, Soft Matter, 2012, 8, 10583. (PDF)
  7. V. Badilita, B. Fassbender, K. Kratt, A. Wong, C. Bonhomme, D. Sakellariou, J.G. Korvink, U. Wallrabe (2012) “Microfabricated Inserts for Magic Angle Coil Spinning (MACS) Wireless NMR Spectroscopy”, PLoS ONE 7(8): e42848. doi:10.1371/journal.pone.0042848. (PDF)
  8. O.G. Gruschke, N. Baxan, L. Clad, K. Kratt, D. von Elverfeldt, A. Peter, J. Hennig, V. Badilita, U. Wallrabe and J.G. Korvink, “Lab on a chip phased-array MR multi-platform analysis system”, Lab Chip, 2012, 12, 495. (PDF)
  9. R.Ch. Meier, V. Badilita, J. Brunne, U. Wallrabe, and J.G Korvink, “Complex three-dimensional high aspect ratio microfluidic network manufactured in combined PerMX dry-resist and SU-8 technology”, Biomicrofluidics, 2011, 5, 034111. (PDF)
  10. S. Waselikowski, K. Kratt, V. Badilita, U. Wallrabe, J.G. Korvink, and M. Walther, “Three-dimensional microcoils as terahertz metamaterial with electric and magnetic response”, Appl. Phys. Lett., 2010, 97, 261105. (PDF)
  11. M. Mohmmadzadeh, N. Baxan, V. Badilita, K. Kratt, H. Weber, J.G. Korvink, U. Wallrabe, J. Hennig, and D. von Elverfeldt, “Characterization of a 3D MEMS fabricated micro-solenoid at 9.4 T”, J. Magn. Res., 2011, 208, 20–26. (PDF)
  12. V. Badilita, K. Kratt, N. Baxan, M. Mohmmadzadeh, T. Burger, H. Weber, D. v. Elverfeldt, J. Hennig, J.G. Korvink, and U. Wallrabe, On-chip three dimensional microcoils for MRI at the microscale, Lab Chip, 2010, 10, 1387–1390. (PDF)
  13. K. Kratt, V. Badilita, T. Burger, J. Mohr, M. Börner, J.G. Korvink, and U. Wallrabe, “High aspect ratio PMMA posts and characterization method for micro coils manufactured with an automatic wire bonder”, Sensors Actuators A, 2009, 156, 328–333. (PDF)