Introduction to Microsystem Technology II

Links
Content

- Introduction in Nano- and Microtechnologies
- Lithography
- LIGA-technique
- Mechanical microfabrication
- Patterning with lasers
- Assembly and packaging
- Microsystems

Language of instructionEnglish
Bibliography

Menz, W., Mohr, J., O. Paul: Mikrosystemtechnik für Ingenieure, VCH-Verlag, Weinheim, 2005

M. Madou
Fundamentals of Microfabrication
Taylor & Francis Ltd.; Auflage: 3. Auflage. 2011

Organisational issues

Topic: Grundlagen der Mikrosystemtechnik II (MST II) SS 21
Time: Thursdays 14:00 - 15:30

10.91 Redtenbacher-Hörsaal