LIGA uses deep X-ray lithography with synchrotron radiation for the production of high aspect ratio polymer microstructures. By shadow printing an X-ray mask is copied into an X-ray sensitive resist. A chemical developer dissolves the irradiated areas. Free lateral shape, structures heights from several µm up to several millimetres, vertical sidewalls with optical quality (Ra < 20 nm) and sub µm structure details are the basic characteristics of this process step.
The microstructure laboratory at KARA consists of three beamlines for deep x-ray lithography, each dedicated to a specific task in the LIGA-process. In this chapter we present the LIGA3 (Litho3) beamline, dedicated to the full range of X-ray lithography capabilities (XRL, DXRL and UDXRL). The typical data for the structural height ranges from several µm to about 5000 microns with a smallest width of 1 to 20 µm. Smaller line widths as well as higher structures are design dependent and therefore under further development. The whole system is under development.
The whole laboratory is placed inside a clean room for accurate environment conditions. The experimental equipment, together with the microstructure fabrication capabilities at IMT/KIT, is a unique installation for high precision and high aspect ratio microstructure fabrication. Even the resist preparation, development and optional electroforming process is done by using the clean room capabilities and expertise of IMT.
Publications
2020
Liquid compound refractive X-ray lens.
Last, A.; Gutekunst, J.; Opolka, A.; Krug, M.; Schwitzke, C.; Koch, R.; Mohr, J.
2020. Optics express, 28 (15), 22144–22150. doi:10.1364/OE.389058
Last, A.; Gutekunst, J.; Opolka, A.; Krug, M.; Schwitzke, C.; Koch, R.; Mohr, J.
2020. Optics express, 28 (15), 22144–22150. doi:10.1364/OE.389058
Shack–Hartmann wavefront sensors based on 2D refractive lens arrays and super-resolution multi-contrast X-ray imaging.
Mikhaylov, A.; Reich, S.; Zakharova, M.; Vlnieska, V.; Laptev, R.; Plech, A.; Kunka, D.
2020. Journal of synchrotron radiation, 27 (3), 788–795. doi:10.1107/S1600577520002830
Mikhaylov, A.; Reich, S.; Zakharova, M.; Vlnieska, V.; Laptev, R.; Plech, A.; Kunka, D.
2020. Journal of synchrotron radiation, 27 (3), 788–795. doi:10.1107/S1600577520002830
Self-aligned single-exposure deep x-ray lithography.
Nazmov, V. P.; Goldenberg, B. G.; Reznikova, E. F.; Boerner, M.
2020. SYNCHROTRON AND FREE ELECTRON LASER RADIATION: Generation and Application (SFR-2020), Article no: 060010, AIP Publishing. doi:10.1063/5.0030469
Nazmov, V. P.; Goldenberg, B. G.; Reznikova, E. F.; Boerner, M.
2020. SYNCHROTRON AND FREE ELECTRON LASER RADIATION: Generation and Application (SFR-2020), Article no: 060010, AIP Publishing. doi:10.1063/5.0030469
Development of an Array of Compound Refractive Lenses for Sub-Pixel Resolution, Large Field of View, and Time-Saving in Scanning Hard X-ray Microscopy.
Mamyrbayev, T.; Opolka, A.; Ershov, A.; Gutekunst, J.; Meyer, P.; Ikematsu, K.; Momose, A.; Last, A.
2020. Applied Sciences, 10 (12), Art.Nr.: 4132. doi:10.3390/app10124132
Mamyrbayev, T.; Opolka, A.; Ershov, A.; Gutekunst, J.; Meyer, P.; Ikematsu, K.; Momose, A.; Last, A.
2020. Applied Sciences, 10 (12), Art.Nr.: 4132. doi:10.3390/app10124132
2019
Super-Resolution Scanning Transmission X-Ray Imaging Using Single Biconcave Parabolic Refractive Lens Array.
Mamyrbayev, T.; Ikematsu, K.; Meyer, P.; Ershov, A.; Momose, A.; Mohr, J.
2019. Scientific reports, 9 (1), Article: 14366. doi:10.1038/s41598-019-50869-8
Mamyrbayev, T.; Ikematsu, K.; Meyer, P.; Ershov, A.; Momose, A.; Mohr, J.
2019. Scientific reports, 9 (1), Article: 14366. doi:10.1038/s41598-019-50869-8
Talbot-Lau x-ray phase-contrast setup for fast scanning of large samples.
Seifert, M.; Ludwig, V.; Kaeppler, S.; Horn, F.; Meyer, P.; Pelzer, G.; Rieger, J.; Sand, D.; Michel, T.; Mohr, J.; Riess, C.; Anton, G.
2019. Scientific reports, 9 (1), Article no: 4199. doi:10.1038/s41598-018-38030-3
Seifert, M.; Ludwig, V.; Kaeppler, S.; Horn, F.; Meyer, P.; Pelzer, G.; Rieger, J.; Sand, D.; Michel, T.; Mohr, J.; Riess, C.; Anton, G.
2019. Scientific reports, 9 (1), Article no: 4199. doi:10.1038/s41598-018-38030-3
Zooming X-rays with a single rotation in X-ray prism zoom lenses (XPZL).
Jark, W.; Opolka, A.; Cecilia, A.; Last, A.
2019. Optics express, 27 (12), 16781. doi:10.1364/OE.27.016781
Jark, W.; Opolka, A.; Cecilia, A.; Last, A.
2019. Optics express, 27 (12), 16781. doi:10.1364/OE.27.016781
Quality and parameter control of X-ray absorption gratings by angular X-ray transmission.
Gustschin, N.; Gustschin, A.; Meyer, P.; Viermetz, M.; Riederer, P.; Herzen, J.; Mohr, J.; Pfeifferark, F.
2019. Optics express, 27 (11), 15943–15955. doi:10.1364/OE.27.015943
Gustschin, N.; Gustschin, A.; Meyer, P.; Viermetz, M.; Riederer, P.; Herzen, J.; Mohr, J.; Pfeifferark, F.
2019. Optics express, 27 (11), 15943–15955. doi:10.1364/OE.27.015943
Influence of secondary effects in the fabrication of submicron resist structures using deep x-ray lithography.
Faisal, A.; Beckenbach, T.; Mohr, J.; Meyer, P.
2019. Journal of micro/nanolithography, MEMS and MOEMS, 18 (2), Article no: 023502. doi:10.1117/1.JMM.18.2.023502
Faisal, A.; Beckenbach, T.; Mohr, J.; Meyer, P.
2019. Journal of micro/nanolithography, MEMS and MOEMS, 18 (2), Article no: 023502. doi:10.1117/1.JMM.18.2.023502
2D lens array for multi-contrast X-ray imaging.
Mikhaylov, A.; Reich, S.; Plech, A.; Zakharova, M.; Vlnieska, V.; Kunka, D.
2019. EUV and X-ray Optics: Synergy between Laboratory and Space VI. Ed.: R. Hudec, Artice no: 1103208, Society of Photo-optical Instrumentation Engineers (SPIE). doi:10.1117/12.2520687
Mikhaylov, A.; Reich, S.; Plech, A.; Zakharova, M.; Vlnieska, V.; Kunka, D.
2019. EUV and X-ray Optics: Synergy between Laboratory and Space VI. Ed.: R. Hudec, Artice no: 1103208, Society of Photo-optical Instrumentation Engineers (SPIE). doi:10.1117/12.2520687
X-ray zoom lens allows for energy scans in X-ray microscopy.
Kornemann, E.; Zhou, T.; Márkus, O.; Opolka, A.; Schülli, T. U.; Mohr, J.; Last, A.
2019. Optics express, 27 (1), 185–195. doi:10.1364/OE.27.000185
Kornemann, E.; Zhou, T.; Márkus, O.; Opolka, A.; Schülli, T. U.; Mohr, J.; Last, A.
2019. Optics express, 27 (1), 185–195. doi:10.1364/OE.27.000185
2018
Depiction of pneumothoraces in a large animal model using x-ray dark-field radiography.
Hellbach, K.; Baehr, A.; De Marco, F.; Willer, K.; Gromann, L. B.; Herzen, J.; Dmochewitz, M.; Auweter, S.; Fingerle, A. A.; Noël, P. B.; Rummeny, E. J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; van der Heijden, H.; Wieberneit, N.; Proksa, R.; Koehler, T.; Rindt, K.; Schroeter, T. J.; Mohr, J.; Bamberg, F.; Ertl-Wagner, B.; Pfeiffer, F.; Reiser, M. F.
2018. Scientific Reports, 8 (1), 2602. doi:10.1038/s41598-018-20985-y
Hellbach, K.; Baehr, A.; De Marco, F.; Willer, K.; Gromann, L. B.; Herzen, J.; Dmochewitz, M.; Auweter, S.; Fingerle, A. A.; Noël, P. B.; Rummeny, E. J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; van der Heijden, H.; Wieberneit, N.; Proksa, R.; Koehler, T.; Rindt, K.; Schroeter, T. J.; Mohr, J.; Bamberg, F.; Ertl-Wagner, B.; Pfeiffer, F.; Reiser, M. F.
2018. Scientific Reports, 8 (1), 2602. doi:10.1038/s41598-018-20985-y
Optimizing illumination for full field imaging at high brilliance hard X-ray synchrotron sources.
Márkus, O.; Greving, I.; Kornemann, E.; Storm, M.; Beckmann, F.; Mohr, J.; Last, A.
2018. Optics express, 26 (23), 30435. doi:10.1364/OE.26.030435
Márkus, O.; Greving, I.; Kornemann, E.; Storm, M.; Beckmann, F.; Mohr, J.; Last, A.
2018. Optics express, 26 (23), 30435. doi:10.1364/OE.26.030435
Optical Characterization of an X-ray Zoom Lens.
Kornemann, E.; Márkus, O.; Opolka, A.; Sawhney, K.; Cecilia, A.; Hurst, M.; Baumbach, T.; Last, A.; Mohr, J.
2018. Microscopy and microanalysis, 24 (S2), 270–271. doi:10.1017/S1431927618013685
Kornemann, E.; Márkus, O.; Opolka, A.; Sawhney, K.; Cecilia, A.; Hurst, M.; Baumbach, T.; Last, A.; Mohr, J.
2018. Microscopy and microanalysis, 24 (S2), 270–271. doi:10.1017/S1431927618013685
On the application of micro hot embossing for mass fabrication of template-based dielectric resonator antenna arrays.
Qureshi, A. A.; Klymyshyn, D. M.; Börner, M.; Guttmann, M.; Schneider, M.; Mazhar, W.; Mohr, J.
2018. Microsystem technologies, 24 (9), 3893–3900. doi:10.1007/s00542-018-3889-z
Qureshi, A. A.; Klymyshyn, D. M.; Börner, M.; Guttmann, M.; Schneider, M.; Mazhar, W.; Mohr, J.
2018. Microsystem technologies, 24 (9), 3893–3900. doi:10.1007/s00542-018-3889-z
Chemical and Molecular Variations in Commercial Epoxide Photoresists for X-ray Lithography.
Vlnieska, V.; Zakharova, M.; Börner, M.; Bade, K.; Mohr, J.; Kunka, D.
2018. Applied Sciences, 8 (4), 528. doi:10.3390/app8040528
Vlnieska, V.; Zakharova, M.; Börner, M.; Bade, K.; Mohr, J.; Kunka, D.
2018. Applied Sciences, 8 (4), 528. doi:10.3390/app8040528
Development and Characterization of Two-Dimensional Gratings for Single-Shot X-ray Phase-Contrast Imaging.
Zakharova, M.; Vlnieska, V.; Fornasier, H.; Börner, M.; Rolo, T. dos S.; Mohr, J.; Kunka, D.
2018. Applied Sciences, 8 (3), 468. doi:10.3390/app8030468
Zakharova, M.; Vlnieska, V.; Fornasier, H.; Börner, M.; Rolo, T. dos S.; Mohr, J.; Kunka, D.
2018. Applied Sciences, 8 (3), 468. doi:10.3390/app8030468
X-ray dark-field imaging of the human lung—A feasibility study on a deceased body.
Willer, K.; Fingerle, A. A.; Gromann, L. B.; De Marco, F.; Herzen, J.; Achterhold, K.; Gleich, B.; Muenzel, D.; Scherer, K.; Renz, M.; Renger, B.; Kopp, F.; Kriner, F.; Fischer, F.; Braun, C.; Auweter, S.; Hellbach, K.; Reiser, M. F.; Schroeter, T.; Mohr, J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; van der Heijden, H.; Proksa, R.; Koehler, T.; Wieberneit, N.; Rindt, K.; Rummeny, E. J.; Pfeiffer, F.; Noël, P. B.; Nolan, A.
2018. PLoS one, 13 (9), e0204565. doi:10.1371/journal.pone.0204565
Willer, K.; Fingerle, A. A.; Gromann, L. B.; De Marco, F.; Herzen, J.; Achterhold, K.; Gleich, B.; Muenzel, D.; Scherer, K.; Renz, M.; Renger, B.; Kopp, F.; Kriner, F.; Fischer, F.; Braun, C.; Auweter, S.; Hellbach, K.; Reiser, M. F.; Schroeter, T.; Mohr, J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; van der Heijden, H.; Proksa, R.; Koehler, T.; Wieberneit, N.; Rindt, K.; Rummeny, E. J.; Pfeiffer, F.; Noël, P. B.; Nolan, A.
2018. PLoS one, 13 (9), e0204565. doi:10.1371/journal.pone.0204565
2017
Miniaturized compound refractive X-ray zoom lens.
Kornemann, E.; Márkus, O.; Opolka, A.; Zhou, T.; Greving, I.; Storm, M.; Krywka, C.; Last, A.; Mohr, J.
2017. Optics express, 25 (19), 22455–22466. doi:10.1364/OE.25.022455
Kornemann, E.; Márkus, O.; Opolka, A.; Zhou, T.; Greving, I.; Storm, M.; Krywka, C.; Last, A.; Mohr, J.
2017. Optics express, 25 (19), 22455–22466. doi:10.1364/OE.25.022455
High-energy x-ray Talbot-Lau radiography of a human knee.
Horn, F.; Gelse, K.; Jabari, S.; Hauke, C.; Kaeppler, S.; Ludwig, V.; Meyer, P.; Michel, T.; Mohr, J.; Pelzer, G.; Rieger, J.; Riess, C.; Seifert, M.; Anton, G.
2017. Physics in medicine and biology, 62 (16), 6729–6745. doi:10.1088/1361-6560/aa7721
Horn, F.; Gelse, K.; Jabari, S.; Hauke, C.; Kaeppler, S.; Ludwig, V.; Meyer, P.; Michel, T.; Mohr, J.; Pelzer, G.; Rieger, J.; Riess, C.; Seifert, M.; Anton, G.
2017. Physics in medicine and biology, 62 (16), 6729–6745. doi:10.1088/1361-6560/aa7721
Template-Based Dielectric Resonator Antenna Arrays for Millimeter-Wave Applications.
Qureshi, A. A.; Klymyshyn, D. M.; Tayfeh, M.; Mazhar, W.; Börner, M.; Mohr, J.
2017. IEEE transactions on antennas and propagation, 65 (9), 4576–4584. doi:10.1109/TAP.2017.2724585
Qureshi, A. A.; Klymyshyn, D. M.; Tayfeh, M.; Mazhar, W.; Börner, M.; Mohr, J.
2017. IEEE transactions on antennas and propagation, 65 (9), 4576–4584. doi:10.1109/TAP.2017.2724585
In-vivo X-ray Dark-Field Chest Radiography of a Pig.
Gromann, L. B.; De Marco, F.; Willer, K.; Noël, P. B.; Scherer, K.; Renger, B.; Gleich, B.; Achterhold, K.; Fingerle, A. A.; Muenzel, D.; Auweter, S.; Hellbach, K.; Reiser, M.; Baehr, A.; Dmochewitz, M.; Schroeter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Mohr, J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; Van Der Heijden, H.; Proksa, R.; Koehler, T.; Wieberneit, N.; Rindt, K.; Rummeny, E. J.; Pfeiffer, F.; Herzen, J.
2017. Scientific reports, 7 (1), Art. Nr. 4807. doi:10.1038/s41598-017-05101-w
Gromann, L. B.; De Marco, F.; Willer, K.; Noël, P. B.; Scherer, K.; Renger, B.; Gleich, B.; Achterhold, K.; Fingerle, A. A.; Muenzel, D.; Auweter, S.; Hellbach, K.; Reiser, M.; Baehr, A.; Dmochewitz, M.; Schroeter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Mohr, J.; Yaroshenko, A.; Maack, H.-I.; Pralow, T.; Van Der Heijden, H.; Proksa, R.; Koehler, T.; Wieberneit, N.; Rindt, K.; Rummeny, E. J.; Pfeiffer, F.; Herzen, J.
2017. Scientific reports, 7 (1), Art. Nr. 4807. doi:10.1038/s41598-017-05101-w
Large field-of-view tiled grating structures for X-ray phase-contrast imaging.
Schröter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Meiser, J.; Willer, K.; Gromann, L.; De Marco, F.; Herzen, J.; Noel, P.; Yaroshenko, A.; Hofmann, A.; Pfeiffer, F.; Mohr, J.
2017. Review of scientific instruments, 88 (2), Art.Nr.: 029901. doi:10.1063/1.4975395
Schröter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Meiser, J.; Willer, K.; Gromann, L.; De Marco, F.; Herzen, J.; Noel, P.; Yaroshenko, A.; Hofmann, A.; Pfeiffer, F.; Mohr, J.
2017. Review of scientific instruments, 88 (2), Art.Nr.: 029901. doi:10.1063/1.4975395
Optimization procedure for a Talbot-Lau x-ray phase-contrast imaging system.
Rieger, J.; Meyer, P.; Horn, F.; Pelzer, G.; Michel, T.; Mohr, J.; Anton, G.
2017. Journal of Instrumentation, 12 (4), Art. Nr.: P04018. doi:10.1088/1748-0221/12/04/P04018
Rieger, J.; Meyer, P.; Horn, F.; Pelzer, G.; Michel, T.; Mohr, J.; Anton, G.
2017. Journal of Instrumentation, 12 (4), Art. Nr.: P04018. doi:10.1088/1748-0221/12/04/P04018
Large-area full field x-ray differential phase-contrast imaging using 2D tiled gratings.
Schröter, T. J.; Koch, F. J.; Kunka, D.; Meyer, P.; Tietze, S.; Engelhardt, S.; Zuber, M.; Baumbach, T.; Willer, K.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Reichert, K.-M.; Hofmann, A.; Mohr, J.
2017. Journal of physics / D, 50 (22), Art.Nr. 225401. doi:10.1088/1361-6463/aa6e85
Schröter, T. J.; Koch, F. J.; Kunka, D.; Meyer, P.; Tietze, S.; Engelhardt, S.; Zuber, M.; Baumbach, T.; Willer, K.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Reichert, K.-M.; Hofmann, A.; Mohr, J.
2017. Journal of physics / D, 50 (22), Art.Nr. 225401. doi:10.1088/1361-6463/aa6e85
Low energy X-ray grating interferometry at the Brazilian Synchrotron.
Koch, F. J.; O’Dowd, F. P.; Cardoso, M. B.; Da Silva, R. R.; Cavicchioli, M.; Ribeiro, S. J. L.; Schröter, T. J.; Faisal, A.; Meyer, P.; Kunka, D.; Mohr, J.
2017. Optics communications, 393, 195–198. doi:10.1016/j.optcom.2017.02.055
Koch, F. J.; O’Dowd, F. P.; Cardoso, M. B.; Da Silva, R. R.; Cavicchioli, M.; Ribeiro, S. J. L.; Schröter, T. J.; Faisal, A.; Meyer, P.; Kunka, D.; Mohr, J.
2017. Optics communications, 393, 195–198. doi:10.1016/j.optcom.2017.02.055
Nondestructive characterization of fiber orientation in short fiber reinforced polymer composites with X-ray vector radiography.
Prade, F.; Schaff, F.; Senck, S.; Meyer, P.; Mohr, J.; Kastner, J.; Pfeiffer, F.
2017. NDT & E international, 86, 65–72. doi:10.1016/j.ndteint.2016.11.013
Prade, F.; Schaff, F.; Senck, S.; Meyer, P.; Mohr, J.; Kastner, J.; Pfeiffer, F.
2017. NDT & E international, 86, 65–72. doi:10.1016/j.ndteint.2016.11.013
Large area gratings by x-ray LIGA dynamic exposure for x-ray phase-contrast imaging.
Schröter, T. J.; Koch, F.; Meyer, P.; Baumann, M.; Münch, D.; Kunka, D.; Engelhardt, S.; Zuber, M.; Baumbach, T.; Mohr, J.
2017. Journal of micro/nanolithography, MEMS and MOEMS, 16 (1), 013501. doi:10.1117/1.JMM.16.1.013501
Schröter, T. J.; Koch, F.; Meyer, P.; Baumann, M.; Münch, D.; Kunka, D.; Engelhardt, S.; Zuber, M.; Baumbach, T.; Mohr, J.
2017. Journal of micro/nanolithography, MEMS and MOEMS, 16 (1), 013501. doi:10.1117/1.JMM.16.1.013501
Large field-of-view tiled grating structures for X-ray phase-contrast imaging.
Schröter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Meiser, J.; Willer, K.; Gromann, L.; De Marco, F.; Herzen, J.; Noel, P.; Yaroshenko, A.; Hofmann, A.; Pfeiffer, F.; Mohr, J.
2017. Review of scientific instruments, 88 (1), 015104. doi:10.1063/1.4973632
Schröter, T. J.; Koch, F. J.; Meyer, P.; Kunka, D.; Meiser, J.; Willer, K.; Gromann, L.; De Marco, F.; Herzen, J.; Noel, P.; Yaroshenko, A.; Hofmann, A.; Pfeiffer, F.; Mohr, J.
2017. Review of scientific instruments, 88 (1), 015104. doi:10.1063/1.4973632
2016
Polymer compound refractive lenses for hard X-ray nanofocusing.
Krywka, C.; Last, A.; Marschall, F.; Márkus, O.; Georgi, S.; Müller, M.; Mohr, J.
2016. AIP conference proceedings, 1764 (1), Art. Nr. 020001. doi:10.1063/1.4961129
Krywka, C.; Last, A.; Marschall, F.; Márkus, O.; Georgi, S.; Müller, M.; Mohr, J.
2016. AIP conference proceedings, 1764 (1), Art. Nr. 020001. doi:10.1063/1.4961129
Large-aperture two-dimensional x-ray refractive mosaic lenses.
Nazmov, V.; Reznikova, E.; Mohr, J.; Saile, V.; Tajiri, H.; Voigt, A.
2016. Applied optics, 55 (25), 7138–7141. doi:10.1364/AO.55.007138
Nazmov, V.; Reznikova, E.; Mohr, J.; Saile, V.; Tajiri, H.; Voigt, A.
2016. Applied optics, 55 (25), 7138–7141. doi:10.1364/AO.55.007138
Time resolved X-ray Dark-Field Tomography Revealing Water Transport in a Fresh Cement Sample.
Prade, F.; Fischer, K.; Heinz, D.; Meyer, P.; Mohr, J.; Pfeiffer, F.
2016. Scientific reports, 6, 29108/1–7. doi:10.1038/srep29108
Prade, F.; Fischer, K.; Heinz, D.; Meyer, P.; Mohr, J.; Pfeiffer, F.
2016. Scientific reports, 6, 29108/1–7. doi:10.1038/srep29108
Designing the phase grating for Talbot-Lau phase-contrast imaging systems: a simulation and experiment study.
Rieger, J.; Meyer, P.; Pelzer, G.; Weber, T.; Michel, T.; Mohr, J.; Anton, G.
2016. Optics express, 24 (12), 13357–13364. doi:10.1364/OE.24.013357
Rieger, J.; Meyer, P.; Pelzer, G.; Weber, T.; Michel, T.; Mohr, J.; Anton, G.
2016. Optics express, 24 (12), 13357–13364. doi:10.1364/OE.24.013357
Increasing the field of view in grating based X-ray phase contrast imaging using stitched gratings.
Meiser, J.; Willner, M.; Schröter, T.; Hofmann, A.; Rieger, J.; Koch, F.; Birnbacher, L.; Schüttler, M.; Kunka, D.; Meyer, P.; Faisal, A.; Amberger, M.; Duttenhofer, T.; Weber, T.; Hipp, A.; Ehn, S.; Walter, M.; Herzen, J.; Schulz, J.; Pfeiffer, F.; Mohr, J.
2016. Journal of X-Ray Science and Technology, 24 (3), 379–388. doi:10.3233/XST-160552
Meiser, J.; Willner, M.; Schröter, T.; Hofmann, A.; Rieger, J.; Koch, F.; Birnbacher, L.; Schüttler, M.; Kunka, D.; Meyer, P.; Faisal, A.; Amberger, M.; Duttenhofer, T.; Weber, T.; Hipp, A.; Ehn, S.; Walter, M.; Herzen, J.; Schulz, J.; Pfeiffer, F.; Mohr, J.
2016. Journal of X-Ray Science and Technology, 24 (3), 379–388. doi:10.3233/XST-160552
Simulation of aperture-optimised refractive lenses for hard X-ray full field microscopy.
Marschall, F.; Last, A.; Simon, M.; Vogt, H.; Mohr, J.
2016. Optics express, 24 (10), 10880–10889. doi:10.1364/OE.24.010880
Marschall, F.; Last, A.; Simon, M.; Vogt, H.; Mohr, J.
2016. Optics express, 24 (10), 10880–10889. doi:10.1364/OE.24.010880
Quantitative characterization of X-ray lenses from two fabrication techniques with grating interferometry.
Koch, F. J.; Detlefs, C.; Schröter, T. J.; Kunka, D.; Last, A.; Mohr, J.
2016. Optics express, 24 (9), 9168–9177. doi:10.1364/OE.24.009168
Koch, F. J.; Detlefs, C.; Schröter, T. J.; Kunka, D.; Last, A.; Mohr, J.
2016. Optics express, 24 (9), 9168–9177. doi:10.1364/OE.24.009168
Experimental Realisation of High-sensitivity Laboratory X-ray Grating-based Phase-contrast Computed Tomography.
Birnbacher, L.; Willner, M.; Velroyen, A.; Marschner, M.; Hipp, A.; Meiser, J.; Koch, F.; Schröter, T.; Kunka, D.; Mohr, J.; Pfeiffer, F.; Herzen, J.
2016. Scientific reports, 6 (4), 24022. doi:10.1038/srep24022
Birnbacher, L.; Willner, M.; Velroyen, A.; Marschner, M.; Hipp, A.; Meiser, J.; Koch, F.; Schröter, T.; Kunka, D.; Mohr, J.; Pfeiffer, F.; Herzen, J.
2016. Scientific reports, 6 (4), 24022. doi:10.1038/srep24022
Height control for small periodic structures using x-ray radiography.
Schüttler, M.; Meyer, P.; Schaff, F.; Yaroshenko, A.; Kunka, D.; Besser, H.; Pfeiffer, F.; Mohr, J.
2016. Measurement science and technology, 27 (2), 025015. doi:10.1088/0957-0233/27/2/025015
Schüttler, M.; Meyer, P.; Schaff, F.; Yaroshenko, A.; Kunka, D.; Besser, H.; Pfeiffer, F.; Mohr, J.
2016. Measurement science and technology, 27 (2), 025015. doi:10.1088/0957-0233/27/2/025015
A method of mechanical stabilization of ultra-high-AR microstructures.
Nazmov, V.; Reznikova, E.; Mohr, J.; Voigt, A.
2016. Journal of materials processing technology, 231, 319–325. doi:10.1016/j.jmatprotec.2015.12.002
Nazmov, V.; Reznikova, E.; Mohr, J.; Voigt, A.
2016. Journal of materials processing technology, 231, 319–325. doi:10.1016/j.jmatprotec.2015.12.002
2015
Note: Gratings on low absorbing substrates for x-ray phase contrast imaging.
Koch, F. J.; Schröter, T. J.; Kunka, D.; Meyer, P.; Meiser, J.; Faisal, A.; Khalil, M. I.; Birnbacher, L.; Viermetz, M.; Walter, M.; Schulz, J.; Pfeiffer, F.; Mohr, J.
2015. Review of scientific instruments, 86, 126114/1–3. doi:10.1063/1.4939055
Koch, F. J.; Schröter, T. J.; Kunka, D.; Meyer, P.; Meiser, J.; Faisal, A.; Khalil, M. I.; Birnbacher, L.; Viermetz, M.; Walter, M.; Schulz, J.; Pfeiffer, F.; Mohr, J.
2015. Review of scientific instruments, 86, 126114/1–3. doi:10.1063/1.4939055
Investigations on photoresist-based artificial dielectrics with tall-embedded metal grids and their resonator antenna application.
Aligodarz, M. T.; Klymyshyn, D. M.; Rashidian, A.; Börner, M.; Shafai, L.; Mohr, J.
2015. IEEE transactions on antennas and propagation, 63, 3826–3838. doi:10.1109/TAP.2015.2452966
Aligodarz, M. T.; Klymyshyn, D. M.; Rashidian, A.; Börner, M.; Shafai, L.; Mohr, J.
2015. IEEE transactions on antennas and propagation, 63, 3826–3838. doi:10.1109/TAP.2015.2452966
Modified x-ray polymer refractive cross lens with adiabatic contraction and its realization.
Nazmov, V.; Mohr, J.; Greving, I.; Ogurreck, M.; Wilde, F.
2015. Journal of micromechanics and microengineering, 25, 055010/1–7. doi:10.1088/0960-1317/25/5/055010
Nazmov, V.; Mohr, J.; Greving, I.; Ogurreck, M.; Wilde, F.
2015. Journal of micromechanics and microengineering, 25, 055010/1–7. doi:10.1088/0960-1317/25/5/055010
Development and characterization of ultra high aspect ratio microstructures made by ultra deep X-ray lithography.
Nazmov, V.; Reznikova, E.; Mohr, J.; Schulz, J.; Voigt, A.
2015. Journal of materials processing technology, 225, 170–177. doi:10.1016/j.jmatprotec.2015.05.030
Nazmov, V.; Reznikova, E.; Mohr, J.; Schulz, J.; Voigt, A.
2015. Journal of materials processing technology, 225, 170–177. doi:10.1016/j.jmatprotec.2015.05.030
Mit Röntgenlithographie gefertigte Gitterstrukturen ermöglichen neue Röntgenbildgebung in Medizin und Materialwissenschaft.
Koch, F.; Schröter, T.; Meiser, J.; Meyer, P.; Kunka, D.; Faisal, A.; Yaroshenko, A.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Duttenhofer, T.; Schulz, J.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Koch, F.; Schröter, T.; Meiser, J.; Meyer, P.; Kunka, D.; Faisal, A.; Yaroshenko, A.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Duttenhofer, T.; Schulz, J.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Microfabrication of high permittivity metamaterials with tall metal inclusion in thick photoresist layers.
Aligodarz, M. T.; Klymyshyn, D. M.; Börner, M.; Matthis, B.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Aligodarz, M. T.; Klymyshyn, D. M.; Börner, M.; Matthis, B.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Auswirkungen von Reflexen an Seitenwänden von Goldabsorbern in der Röntgentiefenlithographie.
Last, A.; Börner, M.; Marschall, F.; Meyer, P.; Simon, M.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Last, A.; Börner, M.; Marschall, F.; Meyer, P.; Simon, M.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Röntgenoptische Messung des Seitenwandwinkels direktlithografischer refraktiver Röntgenlinsen.
Last, A.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Last, A.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, MikroSystemTechnik Kongress (2015), Karlsruhe, Germany, October 26–28, 2015
Mit Röntgenlithographie gefertigte Gitterstrukturen ermöglichen neue Röntgenbildgebung in Medizin und Materialwissenschaft.
Koch, F.; Schröter, T.; Meiser, J.; Meyer, P.; Kunka, D.; Faisal, A.; Yaroshenko, A.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Duttenhofer, T.; Schulz, J.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015 Proceedings, 282–285, VDE Verlag
Koch, F.; Schröter, T.; Meiser, J.; Meyer, P.; Kunka, D.; Faisal, A.; Yaroshenko, A.; Birnbacher, L.; Prade, F.; Pfeiffer, F.; Duttenhofer, T.; Schulz, J.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015 Proceedings, 282–285, VDE Verlag
Microfabrication of high permittivity metamaterials with tall metal inclusion in thick photoresist layers.
Aligodarz, M. T.; Klymyshyn, D. M.; Börner, M.; Matthis, B.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015 Proceedings, 400–402, VDE Verlag
Aligodarz, M. T.; Klymyshyn, D. M.; Börner, M.; Matthis, B.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015 Proceedings, 400–402, VDE Verlag
Auswirkungen von Reflexen an Seitenwänden von Goldabsorbern in der Röntgentiefenlithographie.
Last, A.; Börner, M.; Marschall, F.; Meyer, P.; Simon, M.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015 Proceedings, 384–386, VDE Verlag
Last, A.; Börner, M.; Marschall, F.; Meyer, P.; Simon, M.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015 Proceedings, 384–386, VDE Verlag
Röntgenoptische Messung des Seitenwandwinkels direktlithografischer refraktiver Röntgenlinsen.
Last, A.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, 508–510, VDE Verlag
Last, A.; Markus, O.; Georgi, S.; Mohr, J.
2015. MikroSystemTechnik Kongress 2015, Karlsruhe, 26.-28.Oktober 2015, 508–510, VDE Verlag
Increasing the aperture of x-ray mosaic lenses by freeze drying.
Koch, F. J.; Marschall, F.; Meiser, J.; Markus, O.; Faisal, A.; Schröter, T.; Meyer, P.; Kunka, D.; Last, A.; Mohr, J.
2015. Journal of micromechanics and microengineering, 25 (7), Art. Nr. 075015. doi:10.1088/0960-1317/25/7/075015
Koch, F. J.; Marschall, F.; Meiser, J.; Markus, O.; Faisal, A.; Schröter, T.; Meyer, P.; Kunka, D.; Last, A.; Mohr, J.
2015. Journal of micromechanics and microengineering, 25 (7), Art. Nr. 075015. doi:10.1088/0960-1317/25/7/075015
X-ray-refractive-index measurements at photon energies above 100 keV with a grating interferometer.
Ruiz-Yaniz, M.; Zanette, I.; Rack, A.; Weitkamp, T.; Meyer, P.; Mohr, J.; Pfeiffer, F.
2015. Physical review / A, 91, 033803/1–5. doi:10.1103/PhysRevA.91.033803
Ruiz-Yaniz, M.; Zanette, I.; Rack, A.; Weitkamp, T.; Meyer, P.; Mohr, J.; Pfeiffer, F.
2015. Physical review / A, 91, 033803/1–5. doi:10.1103/PhysRevA.91.033803
X-ray grating interferometry at photon energies over 180 keV.
Ruiz-Yaniz, M.; Koch, F.; Zanette, I.; Rack, A.; Meyer, P.; Kunka, D.; Hipp, A.; Mohr, J.; Pfeiffer, F.
2015. Applied physics letters, 106, 151105/1–4. doi:10.1063/1.4917293
Ruiz-Yaniz, M.; Koch, F.; Zanette, I.; Rack, A.; Meyer, P.; Kunka, D.; Hipp, A.; Mohr, J.; Pfeiffer, F.
2015. Applied physics letters, 106, 151105/1–4. doi:10.1063/1.4917293