Kluck, S.; Prediger, R.; Hambitzer, L.; Nekoonam, N.; Dreher, F.; Luitz, M.; Lunzer, M.; Worgull, M.; Schneider, M.; Rapp, B. E.; Kotz-Helmer, F.
Sub‐Micron Replication of Fused Silica Glass and Amorphous Metals for Tool‐Based Manufacturing
2024. Advanced Science, Art.-Nr.: 2405320. doi:10.1002/advs.202405320  

Boinski, A.-K.; Riemer, O.; Karpuschewski, B.; Schneider, M.; Guttmann, M.; Worgull, M.
Fast Tool Machining and Hot embossing for the manufacture of diffractive structured surfaces
2022. Precision engineering, 7 (4), 12–19. doi:10.1016/j.precisioneng.2021.10.002 

Weiser, P.; Kietz, R.; Schneider, M.; Worgull, M.; Hölscher, H.
Roll-to-roll fabrication of superhydrophobic pads covered with nanofur for the efficient clean-up of oil spills
2022. Beilstein Journal of Nanotechnology, 13, 1228–1239. doi:10.3762/bjnano.13.102 

Martin-Rubio, C.; Rivelles, A.; Schneider, M.; Del Hoyo, J. C.; Privitera, V.; Worgull, M.; Maicas, M.; Sanz, R.
Magnetic characterization of Permalloy nanodome surfaces on flexible PEEK/TiO 2 vertical nanotubes composites
2022. IEEE Transactions on Magnetics, 59 (2), Art.Nr.: 6500106. doi:10.1109/TMAG.2022.3212831 

Roger, J.; Schorn, L. K.; Heydarian, M.; Farag, A.; Feeney, T.; Baumann, D.; Hu, H.; Laufer, F.; Duan, W.; Ding, K.; Lambertz, A.; Fassl, P.; Worgull, M.; Paetzold, U. W.
Laminated Monolithic Perovskite/Silicon Tandem Photovoltaics
2022. Advanced Energy Materials, 12 (27), Art.-Nr. 2200961. doi:10.1002/aenm.202200961  

Wu, W.; Guttmann, M.; Schneider, M.; Thelen, R.; Worgull, M.; Gomard, G.; Hölscher, H.
Snake‐Inspired, Nano‐Stepped Surface with Tunable Frictional Anisotropy Made from a Shape‐Memory Polymer for Unidirectional Transport of Microparticles
2021. Advanced functional materials, 31 (19), Art.-Nr.: 2009611. doi:10.1002/adfm.202009611  

Schneider, N.; Gspann, T.; Kolew, A.; Schneider, M.; Leuthold, J.; Worgull, M.
High Resolution On‐Demand Nanostructures
2020. Physica status solidi / A, 217 (20), Art.Nr. 1900688. doi:10.1002/pssa.201900688 

Díaz Lantada, A.; Kumar, R.; Guttmann, M.; Wissmann, M.; Schneider, M.; Worgull, M.; Hengsbach, S.; Rupp, F.; Bade, K.; Hirtz, M.; Sekula-Neuner, S.
Synergies between Surface Microstructuring and Molecular Nanopatterning for Controlling Cell Populations on Polymeric Biointerfaces
2020. Polymers, 12 (3), Article No.655. doi:10.3390/polym12030655  

Díaz Lantada, A.; Mazarío Picazo, N.; Guttmann, M.; Wissmann, M.; Schneider, M.; Worgull, M.; Hengsbach, S.; Rupp, F.; Bade, K.; Plaza, G. R.
Soft-Lithography of Polyacrylamide Hydrogels Using Microstructured Templates: Towards Controlled Cell Populations on Biointerfaces
2020. Materials, 13 (7), 1586. doi:10.3390/ma13071586  

Schmager, R.; Roger, J.; Schwenzer, J. A.; Schackmar, F.; Abzieher, T.; Malekshahi Byranvand, M.; Abdollahi Nejand, B.; Worgull, M.; Richards, B. S.; Paetzold, U. W.
Laminated Perovskite Photovoltaics: Enabling Novel Layer Combinations and Device Architectures
2020. Advanced functional materials, 30 (9), Art. Nr.: 1907481. doi:10.1002/adfm.201907481  

Kotz, F.; Striegel, A.; Schneider, N.; Worgull, M.; Rapp, B. E.
High-throughput thermal replication of transparent fused silica glass
2019. Microfluidics, BioMEMS, and Medical Microsystems XVII: SPIE Bios, 2-4 February 2019, San Francisco, CA. Ed.: B.L. Gray, Article no: 1087503, Society of Photo-optical Instrumentation Engineers (SPIE). doi:10.1117/12.2506155 

Zou, W.; Sackmann, J.; Striegel, A.; Worgull, M.; Schomburg, W. K.
Comparison of hot embossing micro structures with and without ultrasound
2019. Microsystem technologies, 25 (11), 4185–4195. doi:10.1007/s00542-019-04469-1 

Postulka, N.; Striegel, A.; Krausse, M.; Mager, D.; Spiehl, D.; Meckel, T.; Worgull, M.; Biesalski, M.
Combining wax printing with hot embossing for the design of geometrically well-defined microfluidic papers
2019. ACS applied materials & interfaces, 11 (4), 4578–4587. doi:10.1021/acsami.8b18133 

Striegel, A.; Schneider, M.; Schneider, N.; Benkel, C.; Worgull, M.
Seamless tool fabrication for Roll-to-Roll microreplication
2018. Microelectronic engineering, 194, 8–14. doi:10.1016/j.mee.2018.02.022 

Kotz, F.; Schneider, N.; Striegel, A.; Wolfschläger, A.; Keller, N.; Worgull, M.; Bauer, W.; Schild, D.; Milich, M.; Greiner, C.; Helmer, D.; Rapp, B. E.
Nanocomposites: Glassomer-Processing Fused Silica Glass Like a Polymer (Adv. Mater. 22/2018) [Nur Titelseite]
2018. Advanced materials, 30 (22), Art.Nr. 1870151. doi:10.1002/adma.201870151 

Kotz, F.; Schneider, N.; Striegel, A.; Wolfschläger, A.; Keller, N.; Worgull, M.; Bauer, W.; Schild, D.; Milich, M.; Greiner, C.; Helmer, D.; Rapp, B. E.
Glassomer-Processing Fused Silica Glass Like a Polymer
2018. Advanced materials, 30 (22), 1707100. doi:10.1002/adma.201707100 

Xiao, L.; Finlay, J. A.; Röhrig, M.; Mieszkin, S.; Worgull, M.; Hölscher, H.; Callow, J. A.; Callow, M. E.; Grunze, M.; Rosenhahn, A.
Topographic cues guide the attachment of diatom cells and algal zoospores
2018. Biofouling, 34 (1), 86–97. doi:10.1080/08927014.2017.1408801 

Schauer, S.; Schmager, R.; Hünig, R.; Ding, K.; Paetzold, U. W.; Lemmer, U.; Worgull, M.; Hölscher, H.; Gomard, G.
Disordered diffraction gratings tailored by shape-memory based wrinkling and their application to photovoltaics
2018. Optical materials express, 8 (1), 184–198. doi:10.1364/OME.8.000184 

Zeiger, C.; Kumberg, J.; Vüllers, F.; Worgull, M.; Hölscher, H.; Kavalenka, M. N.
Selective filtration of oil/water mixtures with bioinspired porous membranes
2017. RSC Advances, 7 (52), 32806–32811. doi:10.1039/C7RA05385A  

Schauer, S.; Worgull, M.; Hölscher, H.
Bio-inspired hierarchical micro- and nano-wrinkles obtained via mechanically directed self-assembly on shape-memory polymers
2017. Soft matter, 13 (24), 4328–4334. doi:10.1039/C7SM00154A 

Syurik, J.; Siddique, R. H.; Dollmann, A.; Gomard, G.; Schneider, M.; Worgull, M.; Wiegand, G.; Hölscher, H.
Bio-inspired, large scale, highly-scattering films for nanoparticle-alternative white surfaces
2017. Scientific reports, 7, Art. Nr.: 46637. doi:10.1038/srep46637  

Richter, C.; Kirschner, N.; Worgull, M.; Rapp, B. E.
Fast and cheap fabrication of molding tools for polymer replication
2017. Microfluidics, BioMEMS, and Medical Microsystems XV, San Francisco, California, United States, 28th January 2017. Ed.: B. L. Gray, Art.Nr. 100610D, Society of Photo-optical Instrumentation Engineers (SPIE). doi:10.1117/12.2249831 

Kavalenka, M. N.; Vüllers, F.; Kumberg, J.; Zeiger, C.; Trouillet, V.; Stein, S.; Ava, T. T.; Li, C.; Worgull, M.; Hölscher, H.
Adaptable bioinspired special wetting surface for multifunctional oil/water separation
2017. Scientific reports, 7, Art. Nr.: 39970. doi:10.1038/srep39970  

Vüllers, F.; Gomard, G.; Preinfalk, J. B.; Klampaftis, E.; Worgull, M.; Richards, B.; Hölscher, H.; Kavalenka, M. N.
Bioinspired Superhydrophobic Highly Transmissive Films for Optical Applications
2016. Small. doi:10.1002/smll.201601443 

Ebraert, E.; Wissmann, M.; Barie, N.; Guttmann, M.; Schneider, M.; Kolew, A.; Worgull, M.; Beri, S.; Watte, J.; Thienpont, H.; Van Erps, J.
Replication of self-centering optical fiber alignment structures using hot embossing
2016. Micro-Optics 2016, Brussels, B, April 3, 2016. Ed. H. Thienpont, 98880M, Society of Photo-optical Instrumentation Engineers (SPIE). doi:10.1117/12.2227685 

Ebraert, E.; Wissmann, M.; Guttmann, M.; Kolew, A.; Worgull, M.; Barie, N.; Schneider, M.; Hofmann, A.; Beri, S.; Watte, J.; Thienpont, H.; Van Erps, J.
Hot-embossing replication of self-centering optical fiber alignment structures prototyped by deep proton writing
2016. Optical engineering, 55 (7), Art. Nr. 076112. doi:10.1117/1.OE.55.7.076112 

Kotz, F.; Plewa, K.; Bauer, W.; Schneider, N.; Keller, N.; Nargang, T.; Helmer, D.; Sachsenheimer, K.; Schäfer, M.; Worgull, M.; Greiner, C.; Richter, C.; Rapp, B.
Liquid Glass: A Facile Soft Replication Method for Structuring Glass
2016. Advanced materials, 28 (23), 4646–4650. doi:10.1002/adma.201506089 

Keller, N.; Nargang, T. M.; Runck, M.; Kotz, F.; Striegel, A.; Sachsenheimer, K.; Klemm, D.; Länge, K.; Worgull, M.; Richter, C.; Helmer, D.; Rapp, B. E.
Tacky cyclic olefin copolymer: a biocompatible bonding technique for the fabrication of microfluidic channels in COC
2016. Lab on a chip, 16 (9), 1561–1564. doi:10.1039/C5LC01498K  

Schauer, S.; Meier, T.; Reinhard, M.; Röhrig, M.; Schneider, M.; Heilig, M.; Kolew, A.; Worgull, M.; Hölscher, H.
Tunable Diffractive Optical Elements Based on Shape-Memory Polymers Fabricated via Hot Embossing
2016. ACS applied materials & interfaces, 8 (14), 9423–9430. doi:10.1021/acsami.6b00679 

Meier, T.; Bur, J.; Reinhard, M.; Schneider, M.; Kolew, A.; Worgull, M.; Hölscher, H.
Programmable and self-demolding microstructured molds fabricated from shape-memory polymers
2015. Journal of micromechanics and microengineering, 25, 065017/1–8. doi:10.1088/0960-1317/25/6/065017 

Kavalenka, M. N.; Vüllers, F.; Lischker, S.; Zeiger, C.; Hopf, A.; Röhrig, M.; Rapp, B. E.; Worgull, M.; Hölscher, H.
Bioinspired air-retaining nanofur for drag reduction
2015. ACS applied materials & interfaces, 7, 10651–10655. doi:10.1021/acsami.5b01772 

Schauer, S.; Liu, X.; Worgull, M.; Lemmer, U.; Hölscher, H.
Shape-memory polymers as flexible resonator substrates for continuously tunable organic DFB lasers
2015. Optical materials express, 5 (3), 576–584. doi:10.1364/OME.5.000576  

Nargang, T. M.; Brockmann, L.; Nikolov, P. M.; Schild, D.; Helmer, D.; Keller, N.; Sachsenheimer, K.; Wilhelm, E.; Pires, L.; Dirschka, M.; Kolew, A.; Schneider, M.; Worgull, M.; Giselbrecht, S.; Neumann, C.; Rapp, B. E.
Liquid polystyrene: a room-temperature photocurable soft lithography compatible pour-and-cure-type polystyrene
2014. Lab on a chip, 14 (15), 2698–2708. doi:10.1039/C4LC00045E  

Nargang, T. M.; Brockmann, L.; Nikolov, P.; Schild, D.; Helmer, D.; Keller, N.; Dirschka, M.; Kolew, A.; Worgull, M.; Giselbrecht, S.; Neumann, C.; Rapp, B. E.
Liquid polystyrene: a photocurable liquid polystyrene prepolymer as new materials for microfluidic prototyping
2014. 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), San Antonio, TX, October 26-30, 2014, 1740–1742, Chemical and Biological Microsystems Society (CBMS) 

Schneider, N.; Zeiger, C.; Kolew, A.; Schneider, M.; Leuthold, J.; Hölscher, H.; Worgull, M.
Nanothermoforming of hierarchical optical components utilizing shape memory polymers as active molds
2014. Optical materials express, 4 (9), 1895–1902. doi:10.1364/OME.4.001895  

Röhrig, M.; Mail, M.; Schneider, M.; Louvin, H.; Hopf, A.; Schimmel, T.; Worgull, M.; Hölscher, H.
Nanofur for biomimetic applications
2014. Advanced materials interfaces, 1, 1300083/1–10. doi:10.1002/admi.201300083 

Kavalenka, M. N.; Hopf, A.; Schneider, M.; Worgull, M.; Hölscher, H.
Wood-based microhaired superhydrophobic and underwater superoleophobic surfaces for oil/water separation
2014. RSC Advances, 4 (59), 31079–31083. doi:10.1039/C4RA04029E 

Steidle, N.; Ahrens, R.; Worgull, M.; Guber, A.; Schneider, M.
Fabrication of Polymeric Microfluidic Devices with Tunable Wetting Behaviour for Biomedical Applications
2013. 35th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, Osaka, Japan, 3rd - 7th July 2013, 6659–6662, Institute of Electrical and Electronics Engineers (IEEE). doi:10.1109/EMBC.2013.6611083 

Worgull, M.; Schneider, M.; Röhrig, M.; Meier, T.; Heilig, M.; Kolew, A.; Feit, K.; Hölscher, H.; Leuthold, J.
Hot embossing and thermoforming of biodegradable three-dimensional wood structures
2013. RSC Advances, 3 (43), 20060–20064. doi:10.1039/c3ra42642d 

Röhrig, M.; Schneider, M.; Etienne, G.; Oulhadj, F.; Pfannes, F.; Kolew, A.; Worgull, M.; Hölscher, H.
Hot pulling and embossing of hierarchical nano- and micro-structures
2013. Journal of micromechanics and microengineering, 23 (10), 105014/1–7. doi:10.1088/0960-1317/23/10/105014 

Gottwald, E.; Kleintschek, T.; Giselbrecht, S.; Truckenmüller, R.; Altmann, B.; Worgull, M.; Döpfert, J.; Schad, L.; Heilmann, M.
Characterization of a chip-based bioreactor for three-dimensional cell cultivation via Magnetic Resonance Imaging = Charakterisierung eines Chip-basierten Bioreaktors für die dreidimensionale Kultivierung von Zellen mittels Magnetresonanz-Tomographie
2013. Zeitschrift für medizinische Physik, 23 (2), 102–110. doi:10.1016/j.zemedi.2013.01.003 

Steidle, N.; Hahn, T.; Bader, C.; Schneider, C.; Ahrens, R.; Worgull, M.; Guber, A.
Micro- and nanostructured microfluidic chip for specific protein immobilization
2013. 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2013), Freiburg, October 27-31, 2013, 128–131, Chemical and Biological Microsystems Society (CBMS) 

Steidle, N. E.; Schneider, M.; Ahrens, R.; Worgull, M.; Guber, A. E.
Fabrication of polymeric microfluidic devices with tunable wetting behavior for biomedical applications
2013. Proceedings of the 35th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC-13), Osaka, J, July 3-7, 2013, 6659–6662, Institute of Electrical and Electronics Engineers (IEEE) 

Kolew, A.; Heilig, M.; Schneider, M.; Sikora, K.; Münch, D.; Worgull, M.
Hot embossing of thermoplastic multilayered stacks
2012. Microsystem Technologies, 18 (11), 1857–1861. doi:10.1007/s00542-012-1502-4 

Röhrig, M.; Thiel, M.; Worgull, M.; Hölscher, H.
3D direct laser writing of nano- and microstructured hierarchical gecko-mimicking surfaces
2012. Small, 8, 3009–3015. doi:10.1002/smll.201200308 

Worgull, M.; Kolew, A.; Heilig, M.; Schneider, M.; Dinglreiter, H.; Rapp, B. E.
Hot embossing of high performance polymers
2011. Microsystem Technologies, 17 (4), 585–592. doi:10.1007/s00542-010-1155-0 

Schober, A.; Fernekorn, U.; Lübbers, B.; Hampl, J.; Weise, F.; Schlingloff, G.; Gebinoga, M.; Worgull, M.; Schneider, M.; Augspurger, C.; Hildmann, C.; Kittler, M.; Donahue, M.
Applied nano bio systems with microfluidics and biosensors for three‐dimensional cell culture
2011. Materialwissenschaft und Werkstofftechnik, 42 (2), 139–146. doi:10.1002/mawe.201100746 

Kolew, A.; Münch, D.; Sikora, K.; Worgull, M.
Hot embossing of micro and sub-micro structured inserts for polymer replication
2011. Microsystem Technologies, 17 (4), 609–618. doi:10.1007/s00542-010-1182-x 

Heilig, M.; Schneider, M.; Dinglreiter, H.; Worgull, M.
Technology of microthermoforming of complex three-dimensional parts with multiscale features
2011. Microsystem Technologies, 17 (4), 593–600. doi:10.1007/s00542-010-1203-9 

Heilig, M.; Giselbrecht, S.; Guber, A. E.; Worgull, M.
Microthermoforming of nanostructured polymer films: a new bonding method for the integration of nanostructures in 3-dimensional cavities
2010. Microsystem Technologies, 16 (7), 1221–1231. doi:10.1007/s00542-010-1072-2 

Schober, A.; Augspurger, C.; Fernekorn, U.; Weibezahn, K. F.; Schlingloff, G.; Gebinoga, M.; Worgull, M.; Schneider, M.; Hildmann, C.; Weise, F.; Hampl, J.; Silveira, L.; Cimalla, I.; Lübbers, B.
Microfluidics and biosensors as tools for NanoBioSystems research with applications in the ’Life Science’
2010. Materials Science and Engineering B, 169, 174–181. doi:10.1016/j.mseb.2009.12.042 

Röhrig, M.; Heilig, M.; Schneider, M.; Kolew, A.; Kaiser, K.; Guttmann, M.; Worgull, M.
Universelle Fixierung von Shim-Formeinsätzen für die Mikro- und Nanoreplikation auf Basis von Polymerfolien
2010. Galvanotechnik, 101, 1646–59 

Rapp, B. E.; Schneider, M.; Worgull, M.
Hot punching on an 8 inch substrate as an alternative technology to produce holes on a large scale
2010. Microsystem Technologies, 16, 1201–06. doi:10.1007/s00542-009-0943-x 

Griffiths, C. A.; Bigot, S.; Brousseau, E.; Worgull, M.; Heckele, M.; Nestler, J.; Auerswald, J.
Investigation of polymer inserts as prototyping tooling for micro injection moulding
2010. International Journal of Advanced Manufacturing Technology, 47, 111–23. doi:10.1007/s00170-009-2038-3 

Worgull, M.; Heckele, M.; Mappes, T.; Matthis, B.; Tosello, G.; Metz, T.; Gavillet, J.; Koltay, P.; Hansen, H. N.
Sub μm structured lotus surfaces manufacturing
2009. Microsystem Technologies, 15, 1327–33. doi:10.1007/s00542-008-0744-7 

Kabanemi, K. K.; Marcotte, J. P.; Hetu, J. F.; Worgull, M.; Heckele, M.
Numerical simulation of a thermoviscoelastic frictional problem with application to the hot-embossing process for manufacturing of microcomponents
2009. International Polymer Processing, 24, 174–84. doi:10.3139/217.2227 

Worgull, M.; Kabanemi, K. K.; Marcotte, J. P.; Hetu, J. F.; Heckele, M.
Modeling of large area hot embossing
2008. Microsystem Technologies, 14, 1061–66. doi:10.1007/s00542-007-0493-z 

Mappes, T.; Worgull, M.; Heckele, M.; Mohr, J.
Submicron polymer structures with X-ray lithography and hot embossing
2008. Microsystem Technologies, 14, 1721–25. doi:10.1007/s00542-007-0499-6 

Worgull, M.; Hetu, J. F.; Kabanemi, K. K.; Heckele, M.
Hot embossing of microstructures: characterization of friction during demolding
2008. Microsystem Technologies, 14, 767–73. doi:10.1007/s00542-007-0492-0 

Worgull, M.; Hetu, J. F.; Kabanemi, K. K.; Heckele, M.
Modeling and optimization of the hot embossing process for micro- and nanocomponent fabrication
2006. Microsystem Technologies, 12, 947–52. doi:10.1007/s00542-006-0124-0 

Worgull, M.; Heckele, M.; Schomburg, W. K.
Large-scale hot embossing
2005. Microsystem Technologies, 12, 110–15. doi:10.1007/s00542-005-0012-z 

Worgull, M.; Heckele, M.
New aspects of simulation in hot embossing
2004. Microsystem Technologies, Bergman, K. [Hrsg.] DTIP 2003 : Symp.on Design, Test, Integration and Packaging of MEMS/MOEMS, Cannes, F, May 5-7, 2003 New York, N.Y. : IEEE, 2003, s.432-37, 10, 272–74. doi:10.1007/s00542-004-0418-z