Fabrication Processes in Microsystem Technology
- Type: Lecture (V)
- Chair: KIT Department of Mechanical Engineering
- Semester: SS 2025
-
Time:
Wed 2025-04-23
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-04-30
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-05-07
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-05-14
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-05-21
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-05-28
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-06-04
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-06-18
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-06-25
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-07-02
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-07-09
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-07-16
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-07-23
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
Wed 2025-07-30
08:00 - 09:30, weekly
20.30 Seminarraum 0.016
20.30 Kollegiengebäude Mathematik (EG)
- Lecturer: Dr. Klaus Bade
- SWS: 2
- Lv-No.: 2143882
- Information: On-Site
| Content | The lecture offers an advanced understanding of manufacturing processes in microsystem technology. Basic aspects of microtechnological processing will be introduced. With examples from semiconductor microfabrication and microsystem technology the base processing steps for conditioning and finishing, patterning, removal are imparted. Nano-patterning is covered is also included and the micro-nano interface is discussed. By the help of typical processing steps elementary mechanisms, process execution, and equipment are explained. Additionally quality control, process control and environmental topics are included |
| Language of instruction | German |
| Bibliography | M. Madou CRC Press, Boca Raton, 1997 W. Menz, J. Mohr, O. Paul Mikrosystemtechnik für Ingenieure Dritte Auflage, Wiley-VCH, Weinheim 2005 L.F. Thompson, C.G. Willson, A.J. Bowden |