Institute of Microstructure Technology (IMT)

Literature

Books

  1. M. Kohl, Shape memory microactuators, Springer book series on Microtechnology and MEMS, Springer-Verlag Berlin Heidelberg, 2004.
    https://www.springer.com/us/book/9783540206354
  2. M. Kohl (Editor), Shape Memory Materials for Smart Systems, Int. Journal of Applied Electromagnetics and Mechanics, Special Issue on E-MRS Fall Meeting 2005, Volumes 23(1) and (2), 2006.
  3. M. Kohl, V.A. Chernenko, S. Besseghini (Editors), Shape Memory Materials for Smart Systems, The European Physical Journal Special Topics, Special Issue on E-MRS Fall Meeting 2007, Volume 158, EDP Sciences, Springer-Verlag, Heidelberg 2008.
    https://link.springer.com/journal/11734/158/1/page/1
  4. M. Kohl, Shape memory microvalves, in: Thin Film Shape memory Alloys, S. Miyazaki, Y.Q. Fu and W.M. Huang Eds., Cambridge University Press, 2009.
    https://assets.cambridge.org/97805218/85768/frontmatter/9780521885768_frontmatter.pdf
  5. M. Kohl, V.A. Chernenko (Editors), Shape Memory Materials for Smart Systems III, Physics Procedia, Special Issue on E-MRS Spring Meeting 2010, Volume 10, Elsevier Ltd, 2010.
    https://www.sciencedirect.com/science/journal/18753892/10
  6. D. Salazar-Jaramillo, J.M. Barandiaran, M. Kohl, et al., Lightweight multifunctional materials based on magnetic shape memory alloys, In: Advanced Lightweight Multifunctional Materials. Chapter 6, pp. 187-238; Eds. P. Costa, C.M. Costa, S. Lanceros-Mendez. ELSEVIER. 2020.
    Book-Advanced_Lightweight_Multifunctional_Materials.pdf
  7. M. Kohl, L. Seigner, J. Joseph, Energy Harvesting using Magnetic Shape Memory Alloys, Reference Module in Materials Science and Materials Engineering, 2020.
    Online Publication: https://doi.org/10.1016/B978-0-12-815732-9.00040-1.

Patents

K.D. Skrobanek, M. Kohl, E. Quandt, Verfahren zur Herstellung eines Bauteils, das eine Funktionsschicht enthält,
(Technology for fabrication of a device containing a functional layer)
DE 198 21 841, EP 0957509 A2

M. Kohl, T. Takagi, M. Ohtsuka, K. Yamauchi, Aktor für einen optisch-mechanischen Scanner sowie Verfahren unter Verwendung des Aktors,
(Actuator for an opto-mechanical scanner and technology for using the actuator)
DE 102 136 71; US 7,142,341

M. Kohl, Y. Liu, A. Durand, Verfahren zur Mikrostrukturierung von Pd-haltigen Funktionsschichten,
(Technology for micromachining of Pd-containing functional layers)
DE 10 321 590

M. Kohl, T. Grund, Verfahren zum stoffschlüssigen Verbinden von mikrostrukturierten Komponenten aus Kunststoff mittels Ultraschall,
(Technology for joint bonding of micromechanical components of polymer using ultrasound)
DE 10 2008 003 062A1

F. Khelfaoui, J. Buschbeck, S. Fähler, M. Kohl, O. Heczko, Verfahren zur Herstellung eines Schichtverbundes mit epitaktisch gewachsenen Schichten aus einem Formgedächtnis-Material und Schichtverbund mit epitaktisch gewachsenen Schichten aus einem magnetischen Formgedächtnis-Material sowie deren Verwendung,
(Process for fabrication of a layer composite with epitaxially grown layers of a shape memory material and layer composite with epitaxially grown layers of a magnetic shape memory material as well as its utilization)
DE 10 2008 001 005

M. Kohl, J. Barth, Bistabiler magnetischer Aktuator aus einer Formgedächtnislegierung,
(Bistable magnetic actuator of a shape memory alloy)
DE 10 2008 027 325

T. Grund, J. Barth, M. Kohl, Vorrichtung und Verfahren zum selektiven Übertragen einer mikrostrukturierten Komponente,
(Setup and procedure for selective transfer of a micromachined component)
DE 10 2009 017 306.4

M. Kohl, B. Krevet, Nichtresonanter thermomechanischer Energiewandler,
(Non-resonant thermo-mechanical energy transducer)
EP 13 401050.3.

Refereed Journals (last five years)

2020

S. Rastjoo, R. Fechner, L. Bumke, M. Kötz, E. Quandt and M. Kohl, Development and co-integration of a SMA/Si bimorph nanoactuator for Si photonic circuits, Microelectronic Engineering 225 (2020) 111257. DOI:10.1016/j.mee.2020.111257

G. Ulpiani, F. Bruederlin, R. Weidemann, G. Ranzi, M. Santamouris, and M. Kohl, Upscaling of SMA film-based elastocaloric cooling, Applied Thermal Engineering 180 (2020) 115867. DOI:10.1016/j.applthermaleng.2020.115867

C.M. Craciunescu, M. Kohl and A. Ercuta, Micro-actuation design in VO2-based bimorph cantilevers, Smart Mater. Struct. 29 (2020) 115035 (10pp). 
DOI:10.1088/1361-665X/abb353

S. Ahmadi, K. Jacob, F. Wendler, A. Padhy, and M. Kohl, Active Damping of Thin Film Shape Memory Alloy Devices, Proc. Appl. Math. Mech. (2020);20:1 e202000310. 
DOI:10.1002/pamm.202000310

G. Arivanandhan, Z. Li, S. Curtis, P. Velvaluri, E. Quandt, and M. Kohl, Temperature Homogenization of Co-Integrated Shape Memory – Silicon Bimorph Actuators
Proceedings 2020, 64, 8; DOI:10.3390/IeCAT2020-08501

L. Seigner, O. Bezsmertna, S. Fähler, G. Tshikwand, F. Wendler and M. Kohl,  Origami-Inspired Shape Memory Folding Microactuator, Proceedings 2020, 64, 8; DOI:10.3390/IeCAT2020-08480

V. Vlnieska, A. Voigt, S, Wadhwa, J. Korvink, M. Kohl and K. Poletkin, Development of Control Circuit for Inductive Levitation Micro-Actuators, Proceedings 2020, 64, 39; DOI:10.3390/IeCAT2020-08479

H. Miki, E. Abe, S. Takeda, M. Ohtsuka, and M. Kohl, Metamagnetic Shape Memory Alloy Thin Plates Consolidated by Compression Shearing Method at Room Temperature for Thermal Energy Harvesting Device, Sensors and Materials 32,8 (2020) 2867–2875.

J. Joseph, M. Ohtsuka, H. Miki, M. Kohl, Upscaling of Thermomagnetic Generators Based on Heusler Alloy Films, Joule 4,12 (2020) 2718-2732. DOI:10.1016/j.joule.2020.10.019

2019

M. Kohl, R. Fechner, M. Gueltig, C. Megnin and H. Ossmer, Miniaturization of shape memory actuators, IEEE Xplore Digital Library (2018), Print ISBN: 978-3-8007-4675-0.

K.Jacob, S. Ahmadi, F. Wendler and M. Kohl, Vibration damping of portable devices by superelastic SMA foils, IEEE Xplore Digital Library (2018), Print ISBN: 978-3-8007-4675-0.

L. Liedtke, M. Gueltig, and M. Kohl, Miniature-scale energy harvesting based on the inverse magnetic shape memory effect, Int. Journal of Appl. Electromagnetics and Mechanics 59 (2019) 377-383; DOI 10.3233/JAE-171038.

F. Bruederlin, L. Bumke, E. Quandt, M. Kohl, Cascaded SMA-film based elastocaloric cooling, IEEE Xplore 1467-1470 (2019); DOI:10.1109/TRANSDUCERS.2019.8808605.

K. Jacob, S. Ahmadi, F. Wendler, S. Miyazaki, M. Gueltig, M. Kohl, Shape Memory Foil-Based Active Micro Damping for Portable Applications, IEEE Xplore 1467-1470 (2019); DOI:10.1109/TRANSDUCERS.2019.8808494

S. Rastjoo, X. Wang, A. Ludwig, and M. Kohl, Top-down fabrication and transformation properties of vanadium dioxide nanostructures, J. Appl. Phys. 125, 225104 (2019); DOI:10.1063/1.5085322.

C. Megnin, B. Moradi, J. Zuern, H. Ossmer, M. Gueltig, M. Kohl, Shape memory alloy based controllable multi-port microvalve, Microsystem Technologies (2019) DOI:10.1007/s00542-019-04614-w.

G. Ulpiani, G. Ranzi, F. Bruederlin, R. Paolini, F. Fiorito, S. Haddad, M. Kohl, M. Santamouris, Elastocaloric cooling: roadmap towards successful implementation in the built environment, AIMS Materials Science, 6(6) (2019) 1135–1152. DOI:10.3934/matersci.2019.6.1135

2018

F. Wendler, H. Ossmer, C. Chluba, E. Quandt and M. Kohl, Meso-scale simulation of elastocaloric cooling in SMA films, Acta Mater. 136 (2017) 105-117.

M. Kohl, M. Gültig, H. Ossmer, and C. Megnin, SMA foils for MEMS: From material properties to the engineering of microdevices, Shap. Mem. Superelasticity (2017)
DOI 10.1007/s40830-017-0144-x.

V.A. Chernenko, V.A. L’vov, S. Kabra, I.R. Aseguinolaza, M. Kohl, H. Hosoda and J.M. Barandiaran, Large anhysteretic deformation of shape memory alloys at postcritical temperatures and stresses, Phys. Status Solidi B 255(2) (2017) 1700273.

M. Kohl, M. Gueltig, and F. Wendler, Coupled simulation of thermomagnetic generation based on NiMnGa Heusler alloy films, Shap. Mem. Superelasticity (2018) 4, 242-255;
DOI 10.1007/s40830-018-0148-1.

L. Bumke, C. Chluba, H. Ossmer, C. Zamponi, M. Kohl and E. Quandt, Cobalt gradient evolution in sputtered TiNiCuCo films for elastocaloric cooling, Physica Status Solidi B 255(2) (2018) 1700299. doi:10.1002/pssb.201700299

F. Welsch, J. Ullrich, H. Ossmer, M. Schmidt, M. Kohl, C. Chluba, E. Quandt, A. Schütze, S. Seelecke, Numerical simulation and experimental investigation of the elastocaloric cooling effect in sputter-deposited TiNiCuCo thin films, Continuum Mech. Thermodyn. 30(1) (2018) 53-68. DOI 10.1007/s00161-017-0582-x.

J. Frenzel, G. Eggeler, E. Quandt, S. Seelecke and M. Kohl, High-performance elastocaloric materials for the engineering of bulk- and micro-cooling devices, MRS Bulletin 48 (2018) 280-284, DOI:10.1557/mrs.2018.67.

L. Liedtke, M. Gueltig, and M. Kohl, Miniature-scale energy harvesting based on the inverse magnetic shape memory effect, Int. Journal of Appl. Electromagnetics and Mechanics 2018; DOI 10.3233/JAE-171038.

S. Ahmadi, K. Jacob, F. Wendler, and M. Kohl, Shape Memory Alloy Film Damping for Smart Miniature Systems, International Journal of Smart and Nano Materials 9:3 (2018) 199-215, doi.org/10.1080/19475411.2018.1496953

F. Bruederlin, L. Bumke, C. Chluba, H. Ossmer, E. Quandt, M. Kohl, Elastocaloric cooling on the miniature scale: A review on materials and engineering of devices, Energy Technol. 2018, 6, 1588–1604, DOI:10.1002/ente.201800137

2017

R. Fechner, A. Muslija, M. Kohl, A micro test platform for in-situ mechanical and electrical characterization of nanostructured multiferroic materials, Microelectronic Engineering 173 (2017) 58-61. DOI: 10.1016/j.mee.2017.04.004

F. Lambrecht, N. Sagardiluz, M. Gueltig, I.R. Aseguinolaza, V.A. Chernenko, M. Kohl, Martensitic transformation in NiMnGa//Si bimorph nanoactuators with ultra-low hysteresis, Appl. Phys. Lett. 110 (2017) 213104.

F. Brüderlin, H. Ossmer, F. Wendler, S. Miyazaki and M. Kohl, SMA foil-based elastocaloric cooling – from material behavior to device engineering, J. Phys. D: Appl. Phys. 50 (2017) 424003 (11pp).

F. Wendler, H. Ossmer, C. Chluba, E. Quandt and M. Kohl, Meso-scale simulation of elastocaloric cooling in SMA films, Acta Mater. 136 (2017) 105-117.

M. Kohl, M. Gueltig, and F. Wendler, Coupled simulation of thermomagnetic generation based on NiMnGa Heusler alloy films, Shap. Mem. Superelasticity (2017) DOI 10.1007/s40830-018-0148-1.

M. Kohl, M. Gültig, H. Ossmer, and C. Megnin, SMA foils for MEMS: From material properties to the engineering of microdevices, Shap. Mem. Superelasticity (2017) DOI 10.1007/s40830-017-0144-x.

V.A. Chernenko, V.A. L’vov, S. Kabra, I.R. Aseguinolaza, M. Kohl, H. Hosoda and J.M. Barandiaran, Large anhysteretic deformation of shape memory alloys at postcritical temperatures and stresses, Phys. Status Solidi B 255(2) (2017) 1700273.

2016

G. Murasawaa, S.R. Yeduru, M. Kohl, Macroscopic inhomogeneous deformation behavior arising in single crystal Ni–Mn–Ga foils under tensile loading, Optics and Lasers in Engineering 87 (2016) 139–145.

H. Ossmer, C. Chluba, S. Kauffmann-Weiss, E. Quandt, and M. Kohl, TiNi-based films for elastocaloric microcooling - Fatigue life and device performance, APL Mater. 4, 064102 (2016); doi: 10.1063/1.4948271.

R. Yin, F. Wendler, B. Krevet, M. Kohl, A magnetic shape memory microactuator with intrinsic position sensing, Sensors and Actuators A 246 (2016) 48–57.

S. Mühlbrandt, A. Melikyan, T. Harter, K. Köhnle, A. Muslija, P. Vincze, S. Wolf, P. Jakobs, Y. Fedoryshyn, W. Freude, J. Leuthold, C. Koos, and M. Kohl, Silicon-plasmonic internal-photoemission detector for 40 Gbit/s data reception, Optica, Vol. 3, No. 7 (2016) 741–747.

H. Ossmer, F. Wendler, M. Gueltig, F. Lambrecht, S. Miyazaki, and M.Kohl, Energy-efficient miniature-scale heat pumping based on shape memory alloys, Smart Mater. Struct. 25 (2016) 085037 (13pp).

F. Lambrecht, C. Lay, R. Aseguinolaza, V. Chernenko, M. Kohl, NiMnGa/Si Shape Memory Bimorph Nanoactuation, Shap. Mem. Superelasticity, DOI 10.1007/s40830-016-0080-1

M. Gueltig, F. Wendler, H. Ossmer, M. Ohtsuka, H. Miki, T. Takagi, and M. Kohl, High-Performance Thermomagnetic Generators Based on Heusler Alloy Films, Adv. Energy Mater. 2016, 1601879, DOI: 10.1002/aenm.201601879.

H. Ossmer, M. Kohl, Elastocaloric cooling: Stretch to actively cool, Nature Energy, 2016, 16159, DOI: 10.1038/NENERGY.2016.159