Welcome to the Institute of Microstructure Technology (IMT)

IMT is a one-stop-shop for advanced micro and nano system development and upscaling. For every posed challenge, our skilled multidisciplinary teams develop novel technological and application-oriented solutions at forefront of the state-of-the-art. Our up-to-date technology platform is also accessible through the KNMFi services. The in-house lithography capabilities range down to 6 nm lateral resolution, and is coupled with our extensive know-how in fabrication process development. Our talented young scientists cover a wide range of applications and technology platforms. We extensively educate M.Sc. and Ph.D. thesis students, and our alumni hold key positions at the top technology addresses.

Carl Zeiss Foundation
Dr. Jingyuan Xu from the IMT, KIT was successful with her project at the Carl Zeiss Foundation.

As part of the CZS Nexus program, she will head young investigator group and receive around 1.5 million euros for a period of five years. Dr. Xu is investigating the development of CO₂-neutral elastocaloric cooling devices that are powered by heat and represent an electricity-free alternative. The focus is on cooling in the miniature range, for example, electronic chips or temperature control of bioanalytical chips. At the same time, Dr. Xu would like to lay a foundation for future climate-neutral cooling devices in the macro sector.

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Dr. Jingyuan Xu selected by the International Institute of Refrigeration (IIR)

Dr,. Jingyuan Xu had the honor of being selected by the International Institute of Refrigeration (IIR) as the recipient of the prestigious Sadi Carnot IIR Young Researchers Award. Named after the renowned father of thermodynamics, Dr. Nicolas Léonard Sadi Carnot, this award is presented every four years and represents the highest recognition for young researchers (under 35 years old) in the fields of thermodynamics, heat and mass transfer. Dr. Xu will be receiving the award at the 26th IIR International Congress of Refrigeration in Paris, France.

Innovative Student teams from IMT at the International ICAN Competition

By winning at the national German competition for the development of Microsystem-related product design – COSIMA (https://www.cosima-mems.de) in 2021 and 2022, two teams from IMT had qualified for the international ICAN competition held in June 2023 in Kyoto (https://www.ican-x.com/contest). At this event 23 Teams from around the world presented their product prototypes to a jury of seven international experts. After an exciting day of inspiring presentations, the team upGRADe won an amazing  third place with their upgrade kit that converts a conventional stove into an app-controlled cooking machine. The students have developed their ideas at IMT’s microsystems product development course (https://www.imt.kit.edu/lectures_3167.php). They join the ranks of successful graduates of the course, the most prominent example being our team that won ICAN in 2018 with their stitch healer “heat-it” that became a successful company. We wish the current teams a similarly bright future.

ERC Funds Prof. Uli LemmerMarkus Breig, KIT
ERC funds Prof. Uli Lemmer under the Advanced Grant to develop low-cost thermoelectric generators

The European Research Council (ERC) has awarded an Advanced Grant to Prof. Uli Lemmer from the Karlsruhe Institute of Technology (KIT). In the ORTHOGONAL project, a cost-effective and scalable process for manufacturing thermoelectric generators (TEGs) will be developed and tested. TEGs convert ambient heat directly into electrical energy and offer multiple potentials for recovering unused waste heat. Likewise, sensors for the Internet of Things (IoT) and portable electronic devices (wearables) can be sustainably supplied with energy. The ERC will fund the project with 2.4 million euros over the next five years.

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PaetzoldM. Breig, KIT
Ulrich W. Paetzold Receives ERC Consolidator Grant

T.T. Prof. Ulrich W. Paetzold has been awarded a highly endowed ERC Consolidator Grant from the European Research Council (ERC). He leads an international and highly interdisciplinary research group on new materials and processes for next generation photovoltaics. The ERC award will further strengthen his research on perovskite (tandem) photovoltaics. The proposed project aims to develop a radically new manufacturing process for high quality perovskite semiconductor that has the potential to overcome key challenges of perovskite thin film processing.

X-Ray Lenses SuitableArndt Last, KIT
X-ray Lenses Suitable For Polarization Experiments

X-ray lenses made out of polymer by KIT/IMT have been compared to beryllium, carbon and diamond lenses at beamline Petra III-P01: they are the only ones free of birefringence and dichroism and thus the only lenses suitable for polarization experiments.


Magnetresonanz Amadeus Bramsiepe, KIT
Prestigious Funding For Developing High Performance Tabletop NMR Units

Under the management of spokesperson Prof. Jan G. Korvink (IMT), 15 projects of scientists from the universities of Karlsruhe, Kaiserslautern, Konstanz and Stuttgart are funded within the “High Performance Compact Magnetic Resonance (HyPeriOn)” CRC (in German „SFB“). The team aims to reduce the volume of high-performance magnetic resonance systems by a factor of 200. (Photo: A. Bramsiepe, KIT).

KIT bottom-up
KIT Bottom-Up Project with IMT Participation Awarded

The interdisciplinary team including IMT members Dimitry Schmidt from the research group Prof. Dr. A. Nesterov-Müller and Dr. Mareen Stahlberger (originally from IOC) took third place in the ideas competition of 10th Innovation Competition NEULAND of the KIT with the idea of “BioHealing self-healing fuel cells”.

The basic principle of the idea is shown in this VIDEO.

The project "BioHealing - Self-healing fuel cell" is part of the innovation campus "Mobility of the Future" ICM of the KIT and the University of Stuttgart, with funding from the Ministry of Science of the State of Baden-Württemberg in the "Strategy Dialogue Automotive Industry".

Nachricht PaetzoldPhoto: B. A. Nejand, KIT
On a Way To The Market; Fully Scalable Perovskite/Perovskite Tandem Solar Modules

Light management, high-throughput laser interconnections and industrial coationg methods pave the way to the world’s first all perovskite tandem solar module - The team of T.T.Prof. U. Paetzold reports in Nature Energy


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