The lecture provides an in-depth overview of manufacturing technologies for structure generation in microsystems engineering. A range of fundamental technologies is presented in detail, while related methods are introduced to enable independent further study. In addition to subtractive processes, particular emphasis is placed on modern additive structuring techniques. Various materials are considered, each with their specific properties and processing requirements.

A further focus lies on the design and application of manufacturing techniques for the fabrication of microscale devices. Relationships between process requirements (applications), materials, design, and manufacturing methods are systematically addressed. Aspects such as dimensional accuracy, structural quality, and surface properties are evaluated with respect to fabrication and functionality.

All process steps are explained in the context of applications from different areas of microsystems engineering, particularly microfluidics, in-situ and operando analytics, as well as micro process engineering. A solid understanding of the underlying mechanisms at the interface of engineering, physics, and chemistry is developed. Key concepts such as mass transport and kinetic control are used to derive relationships between process parameters and structural properties.

A particular focus is placed on the analysis of interactions within complex process chains and on cause–effect relationships between individual manufacturing steps. In addition, aspects such as surface homogeneity and defect control are discussed as key factors influencing the quality of microscale structures and their performance in applications.

Menz, W., Mohr, J., O. Paul: Mikrosystemtechnik für Ingenieure, VCH-Verlag, Weinheim, 2005

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011

Die Vorlesung wird nur im Wintersemester angeboten.

Die Lehrveranstaltung wird in der Regel auf Englisch gehalten. Bei einer geringen Anzahl an englischsprachigen Studierenden kann die Durchführung auf Deutsch erfolgen. Die Lehrmaterialien werden in englischer Sprache zur Verfügung gestellt.

The lecture is offered exclusively in the winter semester.

The course is generally taught in English. Depending on the number of English-speaking students, it may be conducted in German. Course materials will be provided in English.