Institute of Microstructure Technology (IMT)

Advanced Nanofabrication

Dr. Judith Hohmann

The group focuses on the fabrication of nano and micro structures by electron beam lithography as well as preceding and following clean room processes. Ongoing projects aim at photonic devices, plasmonic devices and biophotonic sensors. Within KNMFi the Advanced Nanofabrication group offers electron beam lithography through the open access research infrastructure for academical or industrial partners.